Turn on the vacuum pump by turning on the power bar. Open the valve.
Press AC On
Place sample in chamber
Press Vacuum; You may have to hold the door in place for a few seconds, to ensure a proper seal.
Switch Selector to RF Set Point
Set RF Set Point to zero
Switch Selector to Pressure
Ensure the Tuning Auto/Man button is not pressed
Turn on gas line by flipping GAS 1 toggle switch up; Note that GAS 2 is connected to the outside of the cleanroom by a tube, for use with argon.
Set timer to 5 min
Once the pressure falls below 0.5 Torr, press Process Start
Let the pressure reading stabilize (2 min)
Set the pressure to approximately 1 Torr by adjusting the gas flow (rotating the flowmeter knob). The system can operate within the range of 0.5 to 1.2 Torr
Press Process Abort
If you wish to end the session, close gas line and press Vacuum. Otherwise Jump to Operation Procedure.
Operation Procedure
Start
Rotate Selector to RF Set Point
Adjust the RF Set Point to 30 watts by rotating the knob (or whatever setting you wish, 20-200W)
Rotate Selector to Pressure
Set the timer as desired (30s recommended)
Press Tuning Auto/Man (Light turns on)
Turn on gas flow
Once the pressure reading is below 0.5 Torr, press Process Start
You may press Abort Process if you want to terminate manually
