Godin:Protocols/Glow Research Auto Glow

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(Calibration Procedure)
Line 43: Line 43:
#Switch ''Selector'' to ''Pressure''
#Switch ''Selector'' to ''Pressure''
#Press ''Vacuum''
#Press ''Vacuum''
-
#Ensure the ''Tuning Auto/Man button'' is not pushed in so that the lamp does not turn on
+
#Ensure the ''Tuning Auto/Man button'' is not pressed
-
#Once the pressure falls to to 0.5 Torr, press ''Process Start''  
+
#Turn on gas flow by flipping GAS 1 toggle switch up; Note that GAS 2 is connected to the outside of the cleanroom by a tube, for use with argon.
-
#Turn on gas flow by flipping GAS 2 toggle switch up
+
#Once the pressure falls below 0.5 Torr, press ''Process Start''  
#Let the pressure reading stabilize
#Let the pressure reading stabilize
#Set the pressure to approximately 1 Torr by adjusting the gas flow (rotating the flowmeter knob). The system can operate within the range of 0.5 to 1.2 Torr
#Set the pressure to approximately 1 Torr by adjusting the gas flow (rotating the flowmeter knob). The system can operate within the range of 0.5 to 1.2 Torr

Revision as of 11:47, 24 November 2011

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Auto Glow
Auto Glow

Glow Research Auto Glow

Contents

Source of Information

You can find an instructional video of the steps described here created by GlowResearch at: http://www.youtube.com/user/glowresearchplasma#p/a/u/1/tE8pfiYQxr4

Operation Procedure

Start

  1. Turn on the vacuum pump at the pump
  2. Press AC On
  3. Rotate Selector to RF Set Point
  4. Adjust the RF Set Point to 150 watts by rotating the knob
  5. Insert sample in chamber
  6. Place chamber lid
  7. Close the door properly (The RF cannot be activated unless the door is closed)
  8. Rotate Selector to Pressure
  9. Set the timer as desired (30 s recommended)
  10. Press Vacuum
  11. Press Tuning Auto/Man (Light turns on)
  12. Turn on gas flow
  13. Once the pressure reading is below 0.5 Torr, press Process Start
  14. You may press Abort Process if you want to terminate manually

Stop

  1. Push Vacuum to vent to atmosphere
  2. Stop gas flow
  3. Remove sample
  4. Turn off the machine
  5. Turn off the vacuum pump


Calibration Procedure

  1. Turn on the vacuum pump at the pump
  2. Press AC On
  3. Switch Selector to RF Set Point
  4. Set RF Set Point to zero
  5. Switch Selector to Pressure
  6. Press Vacuum
  7. Ensure the Tuning Auto/Man button is not pressed
  8. Turn on gas flow by flipping GAS 1 toggle switch up; Note that GAS 2 is connected to the outside of the cleanroom by a tube, for use with argon.
  9. Once the pressure falls below 0.5 Torr, press Process Start
  10. Let the pressure reading stabilize
  11. Set the pressure to approximately 1 Torr by adjusting the gas flow (rotating the flowmeter knob). The system can operate within the range of 0.5 to 1.2 Torr
  12. Press Process Abort
  13. Press Vacuum
  14. Close gas flow
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