Godin:Protocols/Glow Research Auto Glow: Difference between revisions
From OpenWetWare
Jump to navigationJump to search
No edit summary |
|||
Line 43: | Line 43: | ||
#Switch ''Selector'' to ''Pressure'' | #Switch ''Selector'' to ''Pressure'' | ||
#Press ''Vacuum'' | #Press ''Vacuum'' | ||
#Ensure the ''Tuning Auto/Man button'' is not | #Ensure the ''Tuning Auto/Man button'' is not pressed | ||
#Once the pressure falls | #Turn on gas flow by flipping GAS 1 toggle switch up; Note that GAS 2 is connected to the outside of the cleanroom by a tube, for use with argon. | ||
#Once the pressure falls below 0.5 Torr, press ''Process Start'' | |||
#Let the pressure reading stabilize | #Let the pressure reading stabilize | ||
#Set the pressure to approximately 1 Torr by adjusting the gas flow (rotating the flowmeter knob). The system can operate within the range of 0.5 to 1.2 Torr | #Set the pressure to approximately 1 Torr by adjusting the gas flow (rotating the flowmeter knob). The system can operate within the range of 0.5 to 1.2 Torr |
Revision as of 09:47, 24 November 2011
Glow Research Auto Glow Source of InformationYou can find an instructional video of the steps described here created by GlowResearch at: http://www.youtube.com/user/glowresearchplasma#p/a/u/1/tE8pfiYQxr4 <html><iframe width="425" height="349" src="http://www.youtube.com/embed/tE8pfiYQxr4" frameborder="0" allowfullscreen></iframe></html> Operation ProcedureStart
Stop
Calibration Procedure
|