|
|
| (183 intermediate revisions by 13 users not shown) |
| Line 1: |
Line 1: |
| {| cellspacing="3" | | {| cellspacing="3" |
| |- valign="right" | | |- valign="right" |
| [[Image:Foundry_Logo.jpg]] | | [[Image:CMS_logo_small.png]] |
| |} | | |} |
|
| |
|
| | The Toronto Microfluidics Foundry is a part of the brand-new Centre for Microfluidic System in Chemistry and Biology (CMS). It provides a flexible environment for the fabrication and integration of polymer-based microfluidic devices and consists of two dedicated Class 1000 cleanroom spaces. Users need to be trained according to the [http://www.ehs.utoronto.ca/Home.htm UofT Health and Safety regulations] as well as individually at the equipment and need to attend monthly user meetings. Fulfilling these requirements is a prerequisite for maintaining active user status. |
|
| |
|
| | Foundry use is available for a user fee. The facility has been established with financial support from the [http://www.innovation.ca/en Canada Foundation of Innovation], the [http://www.mri.gov.on.ca/english/default.asp Ontario Ministry for Research & Innovation], and the [http://www.nserc-crsng.gc.ca/index_eng.asp National Sciences and Engineering Research Council of Canada]. |
|
| |
|
| The Toronto Microfluidics Foundry is a flexible environment for the fabrication and integration of polymer-based microfluidic devices and complements [http://www.ecti.utoronto.ca/site3.aspx ECTI], the central cleanroom facility at the [http://www.utoronto.ca University of Toronto]. Users need to be trained according to the [http://www.ehs.utoronto.ca/Home.htm UofT Health and Safety regulations] as well as individually at the equipment and need to attend monthly user meetings. Fulfilling these requirements is a prerequisite for maintaining active user status.
| | == [http://foundry-reserv.mie.utoronto.ca EQUIPMENT SIGN-UP & RESERVATION] == |
| ==News== | |
| [Axel] Our next Foundry Meeting will take place on Tuesday July 15, 2008. Please make sure to attend.
| |
|
| |
|
| [Sanjesh] Computer and Camera for microscope in the Foundry have been temporarily moved. Please contact Sanjesh if you have questions or concerns (8-3050). [update] - There is another computer there, but camera shall be brought back soon (within the next week or so).
| |
|
| |
|
| ==Location==
| |
| [http://www.osm.utoronto.ca/map/ Haultain Building], Room [http://openwetware.org/images/7/74/HA311.jpg HA311]
| |
| (416) 946-8210
| |
|
| |
|
| ==Who we are==
| | The purposes of signing up for equipment is: |
| This is a multi-user facility that is supported by a number of UofT research groups. You should adhere to the lab rules (safety, signup, participation in joint info/cleaning sessions) in order to maintain active user status. Active users are:
| | 1) to keep track of user hours for financial management of the facility |
| | 2) to make sure equipment is available when you need it. |
| | Please DO NOT FORGET to sign up for the equipment you will use (or have used). |
|
| |
|
| [http://www.mie.utoronto.ca/staff/profiles/guenther Dr. Axel Guenther], e-mail: axel.guenther@utoronto.ca, (416) 978-1282 (office)
| | NEW RESERVATION SYSTEM |
|
| |
|
| Yali Gao (Chan group), e-mail: ylgao@mie.utoronto.ca, (647) 233-1207, (416) 946-0015 (lab)
| | This new system allows you to reserve each equipment for the time needed. |
| | http://foundry-reserv.mie.utoronto.ca/ |
|
| |
|
| Siavash Aslanbeigi, e-mail: cya.aslanbeigi@utoronto.ca, (416) 946-8210 or 8-3050 (lab)
| | To view all equipments booking of the day: http://foundry-reserv.mie.utoronto.ca/today.asp?lab=8 |
|
| |
|
| Sanjesh Yasotharan, e-mail: sanjesh.yasotharan@utoronto.ca, (416) 948-3050 (lab)
| | Please contact the Process Technology Committee (PTC-Foundry[at]mie[dot]utoronto[dot]ca) to get your new username and password set up. |
|
| |
|
| Saja Al-Dujaili, e-mail: s.al.dujaili@utoronto.ca, (416) 946-8210 (lab)
| | Note: you need to email the Process Technology Committee (PTC-Foundry[at]mie[dot]utoronto[dot]ca) to process after hours/on weekends. |
|
| |
|
| Lian Leng, e-mail: lian.leng@utoronto.ca, (416) 946-8210 (lab)
| | ==NEWS== |
|
| |
|
| Faisal Moledina, e-mail: faisal.moledina@utoronto.ca, (416) 946-8210 (lab)
| | New users must attend the training session after the monthly Foundry meeting prior to any fabrication. Fabrication hours are Monday to Friday, 9:00 A.M. to 5:00 P.M. After hours and weekend usage is not permitted. |
|
| |
|
| [http://www.mie.utoronto.ca/labs/mechanobio/people/current/edmond_young/edmond.php Edmond Young], e-mail: edmyoung@mie.utoronto.ca, (416) 978-8660
| | ==LOCATION: MC405, Phone: 8-6851== |
|
| |
|
| Fahad Chowdhury (Radisic group), e-mail: fahad.chowdhury@utoronto.ca, (416) 946-5322
| | ==[[TMFPeople | PEOPLE]]== |
| | List and contact information of active users of the facility, and for the process technology committee (PTC) |
|
| |
|
| Mel Brown (Radisic group), e-mail: mel.brown@utoronto.ca, (416) 946-5322
| | This is a multi-user facility that is supported by a number of UofT research groups. You should adhere to the lab rules (safety, signup, participation in joint info/cleaning sessions) in order to maintain active user status. Click [[TMFPeople | here]] for a list of active users. |
|
| |
|
| [http://www.mie.utoronto.ca/labs/mechanobio/people/current/chris_moraes/chris.php Christopher Moraes], e-mail: chris.moraes@utoronto.ca, (416) 978-8660 (Simmons group), (416) 978-8663 (Sun group) | | The PTC is designed to maintain and improve process standards at the Toronto Microfluidic Foundry. Click [[TMFPeople | here]] for a list of current members. General functions of the PTC are: |
|
| |
|
| [http://amnl.mie.utoronto.ca/index.php?page=team Eric Wu], e-mail: e.wu@utoronto.ca, (647) 895-1275
| | - Approve requests for any new fabrication process |
|
| |
|
| [http://amnl.mie.utoronto.ca/index.php?page=team Xinyu Liu], e-mail: xyliu@mie.utoronto.ca, (416) 978-8663
| | - Provide suggestions for (changes in) user policies and fabrication protocols where needed |
|
| |
|
| Karin Yaccato (Chan group), e-mail: karin.yaccato@utoronto.ca; kyaccato@gmail.com, (416) 946-0015
| | - Match new users with experienced ones for training |
|
| |
|
| Qing Xiang (Chan group), e-mail: qing_xiang2003@yahoo.ca, (416) 946-0015
| | - Make suggestions for improvements of the facility and set priorities with respect to equipment upgrade/ acquisition of new equipment |
|
| |
|
| George Ye (Simmons group), (416) 978-8660; email: george.ye@utoronto.ca
| | - Provide short updates at Foundry Meetings |
|
| |
|
| Omar F. Khan (Sefton group), (416) 978-6518; email: titaniumkid.khan@utoronto.ca
| | - Discussion through our LISTERV account is also encouraged: MICROFLUIDICSFOUNDRY-L[at]listserv[dot]utoronto[dot]ca |
|
| |
|
| Yan Zhao (You group) (416) 978-1097; email: michelle.zhao@utoronto.ca
| |
|
| |
|
| Bogdan Beca (Simmons group), (416) 978-8660; email: b.beca@utoronto.ca
| | For all inquires about facility and access, or new users please contact the PTC at PTC-foundry<at>mie<dot>utoronto<dot>ca |
|
| |
|
| [http://www.ibbme.utoronto.ca/about/staff.htm Bryan Keith (IBBME Teaching Lab)], e-mail: bryan.keith@utoronto.ca, (416) 978-1467 | | ==[[TMFMeetings and Training | MEETINGS AND TRAINING]]== |
| | '''Please note that either attending the monthly meetings or informing us when you can't make it is mandatory for ALL users. Training sessions are held after monthly meetings and are mandatory for new users.''' |
|
| |
|
| Nika Shakiba (Chan group), e-mail: nika.shakiba@utoronto.ca
| | New User Form: |
| | http://mfl.mie.utoronto.ca/PDF/CMS-Fab-Form-2012.pdf |
|
| |
|
| ==Meetings==
| | Upcoming meetings: |
|
| |
|
| '''Please note that either attending the monthly meetings or informing us when you can't make it is mandatory for ALL users.'''
| | Wednesdays |
| | Jan. 16,Feb. 13, March 13, and April 17, 2013 |
| | @ 4pm in MC404A |
|
| |
|
| Thursday, '''July 10, 2-3PM, HA311'''
| | ==SUPPLIES NEEDED== |
| | | Please contact the PTC if supplies are running low. |
| (a) no solvents, epoxy, PDMS debris allowed in laminar-flow hood
| |
| | |
| (b) always remove protective sheets at counter tops when dirty
| |
| | |
| (c) regularly organize pickup of solid waste
| |
| | |
| (d) order and restock supplies:
| |
| - see emailed list
| |
| | |
| (e) don't turn off the right oven
| |
| | |
| (f) all new summer students need to (I) see Axel, (II) have Health & Safety training and (III) need to be trained in the foundry before getting access
| |
| | |
| (g) regularly clean up after yourself and others, report more persistent cleanliness issues
| |
| | |
| (h) update on new equipment and new facility
| |
| | |
| ==Supplies needed== | |
| | |
| ===Ordered===
| |
| | |
| Enter the ordered items here.
| |
| | |
| ===Received===
| |
| | |
| Enter received supplies here
| |
| | |
| ==Equipment usage log==
| |
| | |
| Date, machine name, problem description. All users are requested to record hours spent in the Foundry.
| |
| | |
| August 13th, 3:00-4:00, Emma, plasma cleaner
| |
| | |
| August 13th, 11:00-11:30, Emma, plasma cleaner
| |
| | |
| August 13, 8:00-11:00am, Saja, plasma, hot plates, spin coater, exposure, develop
| |
| | |
| August 13th, 4:30-6:00, Karin, Spin Coater
| |
| | |
| (Pump for spin coater stopped working after ~1/2 hr. Oil was nearly empty and pump was very hot. Supply bottle was cleaned and oil was replaced. Worked well.)
| |
| | |
| August 12th, 1:45-2:30, Fahad, spin coater
| |
| | |
| August 12th, 9:00-2:30pm, Aaron, plasma, spin coater, hot plates, exposure, develop
| |
| | |
| August 12th, 3:00-4:00, Emma, plasma cleaner
| |
| | |
| August 12th, 10:00-11:00, Emma, plasma cleaner
| |
| | |
| August 11th, 4:30-5:00, Karin, Spin Coater
| |
| | |
| August 11th, 2:00-3:00, Emma, plasma cleaner
| |
| | |
| August 11, 9:00-2:00pm, Lian, plasma, hot plates, spin coater, exposure, develop
| |
| | |
| August 10, 11:00-10:15am, Bogdan, spin coater
| |
| | |
| August 8, 2:55-3:10pm, Bogdan, spin coater (Note: The aluminum foil in the spin coater was not changed and it was full of liquid)
| |
| | |
| August 8th, 10:45-12:15, Emma, vacuum
| |
| | |
| August 8, 9:30-12:00pm, Saja, plasma, hot plates, spin coater, exposure, develop
| |
| | |
| August 7th, 4:00-5:00, Emma, plasma cleaner
| |
| | |
| August 7th, 2:00-4:00pm, omar, plasma cleaner
| |
| | |
| August 7th, 4:45-5:00pm+, Karin, Spin Coater
| |
| | |
| August 7, 10:00-2:00pm, Sanjesh, plasma, hot plates, spin coater, exposure, develop
| |
| | |
| August 6, 4:30-5pm, Karin, spin coater
| |
| | |
| August 6, 3:00-4:00, Emma, plasma cleaner, vacuum, oven, balance
| |
| | |
| Aug 6, 10:00 am - 12:00 PM, omar, plasma cleaner
| |
| | |
| Aug 4, 4:55-5:15PM, chris, spin coater
| |
| | |
| Aug 4, 1:35-1:50pm, Bogdan, spin coater
| |
| | |
| Aug 1, 4-5pm, Karin, spin coater (replaced N2 tank)
| |
| | |
| Aug 1, 2:45-2:55, Bogdan, spin coater (NOTE: Nitrogen tank ran out of nitrogen)
| |
| | |
| July 31, 11:50-12:00, Chris, spin coater
| |
| | |
| July 30, 1-6 pm, Faisal, plasma, hot plates, spin coater, UV expose
| |
| | |
| July 30, 6:45-6:55, Chris, spin coater
| |
| | |
| July 30, 3:00-4:00, Karin, spin coater
| |
| | |
| July 30, 10:00-12:00, Yan, plasma, hot plates, spin coater, exposure, develop
| |
| | |
| July 29, 11:15-3:00pm, Sanjesh, plasma, hot plates, spin coater, exposure, develop
| |
| | |
| July 29, 11:00-12:00, Karin, spin coater
| |
| | |
| July 24, 2:00-5:00 pm, Yan, plasma, hot plates, spin coater, exposure, develop
| |
| | |
| July 23, 1:00-2:30, Fiona, spin coater, plasma cleaner
| |
| | |
| July 23, 10:35-10:50, Bogdan, spin coater
| |
| | |
| July 23, 10:30-11:00, plasma, balance, vacuum
| |
| | |
| July 22, 12:15-12:30, Bogdan, spin coater
| |
| | |
| July 22, 10:00-10:30, Emma, plasma, balance, vacuum
| |
| | |
| July 22, 2:00-5:00pm, Saja, plasma, hot plates, spin coater, exposure, develop
| |
| | |
| July 21, 3:30-4:00, Emma, plasma, balance, vacuum
| |
| | |
| July 21, 10:30-11:00, Emma, balance, vacuum
| |
| | |
| July 21, 2-5 pm, Faisal, plasma, hot plates, spin coater, UV expose
| |
| | |
| July 18, 11 am - 2 pm, Faisal, plasma, hot plates, spin coater, UV expose
| |
| | |
| July 18, 3:20-3:50, Emma, plasma, balance, vacuum
| |
| | |
| July 18, 1:30-3:00pm, Sanjesh, plasma, hot plates, spin coater, exposure, develop
| |
| | |
| July 18, 10:15-11:15, Emma, plasma, balance, vacuum
| |
| | |
| July 18, 11-12:30pm, Karin, spin coater
| |
| | |
| July 18, 9:00-12:00pm, Sanjesh, plasma, hot plates, spin coater, exposure, develop
| |
| | |
| July 17, 12:25-12:35pm, Bogdan, spin coater
| |
| | |
| July 17, 11:00-12:00, Emma, plasma cleaner, scale, vacuum
| |
| | |
| July 16, 5:10-5:20pm, Bogdan, spin coater
| |
| | |
| July 16, 1:00-4:00pm, Sanjesh, plasma, hot plates, spin coater, exposure, develop
| |
| | |
| July 16, 10:30-1:00, Yan, plasma, hot plates, spin coater, exposure, develop
| |
| | |
| July 15, 10-11:30am, Karin, spin coater
| |
| | |
| July 14, 1:00-2:00, Emma, plasma cleaner, scale, vacuum, oven
| |
| | |
| July 11, 11-11:30am, Fahad, spin coater
| |
| | |
| July 11, 9:20-9:30am, Bogdan, spin coater
| |
| | |
| July 10, 3:30-3:40pm, Bogdan, spin coater
| |
| | |
| July 10, 10:30 - 11:00m, vacuum, oven, weight scale
| |
| | |
| July 10, 9:30-12:00pm, Lian, plasma, hot plates, spin coater, exposure, develop
| |
| | |
| July 9, 9:30-12:00pm, Yan, plasma, hot plates, spin coater, exposure, develop
| |
| | |
| July 9, 9:30-12:00pm, Saja, plasma, hot plates, spin coater, exposure, develop
| |
| | |
| July 9, 11:30-1:30, Fiona, spincoater
| |
| | |
| July 8, 9:33-9:45am, Bogdan, spin coater
| |
| | |
| July 8, 10:30-1:30pm, Yan, plasma, hot plates, spin coater, exposure, develop
| |
| | |
| July 8, 10:30-1:30pm, Saja, plasma, hot plates, spin coater, exposure, develop
| |
| | |
| July 7, 1:00-1:20pm, Lian, spin coater
| |
| | |
| July 7, 9:00-3:00pm, Sanjesh, plasma, hot plates, spin coater, exposure, develop
| |
| | |
| July 4, 2:30-3:30, Emma, plasma cleaner, balance, vacuum
| |
| | |
| July 4, 12:00-4:00pm, Chi-Hang, develop, balance, vacuum, oven
| |
| | |
| July 4, 9:00-3:00pm, Lian, plasma, hot plates, spin coater, exposure, develop
| |
| | |
| July 4, 9:15-10:15, Emma, plasma cleaner, balance, vacuum
| |
| | |
| July 3, 3:45-4:45, Emma, plasma cleaner, balance, vacuum
| |
| | |
| July 3, 12:00-6:00pm, Sanjesh, plasma, hot plates, spin coater, exposure, develop
| |
| | |
| July 3, 9:40-10:40, Emma, plasma cleaner, balance, vacuum
| |
| | |
| July 2, 11:30-5:00pm, Sanjesh, plasma, hot plates, spin coater, exposure, develop
| |
| | |
| July 2, 3:20-3:45pm, Bogdan, spin coater
| |
| | |
| June 27, 9:30-2:00pm, Sanjesh, plasma, hot plates, spin coater, exposure, develop
| |
| | |
| June 26, 3:30 - 4:00, Eric, oven
| |
| | |
| June 26, 2:00-4:30, Siavash, plasma, spin coater, hot plates, exposure, develop
| |
| | |
| June 26, 12:00-3:00, Lian, plasma, spin coater, hot plates, exposure, develop
| |
| | |
| June 26, 3:00-4:00, Emma, plasma cleaner
| |
| | |
| June 25, 1:00-5:00pm, Sanjesh, plasma, hot plates, spin coater, exposure, develop
| |
| | |
| June 25, 11:30-12:00, Emma, balance
| |
| | |
| June 24, 12:00 - 4:00, Eric, vacuum, oven
| |
| | |
| June 24, 2:55-3:00pm, Bogdan, spin coater
| |
| | |
| June 24, 3:30-4:30pm, Emma, plasma cleaner
| |
| | |
| June 24, 9:00-3:00pm, Aaron, plasma, spin coater, hot plates, exposure, develop
| |
| | |
| June 24, 9:00-3:00pm, Lian, plasma, spin coater, hot plates, exposure, develop
| |
| | |
| June 24, 11-12, omar, vacuum oven, balance, plasma cleaner
| |
| | |
| June 23, 11:00-4:00pm, Sanjesh, plasma, hot plates, spin coater, exposure, develop
| |
| | |
| June 22, 2:25-2:40, Chris, spin coater
| |
| | |
| June 20, 11:40-11:50, Bogdan, spin coater
| |
| | |
| June 20, 9:00-3:00pm, Lian, plasma, spin coater, hot plates, exposure, develop
| |
| | |
| June 19, 6:17-6:28pm, Bogdan, spin coater
| |
| | |
| June 19, 11:15-11:30am, Bogdan, spin coater
| |
| | |
| June 18, 3:40 - 4:05, Chris, spin coater
| |
| | |
| June 17, 4:20-4:30, Chris, spin coater
| |
| | |
| June 12, June 2, 9:00-2:00pm, Lian, plasma, spin coater, hot plates, exposure, develop
| |
| | |
| June 10, 2:24-2:40, Chris, spin coater
| |
| | |
| June 10, 2-3PM, Foundry Meeting, attended by Chris, Siavash, Lian, Chi-Hang, Mel, Fahad, Sanjesh (please complete). Lian did a great job cleaning in advance. Thank you!! Please all make an effort to keep the Foundry clean and spend time with training new users. -Axel
| |
| | |
| June 10, 11:00-11:30, Fiona, spincoater
| |
| | |
| June 9, 1:00-4:30pm, Sanjesh, plasma, hot plates, spin coater, exposure, develop
| |
| | |
| June 9, 1:00-3:00pm, Faisal, plasma clean, spin coater, UV exposure
| |
| | |
| June 6, 9:00-2:00pm, Sanjesh, plasma, hot plates, spin coater, exposure, develop
| |
| | |
| June 5, 2:00-10:00pm, Faisal, plasma clean, spin coater, UV exposure
| |
| | |
| June 4, 2:00-10:00pm, Faisal, plasma clean, spin coater, UV exposure
| |
| | |
| June 4, 4:20-5:00pm, Mel, plasma, spin coater
| |
| | |
| June 4, 10:30-10:45am, Bogdan, spin coater
| |
| | |
| June 4, June 2, 9:00-2:00pm, Lian, plasma, spin coater, hot plates, exposure, develop
| |
| | |
| June 3, 4:20-4:50, Bogdan, spin coater
| |
| | |
| June 3, 11:00-12:00, Fiona, spin coater
| |
| | |
| June 2, 3:20-3:45pm, 6:15-7:05pm, Mel, plasma, spin coater. NOTE: Coater was caked in PDMS. Also, small (12mm diameter) coverslips won't spin in coater (coater runs cycle but does not spin)
| |
| | |
| June 2, 9:00-4:00pm, Lian, plasma, spin coater, hot plates, exposure, develop
| |
| | |
| May 29, 2:00-10:00pm, Faisal, plasma clean, spin coater, UV exposure
| |
| | |
| May 26, 1:00-4:30pm, Sanjesh, plasma, hot plates, spin coater, exposure, develop
| |
| | |
| May 26, 10:00-1:00pm, Saja, plasma, hot plates, spin coater, exposure, develop
| |
| | |
| May 22, 9:00-2:00pm, Lian, plasma, spin coater, hot plates, exposure, develop
| |
| | |
| May 21, 1:15-2:00pm, Fahad, spin coater
| |
| | |
| May 21, 9:00-3:00pm, Sanjesh, plasma, hot plates, spin coater, exposure, develop
| |
| | |
| May 20, 2:55-3:25pm, Mel, spin coater, plasma cleaner
| |
| | |
| May 20, 1:00 - 1:30pm, Bogdan, spin coater (used only one (last) foil of Al to cover spin coater since there was no new foil)
| |
| | |
| May 19, 2:20-2:45, Chris, spin coater
| |
| NOTE: out of Aluminum foil.
| |
| | |
| May 17, 15:15-15:30, Chris, spin coater
| |
| | |
| May 16, 12:40-12:57pm, Bogdan, spin coater
| |
| | |
| May 14, 1:00-3:00pm, Sanjesh, Plasma, bench
| |
| | |
| May 13, 11:00-12:00, You lab, bench, scale, vacuum, oven
| |
| | |
| May 12, 10:00-3:00pm, Sanjesh/Brendan, plasma, hot plates, spin coater, exposure, develop
| |
| | |
| May 9, 4:32-5:00pm, Bogdan, spin coater
| |
| | |
| May 9, 12:00-1:00, You lab, bench, scale, vacuum, oven
| |
| | |
| May 9, 9:30-3:00pm, Sanjesh/Brendan, plasma, hot plates, spin coater, exposure, develop
| |
| | |
| May 8, 4:30-5:30pm, Mel, plasma, spin coater - vacuum suction unreliable at keeping small 12mm coverslips in place resulting in spin coater not spinning
| |
| | |
| May 8, 12:15-12:40, Bogdan, spin coater
| |
| | |
| May 8, 11:00-12:00, You lab, bench, scale, vacuum, oven
| |
| | |
| May 7, 9:30-4:00pm, Brendan, plasma, hot plates, spin coater, exposure, develop
| |
| | |
| May 7, 9:00-4:00pm, Lian, plasma, hot plates, spin coater, exposure, develop
| |
| | |
| May 5, 10:30-11:30am, Bench, plasma,
| |
| | |
| May 1, 9:30-4:00pm, Brendan, plasma, hot plates, spin coater, exposure, develop
| |
| | |
| May 1, 9:00-4:00pm, Lian, plasma, hot plates, spin coater, exposure, develop
| |
| | |
| Apr 30, 10:00-12:00pm, Saja, plasma, hot plates, spin coater, exposure, develop
| |
| | |
| Apr 29, 11:00-1:30pm, Saja, plasma, hot plates, spin coater, exposure, develop
| |
| | |
| Apr 25, 10:00-1:00pm, Saja, plasma, hot plates, spin coater, exposure, develop
| |
| | |
| Apr 23, 10:00-1:00pm, Saja, plasma, hot plates, spin coater, exposure, develop
| |
| | |
| Apr 23, 10:00-3:00, Brendan, plasma, hot plates, spin coater, exposure, develop
| |
| | |
| Apr 22, 12:00-16:00, Steve, plasma, hot plates, exposure, develop
| |
| | |
| Apr 22, 12:30-2:00pm, Qing, Bench, plasma, digital scale, vacuum chamber
| |
| | |
| April 22, 7:00-8:00, axel, plasma cleaner, oven
| |
| | |
| Apr 21, 9:00-4:30, Lian, plasma, hot plates, spin coater, exposure, develop
| |
| | |
| April 18, 12:30-13:00, omar, plasma cleaner
| |
| | |
| Apr 18, 7:30-800, omar, balance, vacuum oven
| |
| | |
| Apr 18, 10:00-3:00, Brendan, plasma, hot plates, spin coater, exposure, develop
| |
| | |
| Apr 18, 9:00-3:00, Lian, plasma, hot plates, spin coater, exposure, develop
| |
| | |
| Apr 17, 12:00-15:00, Steve, plasma, hot plates, exposure, develop
| |
| | |
| Apr 17, 13:00-14:00, omar, plasma cleaner
| |
| | |
| Apr 17, 7:30-8:00, omar, balance, vacuum oven
| |
| | |
| Apr 16, 11:00-12:30, You lab, bench, scale, vacuum, oven
| |
| | |
| Apr 16, 800-1000am, omar, spin coater, hood, UV
| |
| | |
| Apr 16, 6:40-7:40am, axel, curing oven, vacuum chamber
| |
| | |
| Apr 15, 7:40-8:40am, axel, digital scale, vacuum chamber
| |
| cleaned benches, ** please keep counters clean - thanks **
| |
| | |
| Apr 15, 800-830am, omar, digital scale, vacuum chamber
| |
| | |
| Apr 14, 2-4pm, Qing, Bench, plasma, digital scale, vacuum chamber
| |
| | |
| Apr 14, 930-1130, omar, spin coater, plasma, UV
| |
| | |
| Apr 10, 15:00-17:00, omar, Spin coater, UV lamp, hood
| |
| | |
| Apr 8, 2-4pm, Qing, Bench, plasma, digital scale, vacuum chamber
| |
| | |
| Mar 26, 4-5pm, Karin (Chan lab), Bench, plasma, digital scale,
| |
| | |
| Mar 26, 3:30-4:40pm, Qing, Bench, plasma, digital scale, vacuum chamber
| |
| | |
| Mar 24, 1:45-2:15, Fahad, Spin coater, hood
| |
| | |
| March 20, 1:00-2:00 Eric, UV exposure ULA dow corning dishes
| |
| | |
| Mar 25, 9:20-9:35, Chris, Spin coater
| |
| | |
| Mar 18, 10:00-11:00, omar, plasma cleaner
| |
| | |
| Mar 18. 10-12am, Qing, Bench, plasma, digital scale, vacuum chamber
| |
| | |
| Mar 17, 1830-1840, Chris, Spin coater
| |
| | |
| Mar 17, 9:00-16:30, Brendan, plasma clean, spin coater, UV exposure
| |
| | |
| Mar 17, 9:00-16:30, Lian, plasma clean, spin coater, UV exposure
| |
| | |
| Mar 14, 1120-1300, Chris, UV exposure and spin coater
| |
| | |
| Mar 13, 13:00-14:00, Omar, spin coater.
| |
| | |
| Mar 13, 8:45-9 am, 12:15-12:30 pm, Yoan, spin coater.
| |
| | |
| Mar 12, 2:30-2:45 pm, Yoan, spin coater.
| |
| | |
| Mar 11, 3:45-4 pm, Yoan, spin coater.
| |
| | |
| Mar 7, 12:50 - 1:15, Chris, UV exposure
| |
| | |
| Mar 4, 12:00 pm - 12:00 pm (24 hrs), Eric, dessicator.
| |
| | |
| Mar 3, 2:30pm-3:30pm, Fahad, spin coater
| |
| | |
| Mar3, 12:00 pm - 12:00 pm (24 hrs), Eric, dessicator.
| |
| | |
| Mar 2, 3:45-4 pm, Yoan, spin coater.
| |
| | |
| Mar 2, 2-3:15pm, Qing, Bench, plasma, digital scale, vacuum chamber
| |
| | |
| Feb 25, 1-2pm, Karin (Chan Group), bench, plasma,
| |
| | |
| Feb 25, 2:00pm - 2:00pm (24 hour) Eric Wu, dessicator
| |
| | |
| Feb 21, 10:30am - 4:30pm, Faisal, plasma clean, spin coater, UV exposure
| |
| | |
| Feb 21, 6-6:20PM, Chris, Spin Coater Recipe #4
| |
| | |
| Feb 21, 2-3pm, Qing, Oven, Bench, Plasma,
| |
| | |
| Feb 20, 6:15-6:30, Yoan, spin coater.
| |
| | |
| Feb 20, 4PM - 4:30PM, UV exposure
| |
| | |
| Feb 20, 4-4:15pm Nitrogen, 4:15-4:30pm plasma cleaner, 4:30-7pm hood space
| |
| | |
| Feb 20, 11:00am - 1:00pm, 1:45 - 5:00pm, Faisal, plasma clean, spin coater, UV exposure
| |
| | |
| Feb 20, 2-3:45pm, Qing, Oven, Bench, Plasma,
| |
| | |
| Feb 19, Overnight 4:00pm-4:00pm, Eric Wu, Dessicator, Silanization.
| |
| | |
| Feb 18, 4:50-5:10PM, Chris, UV exposure
| |
| | |
| Feb 18, 1:00-1:30PM, Chris, UV Exposure
| |
| | |
| Feb 15, 10:00-5:00pm, Brendan, plasma clean, spin coater, UV exposure
| |
| | |
| Feb 15, 9:30-5:00pm, Lian, plasma clean, spin coater, UV exposure
| |
| | |
| Feb 14, 10-10:30, Yoan, spin coater. PROBLEM: spin coater not registering cover as closed. (this has been fixed)
| |
| | |
| Feb 14, 9-10 am, Qing, plasma, workstation
| |
| | |
| Feb 13, 2:50-4:20, Mel, plasma, spin coater - Nitrogen tank changed
| |
| | |
| Feb 11, 12-4pm, Steve, plasma, spin coater, UV exposure, Develop
| |
| | |
| Feb 9, 7:15PM-7:30PM, Chris: spin coater
| |
| | |
| Feb 7, 11:30am-12:15pm, Mel, plasma, spin coat
| |
| | |
| Feb 5, 1:30-2:30pm, Qing, plasma, workstation,
| |
| | |
| Feb 5, 2:00pm-2:45pm, Mel, plasma cleaner
| |
| | |
| Feb 4, 2:00pm-5:00pm, Faisal, plasma clean, spin coater, UV exposure
| |
| | |
| Feb 4, 3:00pm-4:00pm, Fiona, spin coater
| |
| | |
| Feb 4, 2:00pm-4:00pm, Steve, plasma clean, spin coater, UV exposure
| |
| | |
| Feb 4, 10:00-12:00, Saja, work bench, UV exposure, plasma cleaner
| |
| | |
| Feb 3, 12:00pm-3:00pm, Steve, plasma clean, spin coater, UV exposure
| |
| | |
| Feb 2, 12:00pm-4:00pm, Steve, plasma clean, spin coater, UV exposure
| |
| | |
| Feb 2, 9:00-9:30am, Saja, balance, vacuum oven
| |
| | |
| February 1, 9:00am-3:00pm, Brendan, plasma clean, spin coater, UV exposure
| |
| | |
| February 1, 9:00am-3:00pm, Lian, plasma clean, spin coater, UV exposure
| |
| | |
| Jan 31, 1:30pm-2:15pm, Mel, spin coater
| |
| | |
| Jan 31, 2:00-7:00pm, Saja, plasma cleaner, spin coater, UV exposure
| |
| | |
| Jan 30, 1:00-5:00pm, Saja, plasma cleaner, spin coater, UV exposure
| |
| | |
| Jan 30, 12:30-1:15, Yoan, spin coater.
| |
| | |
| Jan 30, 2:30pm-3:30pm, Mel, spin coater
| |
| | |
| Jan 29, 1:00pm-2:00pm, Eric, plasma, ethanol wash
| |
| | |
| Jan 29, 2:00pm-2:30pm, Fiona, spin coater
| |
| | |
| Jan 29, 9:00am-4:00pm, Brendan, plasma cleaner, spin coater, UV exposure
| |
| | |
| Jan 29, 9:00am-4:00pm, Lian, plasma cleaner, spin coater, UV exposure
| |
| | |
| Jan 28, 3:00-3:15, Chris, Spin Coater. Fixed the vacuum problem: hard whitish polymer in the chuck blocking the vacuum line - scraped out with pointed scalpel.
| |
| | |
| Jan 28, 11:45-12:00, Chris, Spin Coater. PROBLEM: Vacuum chuck not maintaining vacuum. Not enough time to attempt fixes.
| |
| | |
| Jan 25, 2:00 - 3:00, Mel, Spin coater
| |
| | |
| Jan 25, 11:00 am - 4:00 pm, Faisal, plasma, spin coater, UV, hot plates
| |
| | |
| Jan 22, 4:00 - 5:00, Eric, PDMS + Oven + Vacuum
| |
| | |
| Jan 21, 10:15am-10:30am, Eric, Sonication + Plasma cleaner
| |
| | |
| Jan 21, 10-11am, 3:30-4:00pm, Qing, plasma, workstation, digital scale, vacuum chamber
| |
| | |
| Jan 21, 12:15-12:45pm, Fahad, spin coater
| |
| | |
| Jan 21, 9:00am-4:00pm, Brendan, plasma cleaner, spin coater, UV exposure
| |
| | |
| Jan 21, 9:00am-4:00pm, Lian, plasma cleaner, spin coater, UV exposure
| |
| | |
| Jan 17, 12:00-12:30, Chris & Yoan, spin coater
| |
| | |
| Jan 17, 9:00-9:30am, Omar, plasma cleaner
| |
| | |
| Jan 16, 3:45-4:30pm, Mel, spin coater
| |
| | |
| Jan 16, 10:00am-4:00pm, Lian, plasma cleaner, spin coater, UV exposure
| |
| | |
| Jan 16, 9:00-9:45am, Omar, plasma cleaner
| |
| | |
| Jan 15, 9:30-11:00am, 5-6:00pm, Qing, plasma, workstation, digital scale, vacuum chamber
| |
| | |
| Jan 15, 9:00am-5:00pm, Lian, plasma cleaner, spin coater, UV system
| |
| | |
| Jan 15, 9:00-9:30am, Omar, plasma cleaner
| |
| | |
| Jan 14, 9:00-10:00am, Omar, plasma cleaner
| |
| | |
| Jan 11, 15:00-18:00, Omar, Spin coater, UV system
| |
| | |
| Jan 10, 3:00-4:50pm, Qing, plasma, workstation, digital balance, vacuum chamber
| |
| | |
| Jan 10, 9:00 - 10:00, Omar Khan, plasma cleaner, PROBLEM: N2 Tanks Empty
| |
| | |
| Jan 10-11:00pm, Qing, digital balance, vacuum chamber, Oven
| |
| | |
| Jan 9, 13:45 - 14:30, Omar Khan, Digital balance, oven
| |
| | |
| Jan 7, 11:45, Fiona Rask, spin coater, could not use, PROBLEM: VACUUM NOT WORKING!
| |
| | |
| Dec 20, 11:00-3:00, Brendan MacDonald, spin coater, UV system, plasma cleaner
| |
| | |
| Dec 19, 11:00-3:00, Brendan MacDonald, spin coater, UV system, plasma cleaner
| |
| | |
| Dec 19, 10:00-2:00, Saja Al-Dujaili, spin coater, UV system, plasma cleaner
| |
| | |
| Dec 18, 2:30 - 4:00, Brendan MacDonald, spin coater, UV system, plasma cleaner
| |
| | |
| Dec 18, 9:00 - 10:00, Omar, plasma cleaner
| |
| | |
| Dec 17, 2:30 - 4:30, Brendan MacDonald, spin coater, UV system, plasma cleaner
| |
| | |
| Dec 17, 12:30 - 13:00, Fahad, spin coater
| |
| | |
| Dec 13, 8:30 - 9:30, omar, spin coater, 13:00-13:30 UV System
| |
| | |
| Dec 13, 9:30 - 14:00, omar, spin coater, UV system
| |
| | |
| Dec 12, 17:00 - 18:00, omar, plasma cleaner
| |
| | |
| Dec 12, 8:00 - 9:00, omar, plasma cleaner
| |
| | |
| Dec 11, 15:20 - 15:45, omar, plasma cleaner
| |
| | |
| Dec 11, 9:40-10:50am, Qing, plasma, workstation, digital balance, vacuum chamber
| |
| | |
| Dec 7, 11:00-14:30, omar, spin coater, UV system
| |
| | |
| Dec 7, 9:30-10:15am, Qing, plasma, workstation
| |
| | |
| Dec 6, 9:30-10:15am, Qing, plasma, workstation, digital balance, vacuum chamber
| |
| | |
| Dec 6, 9:30-9:45am, Fahad, spin coater
| |
| | |
| Dec 5, 13:00-15:30, Omar, spin coater, UV system
| |
| | |
| Dec 5, 8:30 - 10:00, Omar, spin coater, UV system
| |
| | |
| Dec 4, 1:50pm, Qing, plasma, workstation
| |
| | |
| Dec 4, 12:30-13:00, plasma cleaner
| |
| | |
| Nov 30, 1:40-2:40pm, Qing, plasma, workstation, oven
| |
| | |
| Nov 29, 10:00-11:30am, Qing, plasma, workstation, digital balance, vacuum chamber, oven
| |
| | |
| Nov 28, 3:00-3:30pm, Qing, digital balance, vacuum chamber
| |
| | |
| Nov 27, 9:00am-12:00pm, Omar Khan, spin coater, UV system, plasma cleaner
| |
| | |
| Nov 26, 3:30-4:00pm Qing, digital balance, vacuum chamber
| |
| | |
| Nov 26, 1:30-1:45pm, Fahad, spin coater
| |
| | |
| Nov 23, 9:00 - 3:00pm, Steve Shih, spin coater, UV system, plasma cleaner
| |
| | |
| Nov 23, 10:00-11:30 am, 1:30-3:30 pm, Faisal Moledina, spin coater, UV system, plasma cleaner
| |
| | |
| Nov 22, 2:00-3:00pm, Qing, plasma, workstation, digital balance, vacuum chamber, oven
| |
| | |
| Nov 21, 4:00-4:30pm, Qing, plasma, workstation, digital balance, oven
| |
| | |
| Nov 22, 11:00-4:00pm, Brendan MacDonald, spin coater, UV system, plasma cleaner
| |
| | |
| Nov 22, 11:00-4:00pm, Lian Leng, spin coater, UV system, plasma cleaner
| |
| | |
| Nov 21, 6:45-7PM, Christopher Moraes, Spinner
| |
| | |
| Nov. 21, 1:30-3:30, Saja Al-Dujaili, bench, UV system, microscope, plasma cleaner
| |
| | |
| Nov 21, 10:00am-2:00pm, Brendan MacDonald, spin coater, UV system, plasma cleaner
| |
| | |
| Nov 20, 1:00 - 2:30 pm, Qing, plasma, workstation, digital balance, vacuum chamber, oven
| |
| | |
| Nov 19, 2:30-4:00pm, Qing, plasma, workstation, digital balance, vacuum chamber, oven
| |
| | |
| Nov. 20, 1:00-4:00, Saja Al-Dujaili, bench, UV system, microscope, plasma cleaner
| |
| | |
| Nov 20, 7:00 - 11:30, Omar Khan, spin coater, UV system, plasma cleaner, bench, laminar flow hood, UV lamp
| |
| | |
| Nov 19, 13:30 - 15:30, Omar Khan, digital balance, vacuum chamber, oven
| |
| | |
| Nov 19, 1:45-2:15, Fahad Chowdhury, spin coater
| |
| | |
| Nov 19, 10:30-11:30, 3:15-3:30 Saja Al-Dujaili, digital balance, vacuum chamber, oven.
| |
| | |
| Nov 19, 10:00-12:00, Brendan MacDonald, spin coater, UV system, plasma cleaner
| |
| | |
| Nov 19, 10:00-12:00, Lian Leng, spin coater, UV system, plasma cleaner
| |
| | |
| Nov 19, 9:00-12:00, Omar Khan, spin coater, UV system, plasma cleaner, bench, laminar flow hood
| |
| | |
| Nov 16, 10:40-2:00, Omar Khan, spin coater, UV system, plasma cleaner, bench, laminar flow hood
| |
| | |
| Nov 16, 10:40-2:00, Saja Al-Dujaili, spin coater, UV system, plasma cleaner, bench, laminar flow hood
| |
| | |
| Nov 12, 1:45-3:00pm, Qing,plasma cleaner, workstation, digital balance, vacuum chamber
| |
| | |
| Nov 9, 9:15-9:45 Saja Al-Dujaili, laminar flow hood
| |
| | |
| Nov 8, 2:00-2:15, 3:15-3:30 Saja Al-Dujaili, digital balance, vacuum chamber, oven.
| |
| | |
| Nov 7, 3:30-5pm, Qing Xiang, plasma cleaner, workstation, digital balance, vacuum chamber
| |
| | |
| Nov 7, 4:00-4:20pm, Lian Leng, plasma cleaner, oven.
| |
| | |
| Nov 6, 5:00-5:40pm, Lian Leng, plasma cleaner, oven.
| |
| | |
| Nov 6, 1-3pm, Qing, plasma cleaner, workstation, digital balance, vacuum chamber.
| |
| | |
| Nov 5, 2-4pm, Qing, plasma cleaner, workstation, digital balance, vacuum chamber.
| |
| | |
| Nov 5, Mel Brown, fume hood 1:30-3:30, plasma cleaner 1:30-1:45
| |
| | |
| Nov 5, 12:30-1:00pm, Lian Leng, plasma cleaner, oven.
| |
| | |
| Oct 30, Mel Brown, fume hood 1-3:30, plasma cleaner 1:15-1:45 - could not use equipment as
| |
| nitrogen tanks empty (required for first step).
| |
| | |
| Oct 22, Qing Xiang, Workstation, vacuum chamber, plasma, and balance.
| |
| | |
| '''''When I was using Plasm cleaner, initially no plasma produced. Found that the tube line of the Plasma cleaner is disconnected to the oven, it is not working since the vacuum is not high enough. After connecting the tube, it works well. Just remind everyone, check the line and make sure it is not disconnected.'''''
| |
| | |
| Oct 19, 4:00-6:00pm, Lian Leng, balance, vacuum chamber, oven.
| |
| | |
| Oct 18, Qing Xiang, workstation, vacuum chamber and balance
| |
| | |
| October 15, Fahad Chowdhury, 11:45-12:15, Spin-coat
| |
| | |
| October 2, Fahad Chowdhury, 14:15-14:45, Spin-coat
| |
| | |
| October 2, Eric Wu, 15:00-16:00, weight scale, plasma, bench, vacuum, oven
| |
| | |
| October 2, Mel Brown, 11:00am-2pm, plasma cleaner (11:00-11:30), fume hood
| |
| | |
| October 1, Lian Leng, 1:00pm-5:00pm, Su-8 Spincoat,Bake, UV expose, develop
| |
| | |
| October 1, Fahad Chowdhury, 11:00am-12:45pm, Spin-coat
| |
| | |
| Eric Wu - Sept 26, 11:00-12:00, expose, develop
| |
| | |
| Eric Wu - Sept 25, 4:00-5:00, su8 spincoat, bake, uv expose, develop
| |
| | |
| Eric Wu - Sept 24, 12:30 - 2:00, SU8-2050, spincoater, uv plasma, oven, nitrogen, sonicator
| |
| | |
| Qing Xiang, used workstation, plasma, Spet 20, 11:30-12:30am, no problem
| |
| | |
| September 19, George Ye, 6:15-7:15pm, SU 8 feature layer fabrication, hot plates, UV lamp, spincoater
| |
| | |
| September 19, George Ye, 9:30-10:40am, SU 8 feature layer fabrication, hot plates, UV lamp, spincoater
| |
| | |
| September 18, George Ye, 5:30-7:00pm, Su 8 seed layer fabrication, hot plates, UV lamp, spincoater
| |
| | |
| September 18, September Monthly Meeting. Participants: Steve, Fahad, Mel, 2:30-3:30PM
| |
| | |
| September 13, Chris Moraes, 3:40-4:10: spin coating PDMS
| |
| | |
| September 12, Eric Wu, 3:30 - 6:00, plasma, pdms, oven, hood
| |
| | |
| September 11, Melissa Brown, 12:30-3:00, plasma cleaner (12:30-1:00 only) and hood
| |
| | |
| September 5, Barzin Doroodgar, 12:00-1:00, spincoat, UV, bake
| |
| | |
| August 30, Emma Brisson, 4:30-5:00, plasma cleaner and hood
| |
| | |
| August 30, Emma Brisson, 10:00-10:15, balance and vacuum chamber
| |
| | |
| August 29, Eric Wu, 10:00am - 9:00pm, SU8-25, Plasma, Acetone/Isopropanol Clean, Sonicator, Nitrogen, Hood, Vaccum, Hotplates, Oven.
| |
| | |
| August 29, Emma Brisson, 4:00-5:00; plasma cleaner, hood
| |
| | |
| August 28, Eric Wu, 3:00 - 5:00, SU8-25, Plasma, Acetone/Isopropanol Clean, Sonicator, Nitrogen, Hood, Vaccum, Hotplates, Oven.
| |
| | |
| August 28, Emma Brisson, 11:45-12:45, plasma cleaner, hood
| |
| | |
| August 27, Emma Brisson, 3:30-4:15, plasma cleaner, hood
| |
| | |
| Aug 24, Qing Xiang, 5:00-5:30pm, blance, vacuum chamber
| |
| | |
| August 24, Eric Wu, 12:40 - 12:50, (Protein removal from stamps: UV plasma, ethanol sonication)
| |
| | |
| August 24, Emma Brisson, 1:30-2:30, plasma cleaner and hood
| |
| | |
| August 23, Emma Brisson, 12:30-1:30, 3:30-3:45, plasma cleaner and hood
| |
| | |
| August 23, Eric Wu, 12:00 - 12:10, (Protein removal from stamps: UV plasma, ethanol sonication)
| |
| | |
| August 22, Eric Wu, 12:00 - 12:05 (Prepare surface for silanization mix adsorption: UV plasma)
| |
| | |
| August 21, Emma Brisson, 10:30-11, hood, vacuum oven, curing oven, 4-5 plasma cleaner
| |
| | |
| August 21, Melissa Brown, 2:00-5:00pm, hood, 2:30-3:00pm, plasma cleaner
| |
| | |
| August 21, Eric Wu, 1:00 - 1:10 (Protein removal: UV Plasma, Ethanol Sonication)
| |
| | |
| *** AUGUST 16 - FOUNDRY MAINTENANCE (CLOSED) - UV LAMP/VACUUM PUMPS ***
| |
| | |
| August 15, Anna Sheu, 11:00-3:00, spincoat, plasma, vacuum, bake
| |
| | |
| August 15, Barzin Doroodgar, 11-12pm, 1-2pm, spincoat, plasma, UV, vacuum, bake
| |
| | |
| August 15, Steve Shih, 11-12pm, 1-2pm, spincoat, vacuum, bake
| |
| | |
| August 15, Lian Leng, 11:00-4:30, spincoat, plasma, UV, vacuum, bake
| |
| | |
| August 15, Annie chen, 11:00-3:00, spincoat, plasma, vacuum, bake
| |
| | |
| August 14, Lian Leng, 11:00-4:00, spincoat, plasma, UV, vacuum, bake
| |
| | |
| August 14, Barzin Doroodgar, 1:00-3:00, spincoat, plasma, UV, vacuum, bake
| |
| | |
| August 14, Annie Chen, 3:30-4:00, spincoat, plasma, UV, vacuum, bake
| |
| | |
| August 14, Anna Sheu, 1:00-3:00, spincoat, plasma, UV, vacuum, bake
| |
| | |
| August 13, Anna Sheu, 1:00-2:00, spincoat, plasma, UV, vacuum, bake
| |
| | |
| August 13, Eric Wu, 11:00-2:00, 200um channels, spincoat, uv expose, substrate clean, oxy plasma, developer
| |
| | |
| August 13, Emma Brisson, 10:00-12:00, laminar hood, plasma cleaner, vacuum oven, curing oven
| |
| | |
| August 13, Michael Huang, 9:00-1:00, hot plate PVDF heat-curing
| |
| | |
| August 10, Annie Chen, 2:00-3:00, spincoat, plasma, UV, vacuum, bake
| |
| | |
| August 10, Anna Sheu, 1:00-3:00, spincoat, plasma, UV, vacuum, bake
| |
| | |
| August 9, Emma Brisson, 11:30-12:30, Vacuum oven, curing oven, laminar hood
| |
| | |
| August 8, Annie Chen, 3pm-5pm, spincoat, plasma, UV, vacuum, bake
| |
| | |
| August 8, Anna Sheu, 3pm-5pm, spincoat, plasma, UV, vacuum, bake
| |
| | |
| August 8, Steve Shih, 11am-4pm, Spin coater, Plasma, UV, Vacuum, Bake
| |
| | |
| August 8, Chris Moraes, 5:00-5:30PM, Spin coater: PDMS< using recipe #4
| |
| | |
| August 7, Steve Shih, 10am-11:30am,12:30pm-4pm, Spin Coater, Plasma, UV
| |
| | |
| August 7, Lian Leng, 10am-11:30am,12:30pm-4pm, Spin Coater, Plasma, UV
| |
| | |
| August 7, Barzin Doroodgar, 10am-11:30am,12:30pm-4pm, Spin Coater, Plasma, UV
| |
| | |
| August 7, Chris Moraes, 12:30-1PM, Spin coater: PDMS, using recipe #3
| |
| | |
| August 3, Emma Brisson, 11:00-12:00, bench, plasma cleaner
| |
| | |
| August 2, Anna Sheu, 1pm-4pm, spincoat, plasma, UV, vacuum, bake
| |
| | |
| August 2, Emma Brisson, 11:00-12:00, bench, vacuum, oven,
| |
| | |
| August 1, Eric Wu, 2:00-3:30 PDMS, Oven, Vacuum, Plasma, Nitrogen, Sonicate
| |
| | |
| August 1, Saja Al-Dujaili, 2:00-3:00, SU8 feature fabrication, bench, hot plates, spincoater, UV lamp
| |
| | |
| July 31, Saja Al-Dujaili, 10:00AM-4:00PM, PDMS casting, bench, scale, vacuum chamber, vacuum oven
| |
| | |
| July 30, Qing Xiang, 3:30-5:00pm, plasma cleaner, workstation, vacuum chamber, balance
| |
| | |
| July 27, Emma Brisson, 1:00-2:00, plasma cleaner, bench
| |
| | |
| July 26, Emma Brisson, 11:30-12:30, vacuum oven, curing oven, bench
| |
| | |
| July 26, George Ye, 10:00-11:30am and 2:00-3:40pm, SU 8 seed and feature layer fabrication, bench, hot plates, spincoater, UV lamp
| |
| | |
| July 20, Eric Wu, 2:20 - 3:20am. PDMS molding (pdms 1:10, degas, plasma onto glass)
| |
| | |
| July 20, Saja Al-Dujaili, 10:00AM-4:00PM, PDMS casting, bench, scale, vacuum chamber, vacuum oven
| |
| | |
| July 19, Saja Al-Dujaili, 10:00AM-4:00PM, PDMS casting, bench, scale, vacuum chamber, vacuum oven
| |
| | |
| July 19, George Ye, 10:30-11:30am and 2:40-3:40pm, SU 8 seed and feature layer fabrications, bench, hot plates, spincoater, UV lamp
| |
| | |
| July 19, Mel Brown, 1:00-5:00, surface functionalization, laminar hood, plasma cleaner
| |
| | |
| July 18, Emma, Michelle & Bryan, 3:30-5:00, PDMS chips, laminar hood, plasma cleaner
| |
| | |
| July 18, Emma, Michelle & Bryan, 11:30-1:00, laminar hood, vacuum oven
| |
| | |
| July 17, Saja Al-Dujaili, 2:00PM-9:00AM (July 18), PDMS casting, bench, scale, vacuum chamber, vacuum oven
| |
| | |
| July 17, George Ye, 2:00-3:30pm, SU 8 feature layer fabrication, bench, hot plates, spincoater, UV lamp
| |
| | |
| July 16, Fahad Chowdhury, 1:15pm-2pm, Spin-coater
| |
| | |
| July 16, Eric Wu, 12:00pm-2:00pm, SU8 developing and Plasma for Silanization
| |
| | |
| July 13, Saja Al-Dujaili, 9:00AM-2:00PM, SU8 feature fabrication, bench, hot plates, spincoater, UV lamp
| |
| | |
| July 12, Saja Al-Dujaili, 9:00AM-1:00PM, SU8 feature fabrication, bench, hot plates, spincoater, UV lamp
| |
| | |
| July 12, George Ye and Ron Ho, 10:30am-11:50am, SU 8 feature and master fabrication, bench, hot plates, spincoater, UV lamp
| |
| | |
| July 12, Emma Brisson, 9-11:30AM, Laminar hood, Plasma cleaner
| |
| | |
| July 11, Barzin Doroodgar, 2:00-4:00pm, SU 8 feature fabrication, bench, hot plates, spincoater, UV lamp
| |
| | |
| July 11, Mel Brown, 4:00PM-6:30PM, Laminar hood, Plasma Cleaner, Spin Coater
| |
| | |
| July 11, DEEP Program 1:30PM - 3PM
| |
| | |
| July 11,thanks to George, Steve, Siavash, Barzin, Mel, and Eric for attending the Monthly Meeting at the TMF. Please note that either attending the monthly meetings or informing us when you can't make it is mandatory for ALL users.
| |
| | |
| July 10, Eric Wu, 1:00PM-5:00PM, Spincoat, Hotplate, Oven, Plasma, Hood, Sonicator. SU8 Master Fabrication.
| |
| | |
| July 9, Siavash Aslanbeigi, 10:00AM-5:00PM, 8PM-11PM SU8 feature fabrication, bench, hot plates, spincoater, UV lamp
| |
| | |
| | |
| July 7, Siavash Aslanbeigi, 2:00PM-5:00PM, SU8 feature fabrication, bench, hot plates, spincoater, UV lamp
| |
| | |
| July 6, George Ye, 10:30-11:45am, SU 8 master and seed layer fabrication, bench, hot plates, spincoater, UV lamp
| |
| | |
| July 6, Bryan Keith, 9:00-10:00am and 1:00-3:00pm, oven, laminar hood, vacuum pump, plasma cleaner
| |
| | |
| July 5, George Ye, 10:30-11:30am, SU 8 master fabrication, bench, hot plates, spincoater, UV lamp
| |
| | |
| July 5, Siavash Aslanbeigi, 10:00AM-5:00PM, SU 8 feature fabrication, bench, hot plates, spincoater, UV lamp
| |
| | |
| June 29, Barzin Doroodgar, 1:00-4:00pm, SU 8 feature fabrication, bench, hot plates, spincoater, UV lamp, electric arc light
| |
| | |
| June 28, Barzin Doroodgar, 10:00-4:00pm, SU 8 feature fabrication, bench, hot plates, spincoater, UV lamp, electric arc light
| |
| | |
| June 27, George Ye, 3:30-5:00pm, SU 8 feature layer fabrication, bench, hot plates, spincoater, UV lamp
| |
| | |
| June 27, Fahad Chowdhury, 3:15-3:45pm, Spincoater
| |
| | |
| June 25, George Ye, 10:00-11:00am, SU 8 seed layer fabrication, bench, hot plates, spincoater, UV lamp
| |
| | |
| June 24, Chris Moraes, 2-2:30PM, Spin coater
| |
| | |
| Note: Changed the nitrogen tank for the spinner
| |
| | |
| IMPORTANT: I found the spinner in a real mess. There was resist *everywhere*. I changed the Aluminum foil liner, but there was so much SU-8 (?) there that it had already seeped through the liner, and formed a big puddle in the black bowl underneath. If whoever's made the mess could please take out that bowl and get rid of all the gunk, it would be appreciated. And please, PLEASE change the Aluminum foil liner EVERY TIME you use the spinner. It's so much easier to clean that way.
| |
| | |
| June 22, Siavash Aslanbeigi, 10:00-5:00pm, SU 8 feature fabrication, bench, hot plates, spincoater, UV lamp, electric arc light
| |
| | |
| June 21, Siavash Aslanbeigi, 10:00-4:00pm, SU 8 feature fabrication, bench, hot plates, spincoater, UV lamp, electric arc light
| |
| | |
| June 20, Siavash Aslanbeigi, 12:00-4:00pm, SU 8 feature fabrication, bench, hot plates, spincoater, UV lamp, electric arc light
| |
| | |
| June 19, Siavash Aslanbeigi, 12:00-4:00pm, SU 8 feature fabrication, bench, hot plates, spincoater, UV lamp, electric arc light
| |
| | |
| June 18, Siavash Aslanbeigi, 3:00-5:00pm, SU 8 feature fabrication, bench, hot plates, spincoater, UV lamp, electric arc light
| |
| | |
| June 18, Fahad Chowdhury, 2:15-2:45pm, Spincoater
| |
| | |
| June 15, George Ye, 2:00-3:30pm, SU 8 feature and seed layer fabrication, bench, hot plates, spincoater, UV lamp
| |
| | |
| June 14, George Ye, 2:30-4:00pm, SU 8 feature layer fabrication, bench, hot plates, spincoater, UV lamp
| |
| | |
| June 13, George Ye, 11:00am-12:00pm, SU 8 seed layer fabrication, bench, hot plates, spincoater, UV lamp
| |
| | |
| June 12, George Ye, 2:30-4:00pm, SU 8 feature layer fabrication, bench, hot plates, spincoater, UV lamp
| |
| | |
| June 11, George Ye, 2:30-3:30pm, SU 8 seed layer fabrication, bench, hot plates, spincoater, UV lamp
| |
| | |
| June 11, George Ye, 10:30am-12:30pm, SU 8 feature layer fabrication, bench, hot plates, spincoater, UV lamp
| |
| | |
| June 8, George Ye, 2:00pm-3:00pm, SU 8 seed layer, bench, hot plates, spincoater, UV lamp
| |
| | |
| June 7, George Ye, 10:30am-12:00pm, SU 8 feature layer fabrication, bench, hot plates, spincoater, UV lamp
| |
| | |
| June 7, Fahad Chowdhury, 10:45-11:45am, spincoater
| |
| | |
| June 1, George Ye, 10:30-11:30am, SU 8 feature layer fabrication, bench, hot plates, spincoater, UV lamp
| |
| | |
| May 30, Eric Wu, 1:00-2:00pm, Substrate silanization: ethanol sonication, UV plasma treatment, mercapto-propyltrimethoxy silane immerse.
| |
| | |
| May 29, Eric Wu, 10:00am-3pm, Master Fabrication: sonicate, ovendry, spincoat su8-25, UV expose, acid dissolve. PDMS stamp fabrication: pdms mix, degas, cure.
| |
| | |
| May 28, George Ye, 2:20-4:00pm, bench, spincoater, hot plates, UV lamp
| |
| | |
| May 25, George Ye, 2:45-3:30pm, bench, spincoater, hot plates, UV lamp
| |
| | |
| May 25, Qing Xiang, 1:30-2:30, workstation, oven, plasma cleaner
| |
| | |
| May 25, Qing Xiang, 11:30-12:30am, balance, vacuum chamber.
| |
| | |
| May 25, George Ye, 10:30am-12:00pm, SU-8 50 feature fabrication, bench, spincoater, hot plates, UV lamp (the screw for the adjustable platform has been tightened)
| |
| | |
| May 24, George Ye, 10:30am-12:00pm, SU-8 seed layer fabrication, bench, spincoater, hot plates, UV lamp
| |
| | |
| May 23, George Ye, 2:00-3:30pm, SU-8 50 fabrication, bench, spincoater, hot plates, UV lamp (the screw for the adjustable platform became loose, need screwdriver to tighten it)
| |
| | |
| May 23, George Ye, 10:30am-12:00pm, SU-8 seed layer, bench, spincoater, hot plates, UV lamp
| |
| | |
| May 17, George Ye & Chris Moraes, 2:00-4:00pm, SU-8 50 fabrication, recipe on computer
| |
| | |
| May 17, George Ye & Chris Moraes, 10:30-12:00am, SU-8 seed layer, recipe on computer
| |
| | |
| May 15, Qing Xiang, 3-4pm, bench, vacuum chamber, balance
| |
| | |
| May 11, Qing Xiang, 4:30-5:40pm, bench, vacuum chamber, balance, plasma cleaner
| |
| | |
| May 10, Qing Xiang, 9:45-10:20am, bench, vacuum chamber, oven, balance
| |
| | |
| May 9, Qing Xiang, 5-6pm, bench, vaccum chamber, oven, plasma cleaner and balance
| |
| | |
| May 5, CLEAN: Joint Set-up of equipment and cleaning, participants: Yali, Chris, Siavash, Barzin, Qing, Edmond, George, Axel
| |
| | |
| Apr 26, Qing Xiang, 12:15pm- 3:00pm,Oven; 5-6pm, bench, plasma cleaner, balance, vacuum chamber
| |
| | |
| Apr 23, Qing Xiang, 5:15-6:00pm, bench, Plasma cleaner, balance and vacuum chamber
| |
| | |
| Apr 16, Qing Xiang, 2:00am - 5:00pm, used: oven.
| |
| | |
| April 13, Qing Xiang, 9:30-11:00am, used: vacuum chamber; 11:00am-4:40pm, used: oven; 4:40-6:00pm, PDMS channel/glass binding, used: plazma cleaner, bench.
| |
| | |
| April 12, Qing Xiang, 10-12am, used: vacuum chamber; 12-5:00pm, used: oven; 5-5:30, used: bench.
| |
| | |
| April 4, 11-12pm, Qing Xiang, PDMS/glass chip binding, equipment used: Plazma cleaner, Bench
| |
| | |
| April 3, 3-4pm, Qing Xiang, PDMS casting, quipment used: vaccum over, heating oven, blance
| |
| | |
| Setting-up and test run of equipment, Apr 3, 4-5PM: Qing, Yali, Fahad, Axel
| |
| | |
| Master fabrication (pls edit), Apr 3, 2-3PM: Qing
| |
| | |
| Joint move to HA311 until Apr 3
| |
| | |
| Eric Wu, Suns Lab, Wed Mar 20 2007 12:00 - 13:00 PDMS microstamp fabrication. Thin stamp fabrication by sandwiching a glass slide with the master. A rigid backing for the stamp was created by attaching the thin stamp to oxidized glass.
| |
| | |
| Devon Huber, Guenther Lab, Tue Mar 20 14:00 - 15:00 PDMS stamp fabrication
| |
| | |
| Eric Wu, Suns Lab, Tue Mar 19 2007 13:30 - 15:00 Microstamp Master Fabrication
| |
| | |
| Eric Wu, Suns Lab, Mon Mar 18 2007 12:30 - 13:00 Plasma on silanized glass for protein transfer prep.
| |
| | |
| Alex Rhee, Chan Lab, Tues Mar 13 2007 10:30PM-12AM. Plasma cleaner on PDMS slabs.
| |
| | |
| Please DO NOT FORGET to SIGN IN after usage. Thank you!
| |
| | |
| Edmond Young, Simmons Lab, Fri Feb 23 2007, 1:30-3:30 PM Fab: SU-8-25 spincoat with Program #22, soft-bake, UV exposure for 9 sec. post-bake, develop
| |
| | |
| Joint cleaning, Thu Feb 22, 4:00-5:30 PM
| |
| | |
| ==ADVANCE BOOKING==
| |
| If you plan to use the lab in the future, please submit your times in advance to prevent double bookings. Note that for all times outside the normal working hours (workdays 9AM-5PM), you are only allowed to fabricate if you bring a second trained person with you.
| |
|
| |
|
| ==PURCHASING INFORMATION== | | ==PURCHASING INFORMATION== |
| ===Consumables===
| |
| a. WEIGH BOATS:
| |
| Large Hexagonal Antistatic Polystyrene Weigh Boats (4" x 3"), pk/500, $28.01 Sku 2136-25433-104
| |
| Source: Medstore
| |
|
| |
|
| b. KIM WIPES: Order box of 24
| | ===[[TMFConsumables|. Consumables]]=== |
| Source: Medstore
| |
|
| |
|
| c. BETA WIPES: 9"x9", 50/pack, order > 3 packs
| | ===[[TMFPhotomasks|. Photomasks]]=== |
|
| |
|
| d. VACUUM PUMP OIL:
| | ===[[TMFOther Equipment|. Other Equipment]]=== |
| Source: VWR
| |
|
| |
|
| e. NITRILE GLOVES: sizes S, M, L, XL
| | Contact information for spin coater maintenance: |
| Source: Medstore or VWR
| | Don Stephens |
| | Technical Support SCS |
| | 7645 Woodland Dr. |
| | Indianapolis, IN. 46278 |
| | Ph.: 317-244-1200 ext. 260 |
| | Fax: 317-240-2739 |
| | E-mail: dstephens@scscoatings.com |
|
| |
|
| f. SOLVENTS: acetone, methanol, 2propanol, ethanol
| | ==[[TMFRecipes | RECIPE DUMP]]== |
| order in 4L bottles, cleanroom grade
| | Dump your numbered fabrication recipes here. |
| Source: Sigma Aldrich or Medstore
| | [[TMFRecipes | Recipe Dump]] |
|
| |
|
| g. MICROSCOPE SLIDES: 3" x 1", VWR, Cat No: 48323-180
| | ==LAB SAFETY== |
|
| |
|
| h. WATER-PROOF MARKERS/PENS: black, Medstore, VWR, Staples
| | Access to the foundry requires users to be compliant with the [http://www.ehs.utoronto.ca/Home.htm UofT health and Safety regulations] and to be individually trained at the equipment. Users that don't fulfill these requirements are denied access. |
| order ~ 2 boxes
| |
|
| |
|
| i. CLEANROOM SWABS: Fisher Scientific, part number 18-385 (made by Texwipe).
| | Waste will be picked up from the Foundry on every second Monday starting March 10, 2008. |
| ~100 in a package. order 2 packs
| |
|
| |
|
| j. STOP WATCHES: order 2
| | There are separate containers for liquid chemical waste under the fume hood. Please separate your liquid waste accordingly. |
| Source: Medstore
| |
|
| |
|
| k. PARAFILM: oder 1 box 4"x125 ft, Medstore
| | There is a sharp's box beside the waste container. Sharps (glass, needles, blades, etc.) are to be disposed here, NOT in regular waste. |
|
| |
|
| ===Purchasing Photomasks===
| | Bulk SU-8 and liquid PDMS waste are to be disposed of in their respective bags in the blue oil drum outside the cleanroom. This is NOT to be disposed of in regular waste. |
| | |
| --Microart Services Inc.---------- | |
| Tel: 905 709 2244
| |
| Fax: 905 709 1873
| |
| 50 West Beaver Creek,
| |
| Richmond Hill, ON,
| |
| L4B 1G5
| |
| | |
| Steps:
| |
| 1 - Convert your file into a .gerber file. I use LinkCad.
| |
| | |
| 2 - Send your file to padplot@primus.ca
| |
| | |
| 3 - Call the company and tell him about it, make sure he knows where
| |
| to ship it, etc.
| |
| | |
| 4 - When you recieve the invoice & photomask, have Sheila Baker send a
| |
| cheque out to him. The company only accepts cheques. You'll need Axel
| |
| to sign the invoice with an account #.
| |
| | |
| Ships in 1 day, comes the next day.
| |
| -------------------------------------
| |
| | |
| --www.photoplotstore.com--------------------
| |
| 1-888-821-1748
| |
| they're based somewhere in the US
| |
| | |
| Steps:
| |
| 1 - Convert your file to .gerber
| |
| | |
| 2 - Click the grid size you want (ie 1/8 mil, 1/20 mil), it should be
| |
| the first thing you see under "Precision Laser Photoplots". also, 1
| |
| mil = 25 um
| |
| | |
| 3 - Upload your file
| |
| | |
| 4 - Fill out the payment form
| |
| | |
| 5 - Call him (cuz last time i didn't and he didn't do anything)
| |
| | |
| Also ships in 1 day, comes next day.
| |
| ------------------------------------------------
| |
| | |
| I find Microart has better quality transparencies, but
| |
| www.photoplotstore.com has higher precision photoplotters.
| |
| | |
| -Eric
| |
| | |
| ===RECIPE DUMP===
| |
| Dump your numberred fabrication recipes here (note the date).
| |
| | |
| '''
| |
| A. TO FABRICATE STRAIGHT WALL ON THICK SU-8 SAMPLE'''
| |
| | |
| '''Problem:''' The features has a large overhanging edge near the top; the walls were slanted
| |
| | |
| '''Cause:''' the photomask was not pressed firmly against the photofilm which causes UV light to leak around the photomask apertures
| |
| | |
| '''Solution:''' before exposure, cover the photomask with a large piece of 3x2 inches glass. Then, apply two thick stacks (10-15) microscope slides on either sides of the cover glass to be used as weight.
| |
| | |
| '''Protocol:'''
| |
| | |
| '''Dehydration bake:'''
| |
| | |
| 1. Dehydration bake @ 200 degrees for about 15 minutes
| |
| | |
| '''Spincoating:'''
| |
| | |
| 1. 500RPM DWELL: 10s ACCELERATION: 10s
| |
| | |
| 2. 2000RPM DWELL: 30s ACCELERATION: 5s
| |
| | |
| 3. 0RPM DWELL: 0s ACCELERATION: 10s
| |
| | |
| '''Pre-exposure bake:'''
| |
| | |
| 1. 7 minutes @ 65 degrees
| |
| | |
| 2. 20 minutes @ 95 degrees
| |
| | |
| 3. allowed to cool to room temperature
| |
| | |
| '''Exposure:'''
| |
| | |
| 1. cover the photomask as described above
| |
| | |
| 2. UV exposure for 20 seconds
| |
| | |
| '''Post-exposure bake:'''
| |
| | |
| 1. 2 minutes @ 65 degrees
| |
| | |
| 2. 7 minutes @ 95 degrees
| |
| | |
| 3. 2 minutes @ 65 degrees
| |
| | |
| '''Develop:'''
| |
| | |
| 1. Develop in 20ml of developer with mild to strong agitation for 20 minutes
| |
| | |
| 2. Replace with 20ml of fresh developer
| |
| | |
| 3. Develop further for another 20 minutes
| |
| | |
| | |
| | |
| An excel file with a fairly generic parameter table has been created on the desktop of the common computer in the fabrication lab. If you could input all your SU-8 fabrication data there, it'd be very useful. Thanks, Chris.
| |
| | |
| ===LAB SAFETY===
| |
| | |
| Access to the foundry requires users to be complient with the [http://www.ehs.utoronto.ca/Home.htm UofT health and Safety regulations] and to be individually trained by a member of Dr. Guenther's group at the equipment. Users that don't fulfill these requirements are denied access.
| |
| | |
| Waste will be picked up from the Foundry on every second Monday starting March 10, 2008.
| |
|
| |
|
| ==EVENTS== | | ==EVENTS== |
| [http://mfl.mie.utoronto.ca/Ontario-on-a-Chip/ "Ontario-on-a-Chip", May 15, 2008]
| | * SmallTalks Event: TBA |
|
| |
|
| ==OTHER FACILITIES== | | ==OTHER FACILITIES== |
