Koch Lab:Protocols/Photolithography

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Patrick L. Jurney (Talk | contribs)
(New page: Legend: "->" denotes physically pushing the button on the machine with the text that appears directly after symbol. Preheat hotplate for prebaking wafer *->set *->plate temp *->"desired ...)
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Revision as of 17:25, 3 June 2008

Legend: "->" denotes physically pushing the button on the machine with the text that appears directly after symbol.

Preheat hotplate for prebaking wafer

  • ->set
  • ->plate temp
  • ->"desired temp"
  • ->ent

Applying photo resist

  1. Place wafer on spin coating machine
    • ->speed (input speed)
    • ->accel (input acceleration)
    • ->time (input time)
    • ->save->back
    • ->run process
    • ->load recipe
    • ->"file name"
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