Godin:Protocols/Glow Research Auto Glow

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(Calibration Procedure)
(Calibration Procedure)
Line 37: Line 37:
==Calibration Procedure==
==Calibration Procedure==
-
#Turn on the vacuum pump at the pump
+
#Turn on the vacuum pump by turning on the power bar. Open the valve.
#Press ''AC On''
#Press ''AC On''
 +
#Place sample in chamber
 +
#Press ''Vacuum''; You may have to hold the door in place for a few seconds, to ensure a proper seal.
#Switch ''Selector'' to ''RF Set Point''
#Switch ''Selector'' to ''RF Set Point''
#Set ''RF Set Point'' to zero
#Set ''RF Set Point'' to zero
#Switch ''Selector'' to ''Pressure''
#Switch ''Selector'' to ''Pressure''
-
#Press ''Vacuum''
 
#Ensure the ''Tuning Auto/Man button'' is not pressed
#Ensure the ''Tuning Auto/Man button'' is not pressed
-
#Turn on gas flow by flipping GAS 1 toggle switch up; Note that GAS 2 is connected to the outside of the cleanroom by a tube, for use with argon.
+
#Turn on gas line by flipping GAS 1 toggle switch up; Note that GAS 2 is connected to the outside of the cleanroom by a tube, for use with argon.
#Once the pressure falls below 0.5 Torr, press ''Process Start''  
#Once the pressure falls below 0.5 Torr, press ''Process Start''  
#Let the pressure reading stabilize
#Let the pressure reading stabilize
#Set the pressure to approximately 1 Torr by adjusting the gas flow (rotating the flowmeter knob). The system can operate within the range of 0.5 to 1.2 Torr
#Set the pressure to approximately 1 Torr by adjusting the gas flow (rotating the flowmeter knob). The system can operate within the range of 0.5 to 1.2 Torr
#Press ''Process Abort''
#Press ''Process Abort''
-
#Press ''Vacuum''
+
#If you wish to end the session, close gas line and press ''Vacuum''. Otherwise Jump to ''Operation Procedure''.
-
#Close gas flow
+

Revision as of 12:53, 24 November 2011

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Auto Glow
Auto Glow

Glow Research Auto Glow

Contents

Source of Information

You can find an instructional video of the steps described here created by GlowResearch at: http://www.youtube.com/user/glowresearchplasma#p/a/u/1/tE8pfiYQxr4

Operation Procedure

Start

  1. Turn on the vacuum pump at the pump
  2. Press AC On
  3. Rotate Selector to RF Set Point
  4. Adjust the RF Set Point to 150 watts by rotating the knob
  5. Insert sample in chamber
  6. Place chamber lid
  7. Close the door properly (The RF cannot be activated unless the door is closed)
  8. Rotate Selector to Pressure
  9. Set the timer as desired (30 s recommended)
  10. Press Vacuum
  11. Press Tuning Auto/Man (Light turns on)
  12. Turn on gas flow
  13. Once the pressure reading is below 0.5 Torr, press Process Start
  14. You may press Abort Process if you want to terminate manually

Stop

  1. Push Vacuum to vent to atmosphere
  2. Stop gas flow
  3. Remove sample
  4. Turn off the machine
  5. Turn off the vacuum pump


Calibration Procedure

  1. Turn on the vacuum pump by turning on the power bar. Open the valve.
  2. Press AC On
  3. Place sample in chamber
  4. Press Vacuum; You may have to hold the door in place for a few seconds, to ensure a proper seal.
  5. Switch Selector to RF Set Point
  6. Set RF Set Point to zero
  7. Switch Selector to Pressure
  8. Ensure the Tuning Auto/Man button is not pressed
  9. Turn on gas line by flipping GAS 1 toggle switch up; Note that GAS 2 is connected to the outside of the cleanroom by a tube, for use with argon.
  10. Once the pressure falls below 0.5 Torr, press Process Start
  11. Let the pressure reading stabilize
  12. Set the pressure to approximately 1 Torr by adjusting the gas flow (rotating the flowmeter knob). The system can operate within the range of 0.5 to 1.2 Torr
  13. Press Process Abort
  14. If you wish to end the session, close gas line and press Vacuum. Otherwise Jump to Operation Procedure.
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