Godin:Protocols/Glow Research Auto Glow: Difference between revisions

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''Glow Research'' [http://www.glowresearch.org/applications.html Auto Glow]
''Glow Research'' [http://www.glowresearch.org/applications.html Auto Glow]


==Operation Procedure==
==Source of Information==
===Start===
You can find an instructional video of the steps described here created by GlowResearch at: http://www.youtube.com/user/glowresearchplasma#p/a/u/1/tE8pfiYQxr4


#Turn on the vacuum pump at the pump
==Start==
#Press ''AC On''
#Turn on the vacuum pump by turning on the power bar and open the valve.
#Rotate selector to ''RF Set Point'
#Press ''AC ON''.
#Adjust the ''RF Set Point'' to 150 watts by rotating the knob
#Switch Selector to ''RF Set Point''.
#Insert sample in chamber
#Set ''RF Set Point'' to zero.
#Place chamber lid
#Switch ''Selector'' to ''Pressure''.
#Close the door properly (The RF cannot be activated unless the door is closed)
#Set timer to 5 min.
#Rotate selector to ''PRESSURE''
#Make sure the chamber is clean. Use ethanol wipes as necessary.
#Set the timer as desired (30 s recommended)
#Place sample in chamber.
#Press ''Vacuum''
#Press ''Vacuum''. You may have to hold the door in place to ensure a proper seal. Make sure the door is well centered, a misaligned door will cause the chamber to leak.
#Press ''Tuning Auto/Man'' (Light turns on)
#Ensure the ''Tuning Auto/Man'' button is not pressed (light is off).
#Turn on gas flow
#Once the pressure falls below 0.5 Torr, press ''Process Start''.
#Once the pressure reading is below 0.5 Torr, press ''Process Start''
#Turn on gas line by flipping GAS 1 toggle switch up; Note that GAS 2 is connected to the outside of the cleanroom by a tube, for use with argon.
#You may press ''Abort Process'' if you want to terminate manually
#Let the pressure go down until 0.85 torr.
#Turn off the gas line.
#Press ''Process Abort''.
#Switch ''Selector'' to ''RF Set Point''.
#Adjust the RF Set Point rotating the knob (30W recommended).
#Press ''Tuning Auto/Man'' (light turns on).
#Rotate Selector to Pressure.
#Set the timer as desired (30s recommended). Press ''Process Abort'' to reset timer.
#Press ''Process Start'', once the pressure reading is below 0.5 Torr. Your process will begin.
#Turn gas line on '''IMMEDIATELY''' by flipping GAS 1 toggle switch up; You may press ''Abort Process'' if you want to terminate manually.
<br>
'''IMPORTANT:''' Make sure the pressure stabilizes between 0.8-1.3 Torr during your process. Multiple “beeps” indicate you’re operating outside this range. If pressure is incorrect, immediately abort, and make sure you went through all the steps. <br>
'''ALSO IMPORTANT:''' Never, ever rotate any knobs on the black box. System flow rate has been carefully calibrated. Only flipping toggle switches up and down is allowed.


===Stop===
==Stop==
#Push ''Vacuum'' to vent to atmosphere
#Stop gas flow
#Remove sample
#Turn off the machine
#Turn off the vacuum pump


#Stop gas flow.
#Press ''Vacuum'' to vent to atmosphere. Make sure GAS 3 toggle switch is up, as chamber now vents through the black box. You can leave it open at all times.
#Remove sample.
#Make sure the chamber is clean. Use ethanol wipes as necessary.
#Turn off the machine.
#Close the valve.
#Turn off the vacuum pump (power bar).
<br>
<br>
 
'''Having problems with the system? Talk to Jason or Dominique. They will help you for troubleshooting.'''
==Calibration Procedure==
#Turn on the vacuum pump at the pump
#Press ''AC ON''
#Switch ''Selector'' to ''RF Set Point''
#Set ''RF Set Point'' to Zero
#Switch ''Selector'' to Pressure
#Press ''Vacuum''
#Ensure the ''Tuning Auto/Man button'' is not pushed in so that the lamp does not turn on
#Once the pressure falls to to 0.5 Torr, press ''Process Start''
#Turn on gas flow by flipping GAS 1 toggle switch up
#Let the pressure reading stabilize
#Set the pressure to approximately 1 Torr by adjusting the gas flow (rotating the flowmeter knob). The system can operate within the range of 0.5 to 1.2 Torr
#Press ''Process Abort''
#Press ''Vacuum''
#Close gas flow

Latest revision as of 09:03, 27 March 2012

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Auto Glow

Glow Research Auto Glow

Source of Information

You can find an instructional video of the steps described here created by GlowResearch at: http://www.youtube.com/user/glowresearchplasma#p/a/u/1/tE8pfiYQxr4

Start

  1. Turn on the vacuum pump by turning on the power bar and open the valve.
  2. Press AC ON.
  3. Switch Selector to RF Set Point.
  4. Set RF Set Point to zero.
  5. Switch Selector to Pressure.
  6. Set timer to 5 min.
  7. Make sure the chamber is clean. Use ethanol wipes as necessary.
  8. Place sample in chamber.
  9. Press Vacuum. You may have to hold the door in place to ensure a proper seal. Make sure the door is well centered, a misaligned door will cause the chamber to leak.
  10. Ensure the Tuning Auto/Man button is not pressed (light is off).
  11. Once the pressure falls below 0.5 Torr, press Process Start.
  12. Turn on gas line by flipping GAS 1 toggle switch up; Note that GAS 2 is connected to the outside of the cleanroom by a tube, for use with argon.
  13. Let the pressure go down until 0.85 torr.
  14. Turn off the gas line.
  15. Press Process Abort.
  16. Switch Selector to RF Set Point.
  17. Adjust the RF Set Point rotating the knob (30W recommended).
  18. Press Tuning Auto/Man (light turns on).
  19. Rotate Selector to Pressure.
  20. Set the timer as desired (30s recommended). Press Process Abort to reset timer.
  21. Press Process Start, once the pressure reading is below 0.5 Torr. Your process will begin.
  22. Turn gas line on IMMEDIATELY by flipping GAS 1 toggle switch up; You may press Abort Process if you want to terminate manually.


IMPORTANT: Make sure the pressure stabilizes between 0.8-1.3 Torr during your process. Multiple “beeps” indicate you’re operating outside this range. If pressure is incorrect, immediately abort, and make sure you went through all the steps.
ALSO IMPORTANT: Never, ever rotate any knobs on the black box. System flow rate has been carefully calibrated. Only flipping toggle switches up and down is allowed.

Stop

  1. Stop gas flow.
  2. Press Vacuum to vent to atmosphere. Make sure GAS 3 toggle switch is up, as chamber now vents through the black box. You can leave it open at all times.
  3. Remove sample.
  4. Make sure the chamber is clean. Use ethanol wipes as necessary.
  5. Turn off the machine.
  6. Close the valve.
  7. Turn off the vacuum pump (power bar).


Having problems with the system? Talk to Jason or Dominique. They will help you for troubleshooting.

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