Mathies:Protocols

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[[Mathies:Metal_Etching|Metal Etching]] <br style="clear:both;"/>
[[Mathies:Metal_Etching|Metal Etching]] <br style="clear:both;"/>
[[Mathies:Glass_Bonding|Glass Bonding]] <br style="clear:both;"/>
[[Mathies:Glass_Bonding|Glass Bonding]] <br style="clear:both;"/>
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[[Mathies:Nitride|Emory Chan's Corner and Nitride Microfabrication]] <br style="clear:both;"/>

Revision as of 00:02, 23 July 2009

Valves and Assembly Protocols

Valve Assembly

Microfabrication

Mask Making
Wafers Cleaning and Deposition
Photolithography
RIE Thin Film Silicon Etching
Glass Etching
Drilling a Glass Microfluidic Wafer
Metal Deposition
Metal Etching
Glass Bonding
Emory Chan's Corner and Nitride Microfabrication

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