Adjust the RF Set Point to 150 watts by rotating the knob
Insert sample in chamber
Place chamber lid
Close the door properly (The RF cannot be activated unless the door is closed)
Rotate selector to PRESSURE
Set the timer as desired (30 s recommended)
Press Vacuum
Press Tuning Auto/Man (Light turns on)
Turn on gas flow
Once the pressure reading is below 0.5 Torr, press Process Start
You may press Abort Process if you want to terminate manually
Stop
Push Vacuum to vent to atmosphere
Stop gas flow
Remove sample
Turn off the machine
Turn off the vacuum pump
Calibration Procedure
Turn on the vacuum pump at the pump
Press AC On
Switch Selector to RF Set Point
Set RF Set Point to Zero
Switch Selector to Pressure
Press Vacuum
Ensure the Tuning Auto/Man button is not pushed in so that the lamp does not turn on
Once the pressure falls to to 0.5 Torr, press Process Start
Turn on gas flow by flipping GAS 1 toggle switch up
Let the pressure reading stabilize
Set the pressure to approximately 1 Torr by adjusting the gas flow (rotating the flowmeter knob). The system can operate within the range of 0.5 to 1.2 Torr