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RECIPE DUMP

July 2007 - George Ye

A. TO FABRICATE STRAIGHT WALL ON THICK SU-8 SAMPLE

Problem: The features has a large overhanging edge near the top; the walls were slanted

Cause: the photomask was not pressed firmly against the photofilm which causes UV light to leak around the photomask apertures

Solution: before exposure, cover the photomask with a large piece of 3x2 inches glass. Then, apply two thick stacks (10-15) microscope slides on either sides of the cover glass to be used as weight.

Protocol:

Dehydration bake:

1. Dehydration bake @ 200 degrees for about 15 minutes

Spincoating:

1. 500RPM DWELL: 10s ACCELERATION: 10s

2. 2000RPM DWELL: 30s ACCELERATION: 5s

3. 0RPM DWELL: 0s ACCELERATION: 10s

Pre-exposure bake:

1. 7 minutes @ 65 degrees

2. 20 minutes @ 95 degrees

3. allowed to cool to room temperature

Exposure:

1. cover the photomask as described above

2. UV exposure for 20 seconds

Post-exposure bake:

1. 2 minutes @ 65 degrees

2. 7 minutes @ 95 degrees

3. 2 minutes @ 65 degrees

Develop:

1. Develop in 20ml of developer with mild to strong agitation for 20 minutes

2. Replace with 20ml of fresh developer

3. Develop further for another 20 minutes


An excel file with a fairly generic parameter table has been created on the desktop of the common computer in the fabrication lab. If you could input all your SU-8 fabrication data there, it'd be very useful. Thanks, Chris.

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