Glow Research Auto Glow
Operation Procedure
Start
- Turn on the vacuum pump at the pump
- Press AC ON
- Insert sample in chamber
- Place chamber lid
- Close the door properly (The RF cannot be activated unless the door is closed)
- Press Vacuum
- Press Tuning Auto/Man (Light turns on)
- Set the timer as desired (30 s recommended)
- Turn on gas flow
- Press Process Start; the process will begin automatically once the pressure falls below 0.5 Torr.
- You may press Abort Process if you want to terminate manually
Stop
- Push Vacuum to vent to atmosphere
- Stop flow
- Remove sample
- Turn off the machine
- Turn off the vacuum pump
Calibration Procedure
- Turn on the vacuum pump at the pump
- Press AC ON
- Switch Selector to RF Set Point
- Set RF to Zero
- Switch Selector to Pressure
- Press Vacuum
- Once the pressure falls to to 0.5 Torr, press Process Start
- Turn on gas flow by flipping GAS 1 toggle switch up
- Let the pressure reading stabilize
- Set the pressure to approximately 1 Torr by adjusting the gas flow. The system can operation in the range of 0.5 to 1.2 Torr
- Press Process Abort
- Press Vacuum
- Close Gas Flow
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