Godin:Protocols/Glow Research Auto Glow: Difference between revisions
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You can find an instructional video of the steps described here created by GlowResearch at: http://www.youtube.com/user/glowresearchplasma#p/a/u/1/tE8pfiYQxr4 | You can find an instructional video of the steps described here created by GlowResearch at: http://www.youtube.com/user/glowresearchplasma#p/a/u/1/tE8pfiYQxr4 | ||
== | ==Start== | ||
#Turn on the vacuum pump by turning on the power bar and open the valve. | |||
#Press ''AC ON''. | |||
#Switch Selector to ''RF Set Point''. | |||
#Set ''RF Set Point'' to zero. | |||
#Switch ''Selector'' to ''Pressure''. | |||
#Set timer to 5 min. | |||
#Make sure the chamber is clean. Use ethanol wipes as necessary. | |||
#Place sample in chamber. | |||
#Press ''Vacuum''. You may have to hold the door in place to ensure a proper seal. Make sure the door is well centered, a misaligned door will cause the chamber to leak. | |||
#Ensure the ''Tuning Auto/Man'' button is not pressed (light is off). | |||
#Once the pressure falls below 0.5 Torr, press ''Process Start''. | |||
#Turn on gas line by flipping GAS 1 toggle switch up; Note that GAS 2 is connected to the outside of the cleanroom by a tube, for use with argon. | |||
#Let the pressure go down until 0.85 torr. | |||
#Turn off the gas line. | |||
#Press ''Process Abort''. | |||
#Switch ''Selector'' to ''RF Set Point''. | |||
#Adjust the RF Set Point rotating the knob (30W recommended). | |||
#Press ''Tuning Auto/Man'' (light turns on). | |||
#Rotate Selector to Pressure. | |||
#Set the timer as desired (30s recommended). Press ''Process Abort'' to reset timer. | |||
#Press ''Process Start'', once the pressure reading is below 0.5 Torr. Your process will begin. | |||
#Turn gas line on '''IMMEDIATELY''' by flipping GAS 1 toggle switch up; You may press ''Abort Process'' if you want to terminate manually. | |||
<br> | |||
'''IMPORTANT:''' Make sure the pressure stabilizes between 0.8-1.3 Torr during your process. Multiple “beeps” indicate you’re operating outside this range. If pressure is incorrect, immediately abort, and make sure you went through all the steps. <br> | |||
'''ALSO IMPORTANT:''' Never, ever rotate any knobs on the black box. System flow rate has been carefully calibrated. Only flipping toggle switches up and down is allowed. | |||
==Stop== | |||
#Stop gas flow. | |||
#Press ''Vacuum'' to vent to atmosphere. Make sure GAS 3 toggle switch is up, as chamber now vents through the black box. You can leave it open at all times. | |||
#Remove sample. | |||
#Make sure the chamber is clean. Use ethanol wipes as necessary. | |||
#Turn off the machine. | |||
#Close the valve. | |||
#Turn off the vacuum pump (power bar). | |||
<br> | <br> | ||
'''Having problems with the system? Talk to Jason or Dominique. They will help you for troubleshooting.''' | |||
Latest revision as of 09:03, 27 March 2012
Glow Research Auto Glow Source of InformationYou can find an instructional video of the steps described here created by GlowResearch at: http://www.youtube.com/user/glowresearchplasma#p/a/u/1/tE8pfiYQxr4 Start
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