Godin:Protocols/Glow Research Auto Glow: Difference between revisions
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==Calibration Procedure== | ==Calibration Procedure== | ||
#Turn on the vacuum pump | #Turn on the vacuum pump by turning on the power bar. Open the valve. | ||
#Press ''AC On'' | #Press ''AC On'' | ||
#Place sample in chamber | |||
#Press ''Vacuum''; You may have to hold the door in place for a few seconds, to ensure a proper seal. | |||
#Switch ''Selector'' to ''RF Set Point'' | #Switch ''Selector'' to ''RF Set Point'' | ||
#Set ''RF Set Point'' to zero | #Set ''RF Set Point'' to zero | ||
#Switch ''Selector'' to ''Pressure'' | #Switch ''Selector'' to ''Pressure'' | ||
#Ensure the ''Tuning Auto/Man button'' is not pressed | #Ensure the ''Tuning Auto/Man button'' is not pressed | ||
#Turn on gas | #Turn on gas line by flipping GAS 1 toggle switch up; Note that GAS 2 is connected to the outside of the cleanroom by a tube, for use with argon. | ||
#Once the pressure falls below 0.5 Torr, press ''Process Start'' | #Once the pressure falls below 0.5 Torr, press ''Process Start'' | ||
#Let the pressure reading stabilize | #Let the pressure reading stabilize | ||
#Set the pressure to approximately 1 Torr by adjusting the gas flow (rotating the flowmeter knob). The system can operate within the range of 0.5 to 1.2 Torr | #Set the pressure to approximately 1 Torr by adjusting the gas flow (rotating the flowmeter knob). The system can operate within the range of 0.5 to 1.2 Torr | ||
#Press ''Process Abort'' | #Press ''Process Abort'' | ||
# | #If you wish to end the session, close gas line and press ''Vacuum''. Otherwise Jump to ''Operation Procedure''. | ||
Revision as of 09:53, 24 November 2011
Glow Research Auto Glow Source of InformationYou can find an instructional video of the steps described here created by GlowResearch at: http://www.youtube.com/user/glowresearchplasma#p/a/u/1/tE8pfiYQxr4 <html><iframe width="425" height="349" src="http://www.youtube.com/embed/tE8pfiYQxr4" frameborder="0" allowfullscreen></iframe></html> Operation ProcedureStart
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Calibration Procedure
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