Godin:Protocols/Glow Research Auto Glow

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#Turn on the vacuum pump by turning on the power bar. Open the valve.
#Turn on the vacuum pump by turning on the power bar. Open the valve.
#Press ''AC On''
#Press ''AC On''
-
#Place sample in chamber, making sure it is clean. You may use ethanol and claen room wipes to clean.
+
#Make sure the chamber is clean. Use ethanol wipes as necessary.
-
#Press ''Vacuum''; You may have to hold the door in place for a few seconds, to ensure a proper seal.
+
#Switch ''Selector'' to ''RF Set Point''
#Switch ''Selector'' to ''RF Set Point''
#Set ''RF Set Point'' to zero
#Set ''RF Set Point'' to zero
#Switch ''Selector'' to ''Pressure''
#Switch ''Selector'' to ''Pressure''
 +
#Set timer to 5 min
 +
#Press ''Vacuum''; You may have to hold the door in place for a few seconds, to ensure a proper seal.
#Ensure the ''Tuning Auto/Man button'' is not pressed
#Ensure the ''Tuning Auto/Man button'' is not pressed
 +
#Once the pressure falls below 0.5 Torr, press ''Process Start''
#Turn on gas line by flipping GAS 1 toggle switch up; Note that GAS 2 is connected to the outside of the cleanroom by a tube, for use with argon.
#Turn on gas line by flipping GAS 1 toggle switch up; Note that GAS 2 is connected to the outside of the cleanroom by a tube, for use with argon.
-
#Set timer to 5 min
+
#Let the pressure reading stabilize
-
#Once the pressure falls below 0.5 Torr, press ''Process Start''
+
#Set the pressure to approximately 1 Torr by adjusting the gas flow (rotating the flowmeter knob). The system likes to operate within the range of 0.5 to 1.2 Torr
-
#Let the pressure reading stabilize (2 min)
+
-
#Set the pressure to approximately 1 Torr by adjusting the gas flow (rotating the flowmeter knob). The system can operate within the range of 0.5 to 1.2 Torr
+
#Press ''Process Abort''
#Press ''Process Abort''
-
#If you wish to end the session, close gas line and press ''Vacuum''. Otherwise Jump to ''Operation Procedure''.
+
#Turn off the gas line
 +
#Press ''Vacuum'' to vent to atmosphere
 +
#If you wish to end the session, close vacuum valve and vacuum pump via power bar.
<br>
<br>
Line 29: Line 31:
===Start===
===Start===
 +
#Turn on the vacuum pump by turning on the power bar. Open the valve.
 +
#Press ''AC On''
#Rotate ''Selector'' to ''RF Set Point''
#Rotate ''Selector'' to ''RF Set Point''
#Adjust the ''RF Set Point'' to 30 watts by rotating the knob (or whatever setting you wish, 20-200W)
#Adjust the ''RF Set Point'' to 30 watts by rotating the knob (or whatever setting you wish, 20-200W)
Line 34: Line 38:
#Set the timer as desired (30s recommended)
#Set the timer as desired (30s recommended)
#Press ''Tuning Auto/Man'' (Light turns on)
#Press ''Tuning Auto/Man'' (Light turns on)
-
#Turn on gas flow
+
#Place sample in chamber, making sure it is clean. You may use ethanol and claen room wipes to clean.
-
#Once the pressure reading is below 0.5 Torr, press ''Process Start''
+
#Turn on gas line by flipping GAS 1 toggle switch up; Note that GAS 2 is connected to the outside of the cleanroom by a tube, for use with argon.
 +
#Press ''Process Start'', once the pressure reading is below 0.5 Torr, your process will begin
#You may press ''Abort Process'' if you want to terminate manually
#You may press ''Abort Process'' if you want to terminate manually
===Stop===
===Stop===
#Stop gas flow
#Stop gas flow
-
#Push ''Vacuum'' to vent to atmosphere
+
#Press ''Vacuum'' to vent to atmosphere
#Remove sample  
#Remove sample  
#Turn off the machine
#Turn off the machine

Revision as of 13:24, 24 November 2011

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Auto Glow
Auto Glow

Glow Research Auto Glow

Contents

Source of Information

You can find an instructional video of the steps described here created by GlowResearch at: http://www.youtube.com/user/glowresearchplasma#p/a/u/1/tE8pfiYQxr4

Calibration Procedure

  1. Turn on the vacuum pump by turning on the power bar. Open the valve.
  2. Press AC On
  3. Make sure the chamber is clean. Use ethanol wipes as necessary.
  4. Switch Selector to RF Set Point
  5. Set RF Set Point to zero
  6. Switch Selector to Pressure
  7. Set timer to 5 min
  8. Press Vacuum; You may have to hold the door in place for a few seconds, to ensure a proper seal.
  9. Ensure the Tuning Auto/Man button is not pressed
  10. Once the pressure falls below 0.5 Torr, press Process Start
  11. Turn on gas line by flipping GAS 1 toggle switch up; Note that GAS 2 is connected to the outside of the cleanroom by a tube, for use with argon.
  12. Let the pressure reading stabilize
  13. Set the pressure to approximately 1 Torr by adjusting the gas flow (rotating the flowmeter knob). The system likes to operate within the range of 0.5 to 1.2 Torr
  14. Press Process Abort
  15. Turn off the gas line
  16. Press Vacuum to vent to atmosphere
  17. If you wish to end the session, close vacuum valve and vacuum pump via power bar.


Operation Procedure

Start

  1. Turn on the vacuum pump by turning on the power bar. Open the valve.
  2. Press AC On
  3. Rotate Selector to RF Set Point
  4. Adjust the RF Set Point to 30 watts by rotating the knob (or whatever setting you wish, 20-200W)
  5. Rotate Selector to Pressure
  6. Set the timer as desired (30s recommended)
  7. Press Tuning Auto/Man (Light turns on)
  8. Place sample in chamber, making sure it is clean. You may use ethanol and claen room wipes to clean.
  9. Turn on gas line by flipping GAS 1 toggle switch up; Note that GAS 2 is connected to the outside of the cleanroom by a tube, for use with argon.
  10. Press Process Start, once the pressure reading is below 0.5 Torr, your process will begin
  11. You may press Abort Process if you want to terminate manually

Stop

  1. Stop gas flow
  2. Press Vacuum to vent to atmosphere
  3. Remove sample
  4. Turn off the machine
  5. Close the valve
  6. Turn off the vacuum pump (power bar)


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