Turn on the vacuum pump by turning on the power bar. Open the valve.
Press AC On
Make sure the chamber is clean. Use ethanol wipes as necessary.
Switch Selector to RF Set Point
Set RF Set Point to zero
Switch Selector to Pressure
Set timer to 5 min
Press Vacuum; You may have to hold the door in place for a few seconds, to ensure a proper seal.
Ensure the Tuning Auto/Man button is not pressed
Once the pressure falls below 0.5 Torr, press Process Start
Turn on gas line by flipping GAS 1 toggle switch up; Note that GAS 2 is connected to the outside of the cleanroom by a tube, for use with argon.
Let the pressure reading stabilize
Set the pressure to approximately 1 Torr by adjusting the gas flow (rotating the flowmeter knob). The system likes to operate within the range of 0.5 to 1.2 Torr
Press Process Abort
Turn off the gas line
Press Vacuum to vent to atmosphere
If you wish to end the session, close vacuum valve and vacuum pump via power bar.
Operation Procedure
Start
Turn on the vacuum pump by turning on the power bar. Open the valve.
Press AC On
Rotate Selector to RF Set Point
Adjust the RF Set Point to 30 watts by rotating the knob (or whatever setting you wish, 20-200W)
Rotate Selector to Pressure
Set the timer as desired (30s recommended)
Press Tuning Auto/Man (Light turns on)
Place sample in chamber, making sure it is clean. You may use ethanol and claen room wipes to clean.
Turn on gas line by flipping GAS 1 toggle switch up; Note that GAS 2 is connected to the outside of the cleanroom by a tube, for use with argon.
Press Process Start, once the pressure reading is below 0.5 Torr, your process will begin
You may press Abort Process if you want to terminate manually
