Mathies:Protocols

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[[Mathies:Glass_Etching|Glass Etching]] <br style="clear:both;"/>
[[Mathies:Glass_Etching|Glass Etching]] <br style="clear:both;"/>
[[Mathies:Drilling_a_Glass_Microfluidic_Wafer|Drilling a Glass Microfluidic Wafer]] <br style="clear:both;"/>
[[Mathies:Drilling_a_Glass_Microfluidic_Wafer|Drilling a Glass Microfluidic Wafer]] <br style="clear:both;"/>
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[[Mathies:Glass_Etching|Glass Etching]] <br style="clear:both;"/>
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[[Mathies:Metal_Deposition|Metal Deposition]] <br style="clear:both;"/>
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[[Mathies:Metal_Etching|Metal Etching]] <br style="clear:both;"/>
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[[Mathies:Glass_Bonding|Glass Bonding]] <br style="clear:both;"/>

Revision as of 19:32, 15 July 2009

Valves and Assembly Protocols

Valve Assembly

Microfabrication

Mask Making
Wafers Cleaning and Deposition
Photolithography
RIE Thin Film Silicon Etching
Glass Etching
Drilling a Glass Microfluidic Wafer
Metal Deposition
Metal Etching
Glass Bonding

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