Godin:Protocols/Glow Research Auto Glow: Difference between revisions

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===Stop===
===Stop===
#Push ''Vacuum'' to vent to atmosphere
#Push ''Vacuum'' to vent to atmosphere
#Stop flow
#Stop gas flow
#Remove sample  
#Remove sample  
#Turn off the machine
#Turn off the machine
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<br>
<br>
==Calibration Procedure==
==Calibration Procedure==
#Turn on the vacuum pump at the pump
#Turn on the vacuum pump at the pump

Revision as of 12:52, 24 June 2010

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Auto Glow

Glow Research Auto Glow

Operation Procedure

Start

  1. Turn on the vacuum pump at the pump
  2. Press AC ON
  3. Rotate selector to "RF SET POINT"
  4. Adjust the “RF SET POINT" to 150 watts by rotating the knob
  5. Insert sample in chamber
  6. Place chamber lid
  7. Close the door properly (The RF cannot be activated unless the door is closed)
  8. Rotate selector to "PRESSURE"
  9. Set the timer as desired (30 s recommended)
  10. Press Vacuum
  11. Press Tuning Auto/Man (Light turns on)
  12. Turn on gas flow
  13. Once the pressure reading is below 0.5 Torr, press Process Start
  14. You may press Abort Process if you want to terminate manually

Stop

  1. Push Vacuum to vent to atmosphere
  2. Stop gas flow
  3. Remove sample
  4. Turn off the machine
  5. Turn off the vacuum pump


Calibration Procedure

  1. Turn on the vacuum pump at the pump
  2. Press AC ON
  3. Switch Selector to RF Set Point
  4. Set RF to Zero
  5. Switch Selector to Pressure
  6. Press Vacuum
  7. Once the pressure falls to to 0.5 Torr, press Process Start
  8. Turn on gas flow by flipping GAS 1 toggle switch up
  9. Let the pressure reading stabilize
  10. Set the pressure to approximately 1 Torr by adjusting the gas flow. The system can operation in the range of 0.5 to 1.2 Torr
  11. Press Process Abort
  12. Press Vacuum
  13. Close Gas Flow