Godin:Protocols/SU-8 Master

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Safety Safety goggles Nitrile gloves Lab coat Clean room gowning Fume hood Materials Isopropanol Aluminum foil Scotch tape Glass dish SU-8 developer SU-8 Spill tray Wafer Tweezers Positive photomask Godin:Protocols/Spin coater Godin:Protocols/Mask aligner Description A master is used as a mold for PDMS microchannels and valves. Fabrication of an SU-8 master requires multiples steps. First the wafer is cleaned using a piranha etch. Next, in a clean room environment, SU-8 is coated and patterned using a negative photomask. The patterned wafer is then developed, and checked under a microscope.