Godin:Protocols/Glow Research Auto Glow

Auto Glow

Glow Research Auto Glow

Source of Information

You can find an instructional video of the steps described here created by GlowResearch at: http://www.youtube.com/user/glowresearchplasma#p/a/u/1/tE8pfiYQxr4

Calibration Procedure

1. Turn on the vacuum pump by turning on the power bar. Open the valve.
2. Press AC On
3. Place sample in chamber, making sure it is clean. You may use ethanol and claen room wipes to clean.
4. Press Vacuum; You may have to hold the door in place for a few seconds, to ensure a proper seal.
5. Switch Selector to RF Set Point
6. Set RF Set Point to zero
7. Switch Selector to Pressure
8. Ensure the Tuning Auto/Man button is not pressed
9. Turn on gas line by flipping GAS 1 toggle switch up; Note that GAS 2 is connected to the outside of the cleanroom by a tube, for use with argon.
10. Set timer to 5 min
11. Once the pressure falls below 0.5 Torr, press Process Start
12. Let the pressure reading stabilize (2 min)
13. Set the pressure to approximately 1 Torr by adjusting the gas flow (rotating the flowmeter knob). The system can operate within the range of 0.5 to 1.2 Torr
14. Press Process Abort
15. If you wish to end the session, close gas line and press Vacuum. Otherwise Jump to Operation Procedure.

Operation Procedure

Start

1. Rotate Selector to RF Set Point
2. Adjust the RF Set Point to 30 watts by rotating the knob (or whatever setting you wish, 20-200W)
3. Rotate Selector to Pressure
4. Set the timer as desired (30s recommended)
5. Press Tuning Auto/Man (Light turns on)
6. Turn on gas flow
7. Once the pressure reading is below 0.5 Torr, press Process Start
8. You may press Abort Process if you want to terminate manually

Stop

1. Stop gas flow
2. Push Vacuum to vent to atmosphere
3. Remove sample
4. Turn off the machine
5. Close the valve
6. Turn off the vacuum pump (power bar)