TorontoMicrofluidicsFoundry: Difference between revisions

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The Toronto Microfluidics Foundry is a part of the brand-new Centre for Microfluidic System in Chemistry and Biology (CMS). It provides a flexible environment for the fabrication and integration of polymer-based microfluidic devices and consists of two dedicated Class 1000 cleanroom spaces.  Users need to be trained according to the  [http://www.ehs.utoronto.ca/Home.htm UofT Health and Safety regulations] as well as individually at the equipment and need to attend monthly user meetings. Fulfilling these requirements is a prerequisite for maintaining active user status.


Foundry use is available for a user fee. The facility has been established with financial support from the [http://www.innovation.ca/en Canada Foundation of Innovation], the [http://www.mri.gov.on.ca/english/default.asp Ontario Ministry for Research & Innovation], and the [http://www.nserc-crsng.gc.ca/index_eng.asp National Sciences and Engineering Research Council of Canada].


The Toronto Microfluidics Foundry is a flexible environment for the fabrication and integration of polymer-based microfluidic devices and complements [http://www.ecti.utoronto.ca/site3.aspx ECTI], the central cleanroom facility  at the [http://www.utoronto.ca University of Toronto]. Users need to be trained according to the  [http://www.ehs.utoronto.ca/Home.htm UofT Health and Safety regulations] as well as individually at the equipment and need to attend monthly user meetings. Fulfilling these requirements is a prerequisite for maintaining active user status.
== [http://foundry-reserv.mie.utoronto.ca EQUIPMENT SIGN-UP & RESERVATION] ==
==News==


[PTC] THE FOUNDRY WILL RE-OPEN ON WEDNESDAY, Feb 11, 2009 at 10AM. Please try to attend. All Users are required to contact the Process Technology Committee (PTC-Foundry[at]mie[dot]utoronto[dot]ca) prior to obtaining access and regaining active user status.


==Location==
MC405, Phone: (416) 948-6851


==Process Technology Committee (PTC)==
The purposes of signing up for equipment is:
The PTC is designed to maintain and improve process standards at the Toronto Microfluidic Foundry. General functions of the PTC are:
1) to keep track of user hours for financial management of the facility
2) to make sure equipment is available when you need it.
Please DO NOT FORGET to sign up for the equipment you will use (or have used).


- Approve requests for any new fabrication process
NEW RESERVATION SYSTEM


- Provide suggestions for (changes in) user policies and fabrication protocols where needed
This new system allows you to reserve each equipment for the time needed.
http://foundry-reserv.mie.utoronto.ca/


- Match new users with experienced ones for training
To view all equipments booking of the day: http://foundry-reserv.mie.utoronto.ca/today.asp?lab=8


- Make suggestions for improvements of the facility and set priorities with respect to equipment upgrade/ acquisition of new equipment
Please contact the Process Technology Committee (PTC-Foundry[at]mie[dot]utoronto[dot]ca) to get your new username and password set up.


- Provide short updates at Foundry Meetings
Note: you need to email the Process Technology Committee (PTC-Foundry[at]mie[dot]utoronto[dot]ca) to process after hours/on weekends.


==NEWS==


New users must attend the training session after the monthly Foundry meeting prior to any fabrication.  Fabrication hours are Monday to Friday, 9:00 A.M. to 5:00 P.M.  After hours and weekend usage is not permitted.


The serving members of the PTC are:
==LOCATION: MC405, Phone: 8-6851==


- [http://www.mie.utoronto.ca/staff/profiles/guenther Dr. Axel Guenther]
==[[TMFPeople | PEOPLE]]==
List and contact information of active users of the facility, and for the process technology committee (PTC)


- Lian Leng
This is a multi-user facility that is supported by a number of UofT research groups. You should adhere to the lab rules (safety, signup, participation in joint info/cleaning sessions) in order to maintain active user status.  Click [[TMFPeople | here]] for a list of active users.


- [http://www.mie.utoronto.ca/labs/mechanobio/people/current/chris_moraes/chris.php Christopher Moraes]
The PTC is designed to maintain and improve process standards at the Toronto Microfluidic Foundry.  Click [[TMFPeople | here]] for a list of current members. General functions of the PTC are:


- Omar F. Khan
- Approve requests for any new fabrication process


- Provide suggestions for (changes in) user policies and fabrication protocols where needed


The PTC can be contacted though the following e-mail address:
- Match new users with experienced ones for training


PTC-Foundry[at]mie[dot]utoronto[dot]ca
- Make suggestions for improvements of the facility and set priorities with respect to equipment upgrade/ acquisition of new equipment


==Who we are==
- Provide short updates at Foundry Meetings
This is a multi-user facility that is supported by a number of UofT research groups. You should adhere to the lab rules (safety, signup, participation in joint info/cleaning sessions) in order to maintain active user status. Active users are:
 
[http://www.mie.utoronto.ca/staff/profiles/guenther Dr. Axel Guenther], e-mail: axel[dot]guenther[at]utoronto[dot]ca, (416) 978-1282 (office)
 
Lian Leng (Guenther group), e-mail: lian[dot]leng[at]utoronto[dot]ca, (416) 946-8210
 
[http://www.mie.utoronto.ca/labs/mechanobio/people/current/chris_moraes/chris.php Christopher Moraes] (Simmons and Sun group), e-mail:  chris[dot]moraes[at]utoronto[dot]ca, (416) 978-8660 (Simmons group), (416) 978-8663 (Sun group)
 
Omar F. Khan (Sefton group), e-mail:  titaniumkid[dot]khan[at]utoronto[dot]ca, (416) 978-6518;
 
Yali Gao (Chan group), e-mail: ylgao[at]mie[dot]utoronto[dot]ca, (647) 233-1207, (416) 946-0015 (lab)
 
Siavash Aslanbeigi, e-mail: cya[dot]aslanbeigi[at]utoronto[dot]ca, (416) 946-8210 or 8-3050 (lab)
 
Sanjesh Yasotharan, e-mail: sanjesh[dot]yasotharan[at]utoronto[dot]ca, (416) 948-3050 (lab)
 
Saja Al-Dujaili, e-mail: s[dot]al[dot]dujaili[at]utoronto[dot]ca, (416) 946-8210 (lab)
 
Lian Leng, e-mail: lian[dot]leng[at]utoronto[dot]ca, (416) 946-8210 (lab)
 
Faisal Moledina, e-mail: faisal[dot]moledina[at]utoronto[dot]ca, (416) 946-8210 (lab)
 
[http://www.mie.utoronto.ca/labs/mechanobio/people/current/edmond_young/edmond.php Edmond Young], e-mail: edmyoung[at]mie[dot]utoronto[dot]ca, (416) 978-8660
 
Fahad Chowdhury (Radisic group), e-mail: fahad[dot]chowdhury[at]utoronto[dot]ca, (416) 946-5322
 
Mel Brown (Radisic group), e-mail: mel[dot]brown[at]utoronto[dot]ca, (416) 946-5322
 
[http://www.mie.utoronto.ca/labs/mechanobio/people/current/chris_moraes/chris.php Christopher Moraes], e-mail:  chris[dot]moraes[at]utoronto[dot]ca, (416) 978-8660 (Simmons group), (416) 978-8663 (Sun group)
 
[http://amnl.mie.utoronto.ca/index.php?page=team Eric Wu], e-mail: e[dot]wu[at]utoronto[dot]ca, (647) 895-1275
 
[http://amnl.mie.utoronto.ca/index.php?page=team Xinyu Liu], e-mail: xyliu[at]mie[dot]utoronto[dot]ca, (416) 978-8663
 
Karin Yaccato (Chan group), e-mail: karin[dot]yaccato[at]utoronto[dot]ca; kyaccato[at]gmail[dot]com, (416) 946-0015
 
Qing Xiang (Chan group), e-mail: qing_xiang2003[at]yahoo[dot]ca, (416) 946-0015
 
George Ye (Simmons group), (416) 978-8660; e-mail:  george[dot]ye[at]utoronto[dot]ca
 
Omar F. Khan (Sefton group), (416) 978-6518; e-mail:  titaniumkid[dot]khan[at]utoronto[dot]ca
 
Yan Zhao (You group) (416) 978-1097; e-mail:  michelle[dot]zhao[at]utoronto[dot]ca
 
Bogdan Beca (Simmons group), (416) 978-8660; e-mail:  b[dot]beca[at]utoronto[dot]ca
 
[http://www.ibbme.utoronto.ca/about/staff.htm Bryan Keith (IBBME Teaching Lab)], e-mail: bryan[dot]keith[at]utoronto[dot]ca, (416) 978-1467
 
Nika Shakiba (Chan group), e-mail: nika[dot]shakiba[at]utoronto[dot]ca
 
==Meetings==
 
'''Please note that either attending the monthly meetings or informing us when you can't make it is mandatory for ALL users.'''
 
(a) no solvents, epoxy, PDMS debris allowed in laminar-flow hood
 
(b) always remove protective sheets at counter tops when dirty
 
(c) regularly organize pickup of solid waste
 
(d) order and restock supplies:
- see emailed list
 
(e) don't turn off the right oven
 
(f) all new summer students need to (I) see Axel, (II) have Health & Safety training and (III) need to be trained in the foundry before getting access
 
(g) regularly clean up after yourself and others, report more persistent cleanliness issues
 
(h) update on new equipment and new facility
 
==Supplies needed==


===Ordered===
- Discussion through our LISTERV account is also encouraged: MICROFLUIDICSFOUNDRY-L[at]listserv[dot]utoronto[dot]ca


Enter the ordered items here.


===Received===
For all inquires about facility and access, or new users please contact the PTC at PTC-foundry<at>mie<dot>utoronto<dot>ca


Enter received supplies here
==[[TMFMeetings and Training | MEETINGS AND TRAINING]]==
'''Please note that either attending the monthly meetings or informing us when you can't make it is mandatory for ALL users.  Training sessions are held after monthly meetings and are mandatory for new users.'''


==Equipment usage log==
New User Form:
http://mfl.mie.utoronto.ca/PDF/CMS-Fab-Form-2012.pdf


Date, machine name, problem description. All users are requested to record hours spent in the Foundry
Upcoming meetings:


Wednesdays
Jan. 16,Feb. 13, March 13, and April 17, 2013
@ 4pm in MC404A


Please DO NOT FORGET to SIGN IN after usage. Thank you!
==SUPPLIES NEEDED==
 
Please contact the PTC if supplies are running low.
==ADVANCE BOOKING==
If you plan to use the lab in the future, please submit your times in advance to prevent double bookings. Note that for all times outside the normal working hours (workdays 9AM-5PM), you are only allowed to fabricate if you bring a second trained person with you.


==PURCHASING INFORMATION==
==PURCHASING INFORMATION==
===Consumables===
a. WEIGH BOATS:
Large Hexagonal Antistatic Polystyrene Weigh Boats (4" x 3"), pk/500, $28.01 Sku 2136-25433-104
Source: Medstore


b. KIM WIPES: Order box of 24
===[[TMFConsumables|.     Consumables]]===
Source: Medstore


c. BETA WIPES: 9"x9", 50/pack, order > 3 packs
===[[TMFPhotomasks|.     Photomasks]]===


d. VACUUM PUMP OIL:
===[[TMFOther Equipment|.     Other Equipment]]===
Source: VWR


e. NITRILE GLOVES: sizes S, M, L, XL
Contact information for spin coater maintenance:
Source: Medstore or VWR
Don Stephens
Technical Support SCS
7645 Woodland Dr.
Indianapolis, IN. 46278
Ph.: 317-244-1200 ext. 260
Fax: 317-240-2739
E-mail: dstephens@scscoatings.com


f. SOLVENTS: acetone, methanol, 2propanol, ethanol
==[[TMFRecipes | RECIPE DUMP]]==
order in 4L bottles, cleanroom grade
Dump your numbered fabrication recipes here.
Source: Sigma Aldrich or Medstore
[[TMFRecipes | Recipe Dump]]


g. MICROSCOPE SLIDES: 3" x 1", VWR, Cat No: 48323-180
==LAB SAFETY==


h. WATER-PROOF MARKERS/PENS: black, Medstore, VWR, Staples
Access to the foundry requires users to be compliant with the  [http://www.ehs.utoronto.ca/Home.htm UofT health and Safety regulations] and to be individually trained at the equipment. Users that don't fulfill these requirements are denied access.
order ~ 2 boxes


i. CLEANROOM SWABS: Fisher Scientific, part number 18-385 (made by Texwipe).
Waste will be picked up from the Foundry on every second Monday starting March 10, 2008.
~100  in  a package. order 2 packs
 
j. STOP WATCHES: order 2
Source: Medstore
 
k. PARAFILM: oder 1 box 4"x125 ft, Medstore
 
===Purchasing Photomasks===
 
--Microart Services Inc.----------
Tel: 905 709 2244
Fax: 905 709 1873
50 West Beaver Creek,
Richmond Hill, ON,
L4B 1G5
 
Steps:
1 - Convert your file into a .gerber file. I use LinkCad.
 
2 - Send your file to padplot@primus.ca
 
3 - Call the company and tell him about it, make sure he knows where 
to ship it, etc.
 
4 - When you recieve the invoice & photomask, have Sheila Baker send a 
cheque out to him. The company only accepts cheques. You'll need Axel 
to sign the invoice with an account #.
 
Ships in 1 day, comes the next day.
-------------------------------------
 
--www.photoplotstore.com--------------------
1-888-821-1748 - NOW OUT OF BUSINESS
 
===RECIPE DUMP===
Dump your numberred fabrication recipes here (note the date).
 
'''
A. TO FABRICATE STRAIGHT WALL ON THICK SU-8 SAMPLE'''
 
'''Problem:''' The features has a large overhanging edge near the top; the walls were slanted
 
'''Cause:''' the photomask was not pressed firmly against the photofilm which causes UV light to leak around the photomask apertures
 
'''Solution:''' before exposure, cover the photomask with a large piece of 3x2 inches glass. Then, apply two thick stacks (10-15) microscope slides on either sides of the cover glass to be used as weight.
 
'''Protocol:'''
 
'''Dehydration bake:'''
 
1. Dehydration bake @ 200 degrees for about 15 minutes
 
'''Spincoating:'''
 
1. 500RPM  DWELL: 10s  ACCELERATION: 10s
 
2. 2000RPM DWELL: 30s  ACCELERATION: 5s
 
3. 0RPM    DWELL: 0s    ACCELERATION: 10s
 
'''Pre-exposure bake:'''
 
1. 7 minutes @ 65 degrees
 
2. 20 minutes @ 95 degrees
 
3. allowed to cool to room temperature
 
'''Exposure:'''
 
1. cover the photomask as described above
 
2. UV exposure for 20 seconds
 
'''Post-exposure bake:'''
 
1. 2 minutes @ 65 degrees
 
2. 7 minutes @ 95 degrees
 
3. 2 minutes @ 65 degrees
 
'''Develop:'''


1. Develop in 20ml of developer with mild to strong agitation for 20 minutes
There are separate containers for liquid chemical waste under the fume hood. Please separate your liquid waste accordingly.


2. Replace with 20ml of fresh developer
There is a sharp's box beside the waste container. Sharps (glass, needles, blades, etc.) are to be disposed here, NOT in regular waste.


3. Develop further for another 20 minutes
Bulk SU-8 and liquid PDMS waste are to be disposed of in their respective bags in the blue oil drum outside the cleanroom. This is NOT to be disposed of in regular waste.
 
 
 
An excel file with a fairly generic parameter table has been created on the desktop of the common computer in the fabrication lab.  If you could input all your SU-8 fabrication data there, it'd be very useful.  Thanks,  Chris.
 
===LAB SAFETY===
 
Access to the foundry requires users to be complient with the [http://www.ehs.utoronto.ca/Home.htm UofT health and Safety regulations] and to be individually trained by a member of Dr. Guenther's group at the equipment. Users that don't fulfill these requirements are denied access.
 
Waste will be picked up from the Foundry on every second Monday starting March 10, 2008.


==EVENTS==
==EVENTS==
[http://mfl.mie.utoronto.ca/Ontario-on-a-Chip/ "Ontario-on-a-Chip", May 15, 2008]
* SmallTalks Event: TBA


==OTHER FACILITIES==
==OTHER FACILITIES==

Latest revision as of 14:31, 20 December 2012

The Toronto Microfluidics Foundry is a part of the brand-new Centre for Microfluidic System in Chemistry and Biology (CMS). It provides a flexible environment for the fabrication and integration of polymer-based microfluidic devices and consists of two dedicated Class 1000 cleanroom spaces. Users need to be trained according to the UofT Health and Safety regulations as well as individually at the equipment and need to attend monthly user meetings. Fulfilling these requirements is a prerequisite for maintaining active user status.

Foundry use is available for a user fee. The facility has been established with financial support from the Canada Foundation of Innovation, the Ontario Ministry for Research & Innovation, and the National Sciences and Engineering Research Council of Canada.

EQUIPMENT SIGN-UP & RESERVATION

The purposes of signing up for equipment is: 1) to keep track of user hours for financial management of the facility 2) to make sure equipment is available when you need it. Please DO NOT FORGET to sign up for the equipment you will use (or have used).

NEW RESERVATION SYSTEM

This new system allows you to reserve each equipment for the time needed. http://foundry-reserv.mie.utoronto.ca/

To view all equipments booking of the day: http://foundry-reserv.mie.utoronto.ca/today.asp?lab=8

Please contact the Process Technology Committee (PTC-Foundry[at]mie[dot]utoronto[dot]ca) to get your new username and password set up.

Note: you need to email the Process Technology Committee (PTC-Foundry[at]mie[dot]utoronto[dot]ca) to process after hours/on weekends.

NEWS

New users must attend the training session after the monthly Foundry meeting prior to any fabrication. Fabrication hours are Monday to Friday, 9:00 A.M. to 5:00 P.M. After hours and weekend usage is not permitted.

LOCATION: MC405, Phone: 8-6851

PEOPLE

List and contact information of active users of the facility, and for the process technology committee (PTC)

This is a multi-user facility that is supported by a number of UofT research groups. You should adhere to the lab rules (safety, signup, participation in joint info/cleaning sessions) in order to maintain active user status. Click here for a list of active users.

The PTC is designed to maintain and improve process standards at the Toronto Microfluidic Foundry. Click here for a list of current members. General functions of the PTC are:

- Approve requests for any new fabrication process

- Provide suggestions for (changes in) user policies and fabrication protocols where needed

- Match new users with experienced ones for training

- Make suggestions for improvements of the facility and set priorities with respect to equipment upgrade/ acquisition of new equipment

- Provide short updates at Foundry Meetings

- Discussion through our LISTERV account is also encouraged: MICROFLUIDICSFOUNDRY-L[at]listserv[dot]utoronto[dot]ca


For all inquires about facility and access, or new users please contact the PTC at PTC-foundry<at>mie<dot>utoronto<dot>ca

MEETINGS AND TRAINING

Please note that either attending the monthly meetings or informing us when you can't make it is mandatory for ALL users. Training sessions are held after monthly meetings and are mandatory for new users.

New User Form: http://mfl.mie.utoronto.ca/PDF/CMS-Fab-Form-2012.pdf

Upcoming meetings:

Wednesdays Jan. 16,Feb. 13, March 13, and April 17, 2013 @ 4pm in MC404A

SUPPLIES NEEDED

Please contact the PTC if supplies are running low.

PURCHASING INFORMATION

. Consumables

. Photomasks

. Other Equipment

Contact information for spin coater maintenance: Don Stephens Technical Support SCS 7645 Woodland Dr. Indianapolis, IN. 46278 Ph.: 317-244-1200 ext. 260 Fax: 317-240-2739 E-mail: dstephens@scscoatings.com

RECIPE DUMP

Dump your numbered fabrication recipes here. Recipe Dump

LAB SAFETY

Access to the foundry requires users to be compliant with the UofT health and Safety regulations and to be individually trained at the equipment. Users that don't fulfill these requirements are denied access.

Waste will be picked up from the Foundry on every second Monday starting March 10, 2008.

There are separate containers for liquid chemical waste under the fume hood. Please separate your liquid waste accordingly.

There is a sharp's box beside the waste container. Sharps (glass, needles, blades, etc.) are to be disposed here, NOT in regular waste.

Bulk SU-8 and liquid PDMS waste are to be disposed of in their respective bags in the blue oil drum outside the cleanroom. This is NOT to be disposed of in regular waste.

EVENTS

  • SmallTalks Event: TBA

OTHER FACILITIES

ECTI - UofT's Central Cleanroom - Bahen Center (BA), 7th floor

Center for Imaging Cellular Function (UHN, PMH), 2nd floor Discovery Tower at MaRS

Institute for Optical Sciences (excimer laser facilities), 3rd floor, Physics Building Side Wing

CMC, Microfabrication Service Provider for Canadian Universities, located at Queens University campus, Kingston, ON

Dolomite, commercial vendor for microfluidic glass chips related to microreactor company Syrris, UK

Micronit, Commercial independent vendor for microfluidic glass chips, NL

Stanford Microfluidics Foundry

Center for Engineering in Medicine, MGH