Godin:Protocols/Glow Research Auto Glow

Auto Glow

Glow Research Auto Glow

Operation Procedure

Start

1. Turn on the vacuum pump at the pump
2. Press AC ON
3. Insert sample in chamber
4. Place chamber lid
5. Close the door properly (The RF cannot be activated unless the door is closed)
6. Press Vacuum
7. Press Tuning Auto/Man (Light turns on)
8. Set the timer as desired (30 s recommended)
9. Turn on gas flow
10. Press Process Start; the process will begin automatically once the pressure falls below 0.5 Torr.
11. You may press Abort Process if you want to terminate manually

Stop

1. Push Vacuum to vent to atmosphere
2. Stop flow
3. Remove sample
4. Turn off the machine
5. Turn off the vacuum pump

Calibration Procedure

1. Turn on the vacuum pump at the pump
2. Press AC ON
3. Press Vacuum
4. Once the pressure falls to to 0.5 Torr, press Process Start
5. Turn on gas flow
6. Switch Selector to RF Set Point
7. Set RF to Zero
8. Switch Selector to display pressure
9. Turn on Gas flow
10. Set the pressure to 1 Torr by adjusting the gas flow
11. Press Abort
12. Press Vacuum
13. Close Gas Flow
14. Adjust the “Power set point” to 150 watts