TorontoMicrofluidicsFoundry: Difference between revisions
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Date, machine name, problem description. All users are requested to record hours spent in the Foundry. | Date, machine name, problem description. All users are requested to record hours spent in the Foundry. | ||
Feb 13, | Feb 13, 2:50-4:20, Mel, plasma, spin coater - Nitrogen tank changed | ||
Feb 11, 12-4pm, Steve, plasma, spin coater, UV exposure, Develop | Feb 11, 12-4pm, Steve, plasma, spin coater, UV exposure, Develop |
Revision as of 15:07, 13 February 2008
The Toronto Microfluidics Foundry is a flexible environment that specializes in the fabrication and integration of polymer-based microfluidic devices (often for biomedical applications). It complements ECTI, the central cleanroom facility at the University of Toronto. Users need to be trained according to the UofT Health and Safety regulations as well as individually at the equipment. Fulfilling these requirements is a prerequisite for access.
News
Location
Haultain Building, Room HA311 (416) 946-8210
Who we are
This is a multi-user facility that is supported by a number of UofT research groups. You should adhere to the lab rules (safety, signup, participation in joint info/cleaning sessions) in order to maintain active user status. Active users are:
Dr. Axel Guenther, e-mail: axel.guenther@utoronto.ca, (416) 978-1282
Yali Gao, e-mail: ylgao@mie.utoronto.ca, (647) 233-1207, (416) 946-8210 (lab)
Barzin Doroodgar, e-mail: barzin.doroodgar@utoronto.ca, (416) 946-8210 (lab)
Siavash Aslanbeigi, e-mail: cya.aslanbeigi@utoronto.ca, (416) 946-8210 (lab)
Steve Shih, e-mail: steve.shih@utoronto.ca, (416) 946-8210 (lab)
Saja Al-Dujaili, e-mail: s.al.dujaili@utoronto.ca, (416) 946-8210 (lab)
Lian Leng, e-mail: lian.leng@utoronto.ca, (416) 946-8210 (lab)
Brendan MacDonald, e-mail: brendan.macdonald@utoronto.ca, (416) 978-3050 (lab)
Faisal Moledina, e-mail: faisal.moledina@utoronto.ca, (416) 946-8210 (lab)
Amir Manbachi, e-mail: amir.manbachi@utoronto.ca
Edmond Young, e-mail: edmyoung@mie.utoronto.ca, (416) 978-8660
Fahad Chowdhury, e-mail: fahad.chowdhury@utoronto.ca, (Radisic group), (416) 946-5322
Mel Brown, e-mail: mel.brown@utoronto.ca, (Radisic group), (416) 946-5322
Christopher Moraes, e-mail: chris.moraes@utoronto.ca, (416) 978-8660 (Simmons group), (416) 978-8663 (Sun group)
Eric Wu, e-mail: e.wu@utoronto.ca, (647) 895-1275
Xinyu Liu, e-mail: xyliu@mie.utoronto.ca, (416) 978-8663
Pablo Neiman, e-mail: pneiman@mie.utoronto.ca, (416) 978-8663
Qing Xiang, e-mail: qing_xiang2003@yahoo.ca, (416) 946-0015
George Ye, Simmons Group (416) 978-8660; email: george.ye@utoronto.ca
Yoan Kagoma, Simmons Group (416) 978-8660; email: yoan.kagoma@utoronto.ca
Omar F. Khan, Sefton Lab (416) 978-6518; email: titaniumkid.khan@utoronto.ca
Bryan Keith, IBBME Teaching Laboratory, e-mail: bryan.keith@utoronto.ca, (416) 978-1467
Meetings
Please note that either attending the monthly meetings or informing us when you can't make it is mandatory for ALL users.
Supplies needed
Chan Lab:
Sun Lab:
Simmons Lab:
Radisic Lab:
IBBME Teaching Lab:
MIE414F Teaching Lab:
Guenther Lab:
Ordered
Enter the ordered items here.
Received
Enter received supplies here
Equipment usage log
Date, machine name, problem description. All users are requested to record hours spent in the Foundry.
Feb 13, 2:50-4:20, Mel, plasma, spin coater - Nitrogen tank changed
Feb 11, 12-4pm, Steve, plasma, spin coater, UV exposure, Develop
Feb 9, 7:15PM-7:30PM, Chris: spin coater
Feb 7, 11:30am-12:15pm, Mel, plasma, spin coat
Feb 5, 1:30-2:30pm, Qing, plasma, workstation,
Feb 5, 2:00pm-2:45pm, Mel, plasma cleaner
Feb 4, 2:00pm-5:00pm, Faisal, plasma clean, spin coater, UV exposure
Feb 4, 3:00pm-4:00pm, Fiona, spin coater
Feb 4, 2:00pm-4:00pm, Steve, plasma clean, spin coater, UV exposure
Feb 3, 12:00pm-3:00pm, Steve, plasma clean, spin coater, UV exposure
Feb 2, 12:00pm-4:00pm, Steve, plasma clean, spin coater, UV exposure
February 1, 9:00am-3:00pm, Lian, plasma clean, spin coater, UV exposure
Jan 31, 1:30pm-2:15pm, Mel, spin coater
Jan 30, 12:30-1:15, Yoan, spin coater.
Jan 30, 2:30pm-3:30pm, Mel, spin coater
Jan 29, 1:00pm-2:00pm, Eric, plasma, ethanol wash
Jan 29, 2:00pm-2:30pm, Fiona, spin coater
Jan 29, 9:00am-4:00pm, Brendan, plasma cleaner, spin coater, UV exposure
Jan 29, 9:00am-4:00pm, Lian, plasma cleaner, spin coater, UV exposure
Jan 28, 3:00-3:15, Chris, Spin Coater. Fixed the vacuum problem: hard whitish polymer in the chuck blocking the vacuum line - scraped out with pointed scalpel.
Jan 28, 11:45-12:00, Chris, Spin Coater. PROBLEM: Vacuum chuck not maintaining vacuum. Not enough time to attempt fixes.
Jan 25, 2:00 - 3:00, Mel, Spin coater
Jan 25, 11:00 am - 4:00 pm, Faisal, plasma, spin coater, UV, hot plates
Jan 22, 4:00 - 5:00, Eric, PDMS + Oven + Vacuum
Jan 21, 10:15am-10:30am, Eric, Sonication + Plasma cleaner
Jan 21, 10-11am, 3:30-4:00pm, Qing, plasma, workstation, digital scale, vacuum chamber
Jan 21, 12:15-12:45pm, Fahad, spin coater
Jan 21, 9:00am-4:00pm, Brendan, plasma cleaner, spin coater, UV exposure
Jan 21, 9:00am-4:00pm, Lian, plasma cleaner, spin coater, UV exposure
Jan 17, 12:00-12:30, Chris & Yoan, spin coater
Jan 17, 9:00-9:30am, Omar, plasma cleaner
Jan 16, 3:45-4:30pm, Mel, spin coater
Jan 16, 10:00am-4:00pm, Lian, plasma cleaner, spin coater, UV exposure
Jan 16, 9:00-9:45am, Omar, plasma cleaner
Jan 15, 9:30-11:00am, 5-6:00pm, Qing, plasma, workstation, digital scale, vacuum chamber
Jan 15, 9:00am-5:00pm, Lian, plasma cleaner, spin coater, UV system
Jan 15, 9:00-9:30am, Omar, plasma cleaner
Jan 14, 9:00-10:00am, Omar, plasma cleaner
Jan 11, 15:00-18:00, Omar, Spin coater, UV system
Jan 10, 3:00-4:50pm, Qing, plasma, workstation, digital balance, vacuum chamber
Jan 10, 9:00 - 10:00, Omar Khan, plasma cleaner, PROBLEM: N2 Tanks Empty
Jan 10-11:00pm, Qing, digital balance, vacuum chamber, Oven
Jan 9, 13:45 - 14:30, Omar Khan, Digital balance, oven
Jan 7, 11:45, Fiona Rask, spin coater, could not use, PROBLEM: VACUUM NOT WORKING!
Dec 20, 11:00-3:00, Brendan MacDonald, spin coater, UV system, plasma cleaner
Dec 19, 11:00-3:00, Brendan MacDonald, spin coater, UV system, plasma cleaner
Dec 19, 10:00-2:00, Saja Al-Dujaili, spin coater, UV system, plasma cleaner
Dec 18, 2:30 - 4:00, Brendan MacDonald, spin coater, UV system, plasma cleaner
Dec 18, 9:00 - 10:00, Omar, plasma cleaner
Dec 17, 2:30 - 4:30, Brendan MacDonald, spin coater, UV system, plasma cleaner
Dec 17, 12:30 - 13:00, Fahad, spin coater
Dec 13, 8:30 - 9:30, omar, spin coater, 13:00-13:30 UV System
Dec 13, 9:30 - 14:00, omar, spin coater, UV system
Dec 12, 17:00 - 18:00, omar, plasma cleaner
Dec 12, 8:00 - 9:00, omar, plasma cleaner
Dec 11, 15:20 - 15:45, omar, plasma cleaner
Dec 11, 9:40-10:50am, Qing, plasma, workstation, digital balance, vacuum chamber
Dec 7, 11:00-14:30, omar, spin coater, UV system
Dec 7, 9:30-10:15am, Qing, plasma, workstation
Dec 6, 9:30-10:15am, Qing, plasma, workstation, digital balance, vacuum chamber
Dec 6, 9:30-9:45am, Fahad, spin coater
Dec 5, 13:00-15:30, Omar, spin coater, UV system
Dec 5, 8:30 - 10:00, Omar, spin coater, UV system
Dec 4, 1:50pm, Qing, plasma, workstation
Dec 4, 12:30-13:00, plasma cleaner
Nov 30, 1:40-2:40pm, Qing, plasma, workstation, oven
Nov 29, 10:00-11:30am, Qing, plasma, workstation, digital balance, vacuum chamber, oven
Nov 28, 3:00-3:30pm, Qing, digital balance, vacuum chamber
Nov 27, 9:00am-12:00pm, Omar Khan, spin coater, UV system, plasma cleaner
Nov 26, 3:30-4:00pm Qing, digital balance, vacuum chamber
Nov 26, 1:30-1:45pm, Fahad, spin coater
Nov 23, 9:00 - 3:00pm, Steve Shih, spin coater, UV system, plasma cleaner
Nov 23, 10:00-11:30 am, 1:30-3:30 pm, Faisal Moledina, spin coater, UV system, plasma cleaner
Nov 22, 2:00-3:00pm, Qing, plasma, workstation, digital balance, vacuum chamber, oven
Nov 21, 4:00-4:30pm, Qing, plasma, workstation, digital balance, oven
Nov 22, 11:00-4:00pm, Brendan MacDonald, spin coater, UV system, plasma cleaner
Nov 22, 11:00-4:00pm, Lian Leng, spin coater, UV system, plasma cleaner
Nov 21, 6:45-7PM, Christopher Moraes, Spinner
Nov. 21, 1:30-3:30, Saja Al-Dujaili, bench, UV system, microscope, plasma cleaner
Nov 21, 10:00am-2:00pm, Brendan MacDonald, spin coater, UV system, plasma cleaner
Nov 20, 1:00 - 2:30 pm, Qing, plasma, workstation, digital balance, vacuum chamber, oven
Nov 19, 2:30-4:00pm, Qing, plasma, workstation, digital balance, vacuum chamber, oven
Nov. 20, 1:00-4:00, Saja Al-Dujaili, bench, UV system, microscope, plasma cleaner
Nov 20, 7:00 - 11:30, Omar Khan, spin coater, UV system, plasma cleaner, bench, laminar flow hood, UV lamp
Nov 19, 13:30 - 15:30, Omar Khan, digital balance, vacuum chamber, oven
Nov 19, 1:45-2:15, Fahad Chowdhury, spin coater
Nov 19, 10:30-11:30, 3:15-3:30 Saja Al-Dujaili, digital balance, vacuum chamber, oven.
Nov 19, 10:00-12:00, Brendan MacDonald, spin coater, UV system, plasma cleaner
Nov 19, 10:00-12:00, Lian Leng, spin coater, UV system, plasma cleaner
Nov 19, 9:00-12:00, Omar Khan, spin coater, UV system, plasma cleaner, bench, laminar flow hood
Nov 16, 10:40-2:00, Omar Khan, spin coater, UV system, plasma cleaner, bench, laminar flow hood
Nov 16, 10:40-2:00, Saja Al-Dujaili, spin coater, UV system, plasma cleaner, bench, laminar flow hood
Nov 12, 1:45-3:00pm, Qing,plasma cleaner, workstation, digital balance, vacuum chamber
Nov 9, 9:15-9:45 Saja Al-Dujaili, laminar flow hood
Nov 8, 2:00-2:15, 3:15-3:30 Saja Al-Dujaili, digital balance, vacuum chamber, oven.
Nov 7, 3:30-5pm, Qing Xiang, plasma cleaner, workstation, digital balance, vacuum chamber
Nov 7, 4:00-4:20pm, Lian Leng, plasma cleaner, oven.
Nov 6, 5:00-5:40pm, Lian Leng, plasma cleaner, oven.
Nov 6, 1-3pm, Qing, plasma cleaner, workstation, digital balance, vacuum chamber.
Nov 5, 2-4pm, Qing, plasma cleaner, workstation, digital balance, vacuum chamber.
Nov 5, Mel Brown, fume hood 1:30-3:30, plasma cleaner 1:30-1:45
Nov 5, 12:30-1:00pm, Lian Leng, plasma cleaner, oven.
Oct 30, Mel Brown, fume hood 1-3:30, plasma cleaner 1:15-1:45 - could not use equipment as
nitrogen tanks empty (required for first step).
Oct 22, Qing Xiang, Workstation, vacuum chamber, plasma, and balance.
When I was using Plasm cleaner, initially no plasma produced. Found that the tube line of the Plasma cleaner is disconnected to the oven, it is not working since the vacuum is not high enough. After connecting the tube, it works well. Just remind everyone, check the line and make sure it is not disconnected.
Oct 19, 4:00-6:00pm, Lian Leng, balance, vacuum chamber, oven.
Oct 18, Qing Xiang, workstation, vacuum chamber and balance
October 15, Fahad Chowdhury, 11:45-12:15, Spin-coat
October 2, Fahad Chowdhury, 14:15-14:45, Spin-coat
October 2, Eric Wu, 15:00-16:00, weight scale, plasma, bench, vacuum, oven
October 2, Mel Brown, 11:00am-2pm, plasma cleaner (11:00-11:30), fume hood
October 1, Lian Leng, 1:00pm-5:00pm, Su-8 Spincoat,Bake, UV expose, develop
October 1, Fahad Chowdhury, 11:00am-12:45pm, Spin-coat
Eric Wu - Sept 26, 11:00-12:00, expose, develop
Eric Wu - Sept 25, 4:00-5:00, su8 spincoat, bake, uv expose, develop
Eric Wu - Sept 24, 12:30 - 2:00, SU8-2050, spincoater, uv plasma, oven, nitrogen, sonicator
Qing Xiang, used workstation, plasma, Spet 20, 11:30-12:30am, no problem
September 19, George Ye, 6:15-7:15pm, SU 8 feature layer fabrication, hot plates, UV lamp, spincoater
September 19, George Ye, 9:30-10:40am, SU 8 feature layer fabrication, hot plates, UV lamp, spincoater
September 18, George Ye, 5:30-7:00pm, Su 8 seed layer fabrication, hot plates, UV lamp, spincoater
September 18, September Monthly Meeting. Participants: Steve, Fahad, Mel, 2:30-3:30PM
September 13, Chris Moraes, 3:40-4:10: spin coating PDMS
September 12, Eric Wu, 3:30 - 6:00, plasma, pdms, oven, hood
September 11, Melissa Brown, 12:30-3:00, plasma cleaner (12:30-1:00 only) and hood
September 5, Barzin Doroodgar, 12:00-1:00, spincoat, UV, bake
August 30, Emma Brisson, 4:30-5:00, plasma cleaner and hood
August 30, Emma Brisson, 10:00-10:15, balance and vacuum chamber
August 29, Eric Wu, 10:00am - 9:00pm, SU8-25, Plasma, Acetone/Isopropanol Clean, Sonicator, Nitrogen, Hood, Vaccum, Hotplates, Oven.
August 29, Emma Brisson, 4:00-5:00; plasma cleaner, hood
August 28, Eric Wu, 3:00 - 5:00, SU8-25, Plasma, Acetone/Isopropanol Clean, Sonicator, Nitrogen, Hood, Vaccum, Hotplates, Oven.
August 28, Emma Brisson, 11:45-12:45, plasma cleaner, hood
August 27, Emma Brisson, 3:30-4:15, plasma cleaner, hood
Aug 24, Qing Xiang, 5:00-5:30pm, blance, vacuum chamber
August 24, Eric Wu, 12:40 - 12:50, (Protein removal from stamps: UV plasma, ethanol sonication)
August 24, Emma Brisson, 1:30-2:30, plasma cleaner and hood
August 23, Emma Brisson, 12:30-1:30, 3:30-3:45, plasma cleaner and hood
August 23, Eric Wu, 12:00 - 12:10, (Protein removal from stamps: UV plasma, ethanol sonication)
August 22, Eric Wu, 12:00 - 12:05 (Prepare surface for silanization mix adsorption: UV plasma)
August 21, Emma Brisson, 10:30-11, hood, vacuum oven, curing oven, 4-5 plasma cleaner
August 21, Melissa Brown, 2:00-5:00pm, hood, 2:30-3:00pm, plasma cleaner
August 21, Eric Wu, 1:00 - 1:10 (Protein removal: UV Plasma, Ethanol Sonication)
- AUGUST 16 - FOUNDRY MAINTENANCE (CLOSED) - UV LAMP/VACUUM PUMPS ***
August 15, Anna Sheu, 11:00-3:00, spincoat, plasma, vacuum, bake
August 15, Barzin Doroodgar, 11-12pm, 1-2pm, spincoat, plasma, UV, vacuum, bake
August 15, Steve Shih, 11-12pm, 1-2pm, spincoat, vacuum, bake
August 15, Lian Leng, 11:00-4:30, spincoat, plasma, UV, vacuum, bake
August 15, Annie chen, 11:00-3:00, spincoat, plasma, vacuum, bake
August 14, Lian Leng, 11:00-4:00, spincoat, plasma, UV, vacuum, bake
August 14, Barzin Doroodgar, 1:00-3:00, spincoat, plasma, UV, vacuum, bake
August 14, Annie Chen, 3:30-4:00, spincoat, plasma, UV, vacuum, bake
August 14, Anna Sheu, 1:00-3:00, spincoat, plasma, UV, vacuum, bake
August 13, Anna Sheu, 1:00-2:00, spincoat, plasma, UV, vacuum, bake
August 13, Eric Wu, 11:00-2:00, 200um channels, spincoat, uv expose, substrate clean, oxy plasma, developer
August 13, Emma Brisson, 10:00-12:00, laminar hood, plasma cleaner, vacuum oven, curing oven
August 13, Michael Huang, 9:00-1:00, hot plate PVDF heat-curing
August 10, Annie Chen, 2:00-3:00, spincoat, plasma, UV, vacuum, bake
August 10, Anna Sheu, 1:00-3:00, spincoat, plasma, UV, vacuum, bake
August 9, Emma Brisson, 11:30-12:30, Vacuum oven, curing oven, laminar hood
August 8, Annie Chen, 3pm-5pm, spincoat, plasma, UV, vacuum, bake
August 8, Anna Sheu, 3pm-5pm, spincoat, plasma, UV, vacuum, bake
August 8, Steve Shih, 11am-4pm, Spin coater, Plasma, UV, Vacuum, Bake
August 8, Chris Moraes, 5:00-5:30PM, Spin coater: PDMS< using recipe #4
August 7, Steve Shih, 10am-11:30am,12:30pm-4pm, Spin Coater, Plasma, UV
August 7, Lian Leng, 10am-11:30am,12:30pm-4pm, Spin Coater, Plasma, UV
August 7, Barzin Doroodgar, 10am-11:30am,12:30pm-4pm, Spin Coater, Plasma, UV
August 7, Chris Moraes, 12:30-1PM, Spin coater: PDMS, using recipe #3
August 3, Emma Brisson, 11:00-12:00, bench, plasma cleaner
August 2, Anna Sheu, 1pm-4pm, spincoat, plasma, UV, vacuum, bake
August 2, Emma Brisson, 11:00-12:00, bench, vacuum, oven,
August 1, Eric Wu, 2:00-3:30 PDMS, Oven, Vacuum, Plasma, Nitrogen, Sonicate
August 1, Saja Al-Dujaili, 2:00-3:00, SU8 feature fabrication, bench, hot plates, spincoater, UV lamp
July 31, Saja Al-Dujaili, 10:00AM-4:00PM, PDMS casting, bench, scale, vacuum chamber, vacuum oven
July 30, Qing Xiang, 3:30-5:00pm, plasma cleaner, workstation, vacuum chamber, balance
July 27, Emma Brisson, 1:00-2:00, plasma cleaner, bench
July 26, Emma Brisson, 11:30-12:30, vacuum oven, curing oven, bench
July 26, George Ye, 10:00-11:30am and 2:00-3:40pm, SU 8 seed and feature layer fabrication, bench, hot plates, spincoater, UV lamp
July 20, Eric Wu, 2:20 - 3:20am. PDMS molding (pdms 1:10, degas, plasma onto glass)
July 20, Saja Al-Dujaili, 10:00AM-4:00PM, PDMS casting, bench, scale, vacuum chamber, vacuum oven
July 19, Saja Al-Dujaili, 10:00AM-4:00PM, PDMS casting, bench, scale, vacuum chamber, vacuum oven
July 19, George Ye, 10:30-11:30am and 2:40-3:40pm, SU 8 seed and feature layer fabrications, bench, hot plates, spincoater, UV lamp
July 19, Mel Brown, 1:00-5:00, surface functionalization, laminar hood, plasma cleaner
July 18, Emma, Michelle & Bryan, 3:30-5:00, PDMS chips, laminar hood, plasma cleaner
July 18, Emma, Michelle & Bryan, 11:30-1:00, laminar hood, vacuum oven
July 17, Saja Al-Dujaili, 2:00PM-9:00AM (July 18), PDMS casting, bench, scale, vacuum chamber, vacuum oven
July 17, George Ye, 2:00-3:30pm, SU 8 feature layer fabrication, bench, hot plates, spincoater, UV lamp
July 16, Fahad Chowdhury, 1:15pm-2pm, Spin-coater
July 16, Eric Wu, 12:00pm-2:00pm, SU8 developing and Plasma for Silanization
July 13, Saja Al-Dujaili, 9:00AM-2:00PM, SU8 feature fabrication, bench, hot plates, spincoater, UV lamp
July 12, Saja Al-Dujaili, 9:00AM-1:00PM, SU8 feature fabrication, bench, hot plates, spincoater, UV lamp
July 12, George Ye and Ron Ho, 10:30am-11:50am, SU 8 feature and master fabrication, bench, hot plates, spincoater, UV lamp
July 12, Emma Brisson, 9-11:30AM, Laminar hood, Plasma cleaner
July 11, Barzin Doroodgar, 2:00-4:00pm, SU 8 feature fabrication, bench, hot plates, spincoater, UV lamp
July 11, Mel Brown, 4:00PM-6:30PM, Laminar hood, Plasma Cleaner, Spin Coater
July 11, DEEP Program 1:30PM - 3PM
July 11,thanks to George, Steve, Siavash, Barzin, Mel, and Eric for attending the Monthly Meeting at the TMF. Please note that either attending the monthly meetings or informing us when you can't make it is mandatory for ALL users.
July 10, Eric Wu, 1:00PM-5:00PM, Spincoat, Hotplate, Oven, Plasma, Hood, Sonicator. SU8 Master Fabrication.
July 9, Siavash Aslanbeigi, 10:00AM-5:00PM, 8PM-11PM SU8 feature fabrication, bench, hot plates, spincoater, UV lamp
July 7, Siavash Aslanbeigi, 2:00PM-5:00PM, SU8 feature fabrication, bench, hot plates, spincoater, UV lamp
July 6, George Ye, 10:30-11:45am, SU 8 master and seed layer fabrication, bench, hot plates, spincoater, UV lamp
July 6, Bryan Keith, 9:00-10:00am and 1:00-3:00pm, oven, laminar hood, vacuum pump, plasma cleaner
July 5, George Ye, 10:30-11:30am, SU 8 master fabrication, bench, hot plates, spincoater, UV lamp
July 5, Siavash Aslanbeigi, 10:00AM-5:00PM, SU 8 feature fabrication, bench, hot plates, spincoater, UV lamp
June 29, Barzin Doroodgar, 1:00-4:00pm, SU 8 feature fabrication, bench, hot plates, spincoater, UV lamp, electric arc light
June 28, Barzin Doroodgar, 10:00-4:00pm, SU 8 feature fabrication, bench, hot plates, spincoater, UV lamp, electric arc light
June 27, George Ye, 3:30-5:00pm, SU 8 feature layer fabrication, bench, hot plates, spincoater, UV lamp
June 27, Fahad Chowdhury, 3:15-3:45pm, Spincoater
June 25, George Ye, 10:00-11:00am, SU 8 seed layer fabrication, bench, hot plates, spincoater, UV lamp
June 24, Chris Moraes, 2-2:30PM, Spin coater
Note: Changed the nitrogen tank for the spinner
IMPORTANT: I found the spinner in a real mess. There was resist *everywhere*. I changed the Aluminum foil liner, but there was so much SU-8 (?) there that it had already seeped through the liner, and formed a big puddle in the black bowl underneath. If whoever's made the mess could please take out that bowl and get rid of all the gunk, it would be appreciated. And please, PLEASE change the Aluminum foil liner EVERY TIME you use the spinner. It's so much easier to clean that way.
June 22, Siavash Aslanbeigi, 10:00-5:00pm, SU 8 feature fabrication, bench, hot plates, spincoater, UV lamp, electric arc light
June 21, Siavash Aslanbeigi, 10:00-4:00pm, SU 8 feature fabrication, bench, hot plates, spincoater, UV lamp, electric arc light
June 20, Siavash Aslanbeigi, 12:00-4:00pm, SU 8 feature fabrication, bench, hot plates, spincoater, UV lamp, electric arc light
June 19, Siavash Aslanbeigi, 12:00-4:00pm, SU 8 feature fabrication, bench, hot plates, spincoater, UV lamp, electric arc light
June 18, Siavash Aslanbeigi, 3:00-5:00pm, SU 8 feature fabrication, bench, hot plates, spincoater, UV lamp, electric arc light
June 18, Fahad Chowdhury, 2:15-2:45pm, Spincoater
June 15, George Ye, 2:00-3:30pm, SU 8 feature and seed layer fabrication, bench, hot plates, spincoater, UV lamp
June 14, George Ye, 2:30-4:00pm, SU 8 feature layer fabrication, bench, hot plates, spincoater, UV lamp
June 13, George Ye, 11:00am-12:00pm, SU 8 seed layer fabrication, bench, hot plates, spincoater, UV lamp
June 12, George Ye, 2:30-4:00pm, SU 8 feature layer fabrication, bench, hot plates, spincoater, UV lamp
June 11, George Ye, 2:30-3:30pm, SU 8 seed layer fabrication, bench, hot plates, spincoater, UV lamp
June 11, George Ye, 10:30am-12:30pm, SU 8 feature layer fabrication, bench, hot plates, spincoater, UV lamp
June 8, George Ye, 2:00pm-3:00pm, SU 8 seed layer, bench, hot plates, spincoater, UV lamp
June 7, George Ye, 10:30am-12:00pm, SU 8 feature layer fabrication, bench, hot plates, spincoater, UV lamp
June 7, Fahad Chowdhury, 10:45-11:45am, spincoater
June 1, George Ye, 10:30-11:30am, SU 8 feature layer fabrication, bench, hot plates, spincoater, UV lamp
May 30, Eric Wu, 1:00-2:00pm, Substrate silanization: ethanol sonication, UV plasma treatment, mercapto-propyltrimethoxy silane immerse.
May 29, Eric Wu, 10:00am-3pm, Master Fabrication: sonicate, ovendry, spincoat su8-25, UV expose, acid dissolve. PDMS stamp fabrication: pdms mix, degas, cure.
May 28, George Ye, 2:20-4:00pm, bench, spincoater, hot plates, UV lamp
May 25, George Ye, 2:45-3:30pm, bench, spincoater, hot plates, UV lamp
May 25, Qing Xiang, 1:30-2:30, workstation, oven, plasma cleaner
May 25, Qing Xiang, 11:30-12:30am, balance, vacuum chamber.
May 25, George Ye, 10:30am-12:00pm, SU-8 50 feature fabrication, bench, spincoater, hot plates, UV lamp (the screw for the adjustable platform has been tightened)
May 24, George Ye, 10:30am-12:00pm, SU-8 seed layer fabrication, bench, spincoater, hot plates, UV lamp
May 23, George Ye, 2:00-3:30pm, SU-8 50 fabrication, bench, spincoater, hot plates, UV lamp (the screw for the adjustable platform became loose, need screwdriver to tighten it)
May 23, George Ye, 10:30am-12:00pm, SU-8 seed layer, bench, spincoater, hot plates, UV lamp
May 17, George Ye & Chris Moraes, 2:00-4:00pm, SU-8 50 fabrication, recipe on computer
May 17, George Ye & Chris Moraes, 10:30-12:00am, SU-8 seed layer, recipe on computer
May 15, Qing Xiang, 3-4pm, bench, vacuum chamber, balance
May 11, Qing Xiang, 4:30-5:40pm, bench, vacuum chamber, balance, plasma cleaner
May 10, Qing Xiang, 9:45-10:20am, bench, vacuum chamber, oven, balance
May 9, Qing Xiang, 5-6pm, bench, vaccum chamber, oven, plasma cleaner and balance
May 5, CLEAN: Joint Set-up of equipment and cleaning, participants: Yali, Chris, Siavash, Barzin, Qing, Edmond, George, Axel
Apr 26, Qing Xiang, 12:15pm- 3:00pm,Oven; 5-6pm, bench, plasma cleaner, balance, vacuum chamber
Apr 23, Qing Xiang, 5:15-6:00pm, bench, Plasma cleaner, balance and vacuum chamber
Apr 16, Qing Xiang, 2:00am - 5:00pm, used: oven.
April 13, Qing Xiang, 9:30-11:00am, used: vacuum chamber; 11:00am-4:40pm, used: oven; 4:40-6:00pm, PDMS channel/glass binding, used: plazma cleaner, bench.
April 12, Qing Xiang, 10-12am, used: vacuum chamber; 12-5:00pm, used: oven; 5-5:30, used: bench.
April 4, 11-12pm, Qing Xiang, PDMS/glass chip binding, equipment used: Plazma cleaner, Bench
April 3, 3-4pm, Qing Xiang, PDMS casting, quipment used: vaccum over, heating oven, blance
Setting-up and test run of equipment, Apr 3, 4-5PM: Qing, Yali, Fahad, Axel
Master fabrication (pls edit), Apr 3, 2-3PM: Qing
Joint move to HA311 until Apr 3
Eric Wu, Suns Lab, Wed Mar 20 2007 12:00 - 13:00 PDMS microstamp fabrication. Thin stamp fabrication by sandwiching a glass slide with the master. A rigid backing for the stamp was created by attaching the thin stamp to oxidized glass.
Devon Huber, Guenther Lab, Tue Mar 20 14:00 - 15:00 PDMS stamp fabrication
Eric Wu, Suns Lab, Tue Mar 19 2007 13:30 - 15:00 Microstamp Master Fabrication
Eric Wu, Suns Lab, Mon Mar 18 2007 12:30 - 13:00 Plasma on silanized glass for protein transfer prep.
Alex Rhee, Chan Lab, Tues Mar 13 2007 10:30PM-12AM. Plasma cleaner on PDMS slabs.
Please DO NOT FORGET to SIGN IN after usage. Thank you!
Edmond Young, Simmons Lab, Fri Feb 23 2007, 1:30-3:30 PM Fab: SU-8-25 spincoat with Program #22, soft-bake, UV exposure for 9 sec. post-bake, develop
Joint cleaning, Thu Feb 22, 4:00-5:30 PM
ADVANCE BOOKING
If you plan to use the lab in the future, please submit your times in advance to prevent double bookings. Note that for all times outside the normal working hours (workdays 9AM-5PM), you are only allowed to fabricate if you bring a second trained person with you.
PURCHASING INFORMATION
Purchasing Photomasks
--Microart Services Inc.---------- Tel: 905 709 2244 Fax: 905 709 1873 50 West Beaver Creek, Richmond Hill, ON, L4B 1G5
Steps: 1 - Convert your file into a .gerber file. I use LinkCad.
2 - Send your file to padplot@primus.ca
3 - Call the company and tell him about it, make sure he knows where to ship it, etc.
4 - When you recieve the invoice & photomask, have Sheila Baker send a cheque out to him. The company only accepts cheques. You'll need Axel to sign the invoice with an account #.
Ships in 1 day, comes the next day.
--www.photoplotstore.com-------------------- 1-888-821-1748 they're based somewhere in the US
Steps: 1 - Convert your file to .gerber
2 - Click the grid size you want (ie 1/8 mil, 1/20 mil), it should be the first thing you see under "Precision Laser Photoplots". also, 1 mil = 25 um
3 - Upload your file
4 - Fill out the payment form
5 - Call him (cuz last time i didn't and he didn't do anything)
Also ships in 1 day, comes next day.
I find Microart has better quality transparencies, but www.photoplotstore.com has higher precision photoplotters.
-Eric
RECIPE DUMP
Dump your numberred fabrication recipes here (note the date).
A. TO FABRICATE STRAIGHT WALL ON THICK SU-8 SAMPLE
Problem: The features has a large overhanging edge near the top; the walls were slanted
Cause: the photomask was not pressed firmly against the photofilm which causes UV light to leak around the photomask apertures
Solution: before exposure, cover the photomask with a large piece of 3x2 inches glass. Then, apply two thick stacks (10-15) microscope slides on either sides of the cover glass to be used as weight.
Protocol:
Dehydration bake:
1. Dehydration bake @ 200 degrees for about 15 minutes
Spincoating:
1. 500RPM DWELL: 10s ACCELERATION: 10s
2. 2000RPM DWELL: 30s ACCELERATION: 5s
3. 0RPM DWELL: 0s ACCELERATION: 10s
Pre-exposure bake:
1. 7 minutes @ 65 degrees
2. 20 minutes @ 95 degrees
3. allowed to cool to room temperature
Exposure:
1. cover the photomask as described above
2. UV exposure for 20 seconds
Post-exposure bake:
1. 2 minutes @ 65 degrees
2. 7 minutes @ 95 degrees
3. 2 minutes @ 65 degrees
Develop:
1. Develop in 20ml of developer with mild to strong agitation for 20 minutes
2. Replace with 20ml of fresh developer
3. Develop further for another 20 minutes
An excel file with a fairly generic parameter table has been created on the desktop of the common computer in the fabrication lab. If you could input all your SU-8 fabrication data there, it'd be very useful. Thanks, Chris.
LAB SAFETY
Access to the foundry requires users to be complient with the UofT health and Safety regulations and to be individually trained by a member of Dr. Guenther's group at the equipment. Users that don't fulfill these requirements are denied access.
LINKS
"Ontario-on-a-Chip" Event - November 1, 2007
ECTI - UofT's Central Cleanroom - Bahen Center (BA), 7th floor