Koch Lab:Protocols/Photolithography

Legend: "->" denotes physically pushing the button on the machine with the text that appears directly after symbol.

Preheat hotplate for prebaking wafer

• ->set
• ->plate temp
• ->"desired temp"
• ->ent

Applying photo resist

1. Place wafer on spin coating machine
   • ->speed (input speed)
   • ->accel (input acceleration)
   • ->time (input time)
   • ->save->back
   • ->run process
   • ->load recipe
   • ->"file name"