Godin:Protocols/Glow Research Auto Glow
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Revision as of 19:55, 24 June 2010 by
Noam S. Lightstone
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Auto Glow
Glow Research
Auto Glow
Contents
1
Operation Procedure
1.1
Start
1.2
Stop
2
Calibration Procedure
Operation Procedure
Start
Turn on the vacuum pump at the pump
Press
AC ON
Rotate selector to "RF SET POINT"
Adjust the “RF SET POINT" to 150 watts by rotating the knob
Insert sample in chamber
Place chamber lid
Close the door properly (The RF cannot be activated unless the door is closed)
Rotate selector to "PRESSURE"
Set the timer as desired (30 s recommended)
Press
Vacuum
Press
Tuning Auto/Man
(Light turns on)
Turn on gas flow
Once the pressure reading is below 0.5 Torr, press
Process Start
You may press
Abort Process
if you want to terminate manually
Stop
Push
Vacuum
to vent to atmosphere
Stop gas flow
Remove sample
Turn off the machine
Turn off the vacuum pump
Calibration Procedure
Turn on the vacuum pump at the pump
Press
AC ON
Switch
Selector
to
RF Set Point
Set
RF Set Point
to Zero
Switch
Selector
to Pressure
Press
Vacuum
Ensure the
Tuning Auto/Man button
is not pushed in so that the lamp does not turn on
Once the pressure falls to to 0.5 Torr, press
Process Start
Turn on gas flow by flipping GAS 1 toggle switch up
Let the pressure reading stabilize
Set the pressure to approximately 1 Torr by adjusting the gas flow. The system can operate within the range of 0.5 to 1.2 Torr
Press
Process Abort
Press
Vacuum
Close
Gas Flow
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