TorontoMicrofluidicsFoundry

The Toronto Microfluidics Foundry is a flexible environment for the fabrication and integration of polymer-based microfluidic devices and complements ECTI, the central cleanroom facility at the University of Toronto. Users need to be trained according to the UofT Health and Safety regulations as well as individually at the equipment and need to attend monthly user meetings. Fulfilling these requirements is a prerequisite for maintaining active user status.

News

Location

Haultain Building, Room HA311 (416) 946-8210

Who we are

This is a multi-user facility that is supported by a number of UofT research groups. You should adhere to the lab rules (safety, signup, participation in joint info/cleaning sessions) in order to maintain active user status. Active users are:

Dr. Axel Guenther, e-mail: axel.guenther@utoronto.ca, (416) 978-1282

Yali Gao, e-mail: ylgao@mie.utoronto.ca, (647) 233-1207, (416) 946-8210 (lab)

Barzin Doroodgar, e-mail: barzin.doroodgar@utoronto.ca, (416) 946-8210 (lab)

Siavash Aslanbeigi, e-mail: cya.aslanbeigi@utoronto.ca, (416) 946-8210 (lab)

Steve Shih, e-mail: steve.shih@utoronto.ca, (416) 946-8210 (lab)

Saja Al-Dujaili, e-mail: s.al.dujaili@utoronto.ca, (416) 946-8210 (lab)

Lian Leng, e-mail: lian.leng@utoronto.ca, (416) 946-8210 (lab)

Brendan MacDonald, e-mail: brendan.macdonald@utoronto.ca, (416) 978-3050 (lab)

Faisal Moledina, e-mail: faisal.moledina@utoronto.ca, (416) 946-8210 (lab)

Amir Manbachi, e-mail: amir.manbachi@utoronto.ca

Edmond Young, e-mail: edmyoung@mie.utoronto.ca, (416) 978-8660

Fahad Chowdhury, e-mail: fahad.chowdhury@utoronto.ca, (Radisic group), (416) 946-5322

Mel Brown, e-mail: mel.brown@utoronto.ca, (Radisic group), (416) 946-5322

Christopher Moraes, e-mail: chris.moraes@utoronto.ca, (416) 978-8660 (Simmons group), (416) 978-8663 (Sun group)

Eric Wu, e-mail: e.wu@utoronto.ca, (647) 895-1275

Xinyu Liu, e-mail: xyliu@mie.utoronto.ca, (416) 978-8663

Pablo Neiman, e-mail: pneiman@mie.utoronto.ca, (416) 978-8663

Qing Xiang, e-mail: qing_xiang2003@yahoo.ca, (416) 946-0015

George Ye, Simmons Group (416) 978-8660; email: george.ye@utoronto.ca

Yoan Kagoma, Simmons Group (416) 978-8660; email: yoan.kagoma@utoronto.ca

Omar F. Khan, Sefton Lab (416) 978-6518; email: titaniumkid.khan@utoronto.ca

Bryan Keith, IBBME Teaching Laboratory, e-mail: bryan.keith@utoronto.ca, (416) 978-1467

Meetings

Please note that either attending the monthly meetings or informing us when you can't make it is mandatory for ALL users.

Thursday April 24, 3-4PM, HA311

(a) no solvents, epoxy, PDMS debris allowed under hood

(b) remove protective sheets at counter tops when dirty

(c) organize pickup of solid waste (Faisal)

(d) order: - oil for vacuum pumps - gloves: 1x S, 1x M, 1x L, 1x XL

(e) don't turn off the right oven

(f) all new summer students need to (I)see Axel, (II) have Health & Safety training and (III) need to be trained in the foundry before getting access

(g) cleaning

(h) new equipment

Supplies needed

Chan Lab:

Sun Lab:

Simmons Lab:

Radisic Lab:

IBBME Teaching Lab:

MIE414F Teaching Lab:

Guenther Lab:

Ordered

Enter the ordered items here.

Received

Enter received supplies here

Equipment usage log

Date, machine name, problem description. All users are requested to record hours spent in the Foundry.

Apr 16, 800-1000am, omar, spin coater, hood, UV

Apr 16, 6:40-7:40am, axel, curing oven, vacuum chamber

Apr 15, 7:40-8:40am, axel, digital scale, vacuum chamber cleaned benches, ** please keep counters clean - thanks **

Apr 15, 800-830am, omar, digital scale, vacuum chamber

Apr 14, 2-4pm, Qing, Bench, plasma, digital scale, vacuum chamber

Apr 14, 930-1130, omar, spin coater, plasma, UV

Apr 10, 15:00-17:00, omar, Spin coater, UV lamp, hood

Apr 8, 2-4pm, Qing, Bench, plasma, digital scale, vacuum chamber

Mar 26, 4-5pm, Karin (Chan lab), Bench, plasma, digital scale,

Mar 26, 3:30-4:40pm, Qing, Bench, plasma, digital scale, vacuum chamber

Mar 24, 1:45-2:15, Fahad, Spin coater, hood

March 20, 1:00-2:00 Eric, UV exposure ULA dow corning dishes

Mar 25, 9:20-9:35, Chris, Spin coater

Mar 18, 10:00-11:00, omar, plasma cleaner

Mar 18. 10-12am, Qing, Bench, plasma, digital scale, vacuum chamber

Mar 17, 1830-1840, Chris, Spin coater

Mar 17, 9:00-16:30, Brendan, plasma clean, spin coater, UV exposure

Mar 17, 9:00-16:30, Lian, plasma clean, spin coater, UV exposure

Mar 14, 1120-1300, Chris, UV exposure and spin coater

Mar 13, 13:00-14:00, Omar, spin coater.

Mar 13, 8:45-9 am, 12:15-12:30 pm, Yoan, spin coater.

Mar 12, 2:30-2:45 pm, Yoan, spin coater.

Mar 11, 3:45-4 pm, Yoan, spin coater.

Mar 7, 12:50 - 1:15, Chris, UV exposure

Mar 4, 12:00 pm - 12:00 pm (24 hrs), Eric, dessicator.

Mar 3, 2:30pm-3:30pm, Fahad, spin coater

Mar3, 12:00 pm - 12:00 pm (24 hrs), Eric, dessicator.

Mar 2, 3:45-4 pm, Yoan, spin coater.

Mar 2, 2-3:15pm, Qing, Bench, plasma, digital scale, vacuum chamber

Feb 25, 1-2pm, Karin (Chan Group), bench, plasma,

Feb 25, 2:00pm - 2:00pm (24 hour) Eric Wu, dessicator

Feb 21, 10:30am - 4:30pm, Faisal, plasma clean, spin coater, UV exposure

Feb 21, 6-6:20PM, Chris, Spin Coater Recipe #4

Feb 21, 2-3pm, Qing, Oven, Bench, Plasma,

Feb 20, 6:15-6:30, Yoan, spin coater.

Feb 20, 4PM - 4:30PM, UV exposure

Feb 20, 4-4:15pm Nitrogen, 4:15-4:30pm plasma cleaner, 4:30-7pm hood space

Feb 20, 11:00am - 1:00pm, 1:45 - 5:00pm, Faisal, plasma clean, spin coater, UV exposure

Feb 20, 2-3:45pm, Qing, Oven, Bench, Plasma,

Feb 19, Overnight 4:00pm-4:00pm, Eric Wu, Dessicator, Silanization.

Feb 18, 4:50-5:10PM, Chris, UV exposure

Feb 18, 1:00-1:30PM, Chris, UV Exposure

Feb 15, 10:00-5:00pm, Brendan, plasma clean, spin coater, UV exposure

Feb 15, 9:30-5:00pm, Lian, plasma clean, spin coater, UV exposure

Feb 14, 10-10:30, Yoan, spin coater. PROBLEM: spin coater not registering cover as closed. (this has been fixed)

Feb 14, 9-10 am, Qing, plasma, workstation

Feb 13, 2:50-4:20, Mel, plasma, spin coater - Nitrogen tank changed

Feb 11, 12-4pm, Steve, plasma, spin coater, UV exposure, Develop

Feb 9, 7:15PM-7:30PM, Chris: spin coater

Feb 7, 11:30am-12:15pm, Mel, plasma, spin coat

Feb 5, 1:30-2:30pm, Qing, plasma, workstation,

Feb 5, 2:00pm-2:45pm, Mel, plasma cleaner

Feb 4, 2:00pm-5:00pm, Faisal, plasma clean, spin coater, UV exposure

Feb 4, 3:00pm-4:00pm, Fiona, spin coater

Feb 4, 2:00pm-4:00pm, Steve, plasma clean, spin coater, UV exposure

Feb 4, 10:00-12:00, Saja, work bench, UV exposure, plasma cleaner

Feb 3, 12:00pm-3:00pm, Steve, plasma clean, spin coater, UV exposure

Feb 2, 12:00pm-4:00pm, Steve, plasma clean, spin coater, UV exposure

Feb 2, 9:00-9:30am, Saja, balance, vacuum oven

February 1, 9:00am-3:00pm, Lian, plasma clean, spin coater, UV exposure

Jan 31, 1:30pm-2:15pm, Mel, spin coater

Jan 31, 2:00-7:00pm, Saja, plasma cleaner, spin coater, UV exposure

Jan 30, 1:00-5:00pm, Saja, plasma cleaner, spin coater, UV exposure

Jan 30, 12:30-1:15, Yoan, spin coater.

Jan 30, 2:30pm-3:30pm, Mel, spin coater

Jan 29, 1:00pm-2:00pm, Eric, plasma, ethanol wash

Jan 29, 2:00pm-2:30pm, Fiona, spin coater

Jan 29, 9:00am-4:00pm, Brendan, plasma cleaner, spin coater, UV exposure

Jan 29, 9:00am-4:00pm, Lian, plasma cleaner, spin coater, UV exposure

Jan 28, 3:00-3:15, Chris, Spin Coater. Fixed the vacuum problem: hard whitish polymer in the chuck blocking the vacuum line - scraped out with pointed scalpel.

Jan 28, 11:45-12:00, Chris, Spin Coater. PROBLEM: Vacuum chuck not maintaining vacuum. Not enough time to attempt fixes.

Jan 25, 2:00 - 3:00, Mel, Spin coater

Jan 25, 11:00 am - 4:00 pm, Faisal, plasma, spin coater, UV, hot plates

Jan 22, 4:00 - 5:00, Eric, PDMS + Oven + Vacuum

Jan 21, 10:15am-10:30am, Eric, Sonication + Plasma cleaner

Jan 21, 10-11am, 3:30-4:00pm, Qing, plasma, workstation, digital scale, vacuum chamber

Jan 21, 12:15-12:45pm, Fahad, spin coater

Jan 21, 9:00am-4:00pm, Brendan, plasma cleaner, spin coater, UV exposure

Jan 21, 9:00am-4:00pm, Lian, plasma cleaner, spin coater, UV exposure

Jan 17, 12:00-12:30, Chris & Yoan, spin coater

Jan 17, 9:00-9:30am, Omar, plasma cleaner

Jan 16, 3:45-4:30pm, Mel, spin coater

Jan 16, 10:00am-4:00pm, Lian, plasma cleaner, spin coater, UV exposure

Jan 16, 9:00-9:45am, Omar, plasma cleaner

Jan 15, 9:30-11:00am, 5-6:00pm, Qing, plasma, workstation, digital scale, vacuum chamber

Jan 15, 9:00am-5:00pm, Lian, plasma cleaner, spin coater, UV system

Jan 15, 9:00-9:30am, Omar, plasma cleaner

Jan 14, 9:00-10:00am, Omar, plasma cleaner

Jan 11, 15:00-18:00, Omar, Spin coater, UV system

Jan 10, 3:00-4:50pm, Qing, plasma, workstation, digital balance, vacuum chamber

Jan 10, 9:00 - 10:00, Omar Khan, plasma cleaner, PROBLEM: N2 Tanks Empty

Jan 10-11:00pm, Qing, digital balance, vacuum chamber, Oven

Jan 9, 13:45 - 14:30, Omar Khan, Digital balance, oven

Jan 7, 11:45, Fiona Rask, spin coater, could not use, PROBLEM: VACUUM NOT WORKING!

Dec 20, 11:00-3:00, Brendan MacDonald, spin coater, UV system, plasma cleaner

Dec 19, 11:00-3:00, Brendan MacDonald, spin coater, UV system, plasma cleaner

Dec 19, 10:00-2:00, Saja Al-Dujaili, spin coater, UV system, plasma cleaner

Dec 18, 2:30 - 4:00, Brendan MacDonald, spin coater, UV system, plasma cleaner

Dec 18, 9:00 - 10:00, Omar, plasma cleaner

Dec 17, 2:30 - 4:30, Brendan MacDonald, spin coater, UV system, plasma cleaner

Dec 17, 12:30 - 13:00, Fahad, spin coater

Dec 13, 8:30 - 9:30, omar, spin coater, 13:00-13:30 UV System

Dec 13, 9:30 - 14:00, omar, spin coater, UV system

Dec 12, 17:00 - 18:00, omar, plasma cleaner

Dec 12, 8:00 - 9:00, omar, plasma cleaner

Dec 11, 15:20 - 15:45, omar, plasma cleaner

Dec 11, 9:40-10:50am, Qing, plasma, workstation, digital balance, vacuum chamber

Dec 7, 11:00-14:30, omar, spin coater, UV system

Dec 7, 9:30-10:15am, Qing, plasma, workstation

Dec 6, 9:30-10:15am, Qing, plasma, workstation, digital balance, vacuum chamber

Dec 6, 9:30-9:45am, Fahad, spin coater

Dec 5, 13:00-15:30, Omar, spin coater, UV system

Dec 5, 8:30 - 10:00, Omar, spin coater, UV system

Dec 4, 1:50pm, Qing, plasma, workstation

Dec 4, 12:30-13:00, plasma cleaner

Nov 30, 1:40-2:40pm, Qing, plasma, workstation, oven

Nov 29, 10:00-11:30am, Qing, plasma, workstation, digital balance, vacuum chamber, oven

Nov 28, 3:00-3:30pm, Qing, digital balance, vacuum chamber

Nov 27, 9:00am-12:00pm, Omar Khan, spin coater, UV system, plasma cleaner

Nov 26, 3:30-4:00pm Qing, digital balance, vacuum chamber

Nov 26, 1:30-1:45pm, Fahad, spin coater

Nov 23, 9:00 - 3:00pm, Steve Shih, spin coater, UV system, plasma cleaner

Nov 23, 10:00-11:30 am, 1:30-3:30 pm, Faisal Moledina, spin coater, UV system, plasma cleaner

Nov 22, 2:00-3:00pm, Qing, plasma, workstation, digital balance, vacuum chamber, oven

Nov 21, 4:00-4:30pm, Qing, plasma, workstation, digital balance, oven

Nov 22, 11:00-4:00pm, Brendan MacDonald, spin coater, UV system, plasma cleaner

Nov 22, 11:00-4:00pm, Lian Leng, spin coater, UV system, plasma cleaner

Nov 21, 6:45-7PM, Christopher Moraes, Spinner

Nov. 21, 1:30-3:30, Saja Al-Dujaili, bench, UV system, microscope, plasma cleaner

Nov 21, 10:00am-2:00pm, Brendan MacDonald, spin coater, UV system, plasma cleaner

Nov 20, 1:00 - 2:30 pm, Qing, plasma, workstation, digital balance, vacuum chamber, oven

Nov 19, 2:30-4:00pm, Qing, plasma, workstation, digital balance, vacuum chamber, oven

Nov. 20, 1:00-4:00, Saja Al-Dujaili, bench, UV system, microscope, plasma cleaner

Nov 20, 7:00 - 11:30, Omar Khan, spin coater, UV system, plasma cleaner, bench, laminar flow hood, UV lamp

Nov 19, 13:30 - 15:30, Omar Khan, digital balance, vacuum chamber, oven

Nov 19, 1:45-2:15, Fahad Chowdhury, spin coater

Nov 19, 10:30-11:30, 3:15-3:30 Saja Al-Dujaili, digital balance, vacuum chamber, oven.

Nov 19, 10:00-12:00, Brendan MacDonald, spin coater, UV system, plasma cleaner

Nov 19, 10:00-12:00, Lian Leng, spin coater, UV system, plasma cleaner

Nov 19, 9:00-12:00, Omar Khan, spin coater, UV system, plasma cleaner, bench, laminar flow hood

Nov 16, 10:40-2:00, Omar Khan, spin coater, UV system, plasma cleaner, bench, laminar flow hood

Nov 16, 10:40-2:00, Saja Al-Dujaili, spin coater, UV system, plasma cleaner, bench, laminar flow hood

Nov 12, 1:45-3:00pm, Qing,plasma cleaner, workstation, digital balance, vacuum chamber

Nov 9, 9:15-9:45 Saja Al-Dujaili, laminar flow hood

Nov 8, 2:00-2:15, 3:15-3:30 Saja Al-Dujaili, digital balance, vacuum chamber, oven.

Nov 7, 3:30-5pm, Qing Xiang, plasma cleaner, workstation, digital balance, vacuum chamber

Nov 7, 4:00-4:20pm, Lian Leng, plasma cleaner, oven.

Nov 6, 5:00-5:40pm, Lian Leng, plasma cleaner, oven.

Nov 6, 1-3pm, Qing, plasma cleaner, workstation, digital balance, vacuum chamber.

Nov 5, 2-4pm, Qing, plasma cleaner, workstation, digital balance, vacuum chamber.

Nov 5, Mel Brown, fume hood 1:30-3:30, plasma cleaner 1:30-1:45

Nov 5, 12:30-1:00pm, Lian Leng, plasma cleaner, oven.

Oct 30, Mel Brown, fume hood 1-3:30, plasma cleaner 1:15-1:45 - could not use equipment as

       nitrogen tanks empty (required for first step).

Oct 22, Qing Xiang, Workstation, vacuum chamber, plasma, and balance.

When I was using Plasm cleaner, initially no plasma produced. Found that the tube line of the Plasma cleaner is disconnected to the oven, it is not working since the vacuum is not high enough. After connecting the tube, it works well. Just remind everyone, check the line and make sure it is not disconnected.

Oct 19, 4:00-6:00pm, Lian Leng, balance, vacuum chamber, oven.

Oct 18, Qing Xiang, workstation, vacuum chamber and balance

October 15, Fahad Chowdhury, 11:45-12:15, Spin-coat

October 2, Fahad Chowdhury, 14:15-14:45, Spin-coat

October 2, Eric Wu, 15:00-16:00, weight scale, plasma, bench, vacuum, oven

October 2, Mel Brown, 11:00am-2pm, plasma cleaner (11:00-11:30), fume hood

October 1, Lian Leng, 1:00pm-5:00pm, Su-8 Spincoat,Bake, UV expose, develop

October 1, Fahad Chowdhury, 11:00am-12:45pm, Spin-coat

Eric Wu - Sept 26, 11:00-12:00, expose, develop

Eric Wu - Sept 25, 4:00-5:00, su8 spincoat, bake, uv expose, develop

Eric Wu - Sept 24, 12:30 - 2:00, SU8-2050, spincoater, uv plasma, oven, nitrogen, sonicator

Qing Xiang, used workstation, plasma, Spet 20, 11:30-12:30am, no problem

September 19, George Ye, 6:15-7:15pm, SU 8 feature layer fabrication, hot plates, UV lamp, spincoater

September 19, George Ye, 9:30-10:40am, SU 8 feature layer fabrication, hot plates, UV lamp, spincoater

September 18, George Ye, 5:30-7:00pm, Su 8 seed layer fabrication, hot plates, UV lamp, spincoater

September 18, September Monthly Meeting. Participants: Steve, Fahad, Mel, 2:30-3:30PM

September 13, Chris Moraes, 3:40-4:10: spin coating PDMS

September 12, Eric Wu, 3:30 - 6:00, plasma, pdms, oven, hood

September 11, Melissa Brown, 12:30-3:00, plasma cleaner (12:30-1:00 only) and hood

September 5, Barzin Doroodgar, 12:00-1:00, spincoat, UV, bake

August 30, Emma Brisson, 4:30-5:00, plasma cleaner and hood

August 30, Emma Brisson, 10:00-10:15, balance and vacuum chamber

August 29, Eric Wu, 10:00am - 9:00pm, SU8-25, Plasma, Acetone/Isopropanol Clean, Sonicator, Nitrogen, Hood, Vaccum, Hotplates, Oven.

August 29, Emma Brisson, 4:00-5:00; plasma cleaner, hood

August 28, Eric Wu, 3:00 - 5:00, SU8-25, Plasma, Acetone/Isopropanol Clean, Sonicator, Nitrogen, Hood, Vaccum, Hotplates, Oven.

August 28, Emma Brisson, 11:45-12:45, plasma cleaner, hood

August 27, Emma Brisson, 3:30-4:15, plasma cleaner, hood

Aug 24, Qing Xiang, 5:00-5:30pm, blance, vacuum chamber

August 24, Eric Wu, 12:40 - 12:50, (Protein removal from stamps: UV plasma, ethanol sonication)

August 24, Emma Brisson, 1:30-2:30, plasma cleaner and hood

August 23, Emma Brisson, 12:30-1:30, 3:30-3:45, plasma cleaner and hood

August 23, Eric Wu, 12:00 - 12:10, (Protein removal from stamps: UV plasma, ethanol sonication)

August 22, Eric Wu, 12:00 - 12:05 (Prepare surface for silanization mix adsorption: UV plasma)

August 21, Emma Brisson, 10:30-11, hood, vacuum oven, curing oven, 4-5 plasma cleaner

August 21, Melissa Brown, 2:00-5:00pm, hood, 2:30-3:00pm, plasma cleaner

August 21, Eric Wu, 1:00 - 1:10 (Protein removal: UV Plasma, Ethanol Sonication)

- - AUGUST 16 - FOUNDRY MAINTENANCE (CLOSED) - UV LAMP/VACUUM PUMPS ***

August 15, Anna Sheu, 11:00-3:00, spincoat, plasma, vacuum, bake

August 15, Barzin Doroodgar, 11-12pm, 1-2pm, spincoat, plasma, UV, vacuum, bake

August 15, Steve Shih, 11-12pm, 1-2pm, spincoat, vacuum, bake

August 15, Lian Leng, 11:00-4:30, spincoat, plasma, UV, vacuum, bake

August 15, Annie chen, 11:00-3:00, spincoat, plasma, vacuum, bake

August 14, Lian Leng, 11:00-4:00, spincoat, plasma, UV, vacuum, bake

August 14, Barzin Doroodgar, 1:00-3:00, spincoat, plasma, UV, vacuum, bake

August 14, Annie Chen, 3:30-4:00, spincoat, plasma, UV, vacuum, bake

August 14, Anna Sheu, 1:00-3:00, spincoat, plasma, UV, vacuum, bake

August 13, Anna Sheu, 1:00-2:00, spincoat, plasma, UV, vacuum, bake

August 13, Eric Wu, 11:00-2:00, 200um channels, spincoat, uv expose, substrate clean, oxy plasma, developer

August 13, Emma Brisson, 10:00-12:00, laminar hood, plasma cleaner, vacuum oven, curing oven

August 13, Michael Huang, 9:00-1:00, hot plate PVDF heat-curing

August 10, Annie Chen, 2:00-3:00, spincoat, plasma, UV, vacuum, bake

August 10, Anna Sheu, 1:00-3:00, spincoat, plasma, UV, vacuum, bake

August 9, Emma Brisson, 11:30-12:30, Vacuum oven, curing oven, laminar hood

August 8, Annie Chen, 3pm-5pm, spincoat, plasma, UV, vacuum, bake

August 8, Anna Sheu, 3pm-5pm, spincoat, plasma, UV, vacuum, bake

August 8, Steve Shih, 11am-4pm, Spin coater, Plasma, UV, Vacuum, Bake

August 8, Chris Moraes, 5:00-5:30PM, Spin coater: PDMS< using recipe #4

August 7, Steve Shih, 10am-11:30am,12:30pm-4pm, Spin Coater, Plasma, UV

August 7, Lian Leng, 10am-11:30am,12:30pm-4pm, Spin Coater, Plasma, UV

August 7, Barzin Doroodgar, 10am-11:30am,12:30pm-4pm, Spin Coater, Plasma, UV

August 7, Chris Moraes, 12:30-1PM, Spin coater: PDMS, using recipe #3

August 3, Emma Brisson, 11:00-12:00, bench, plasma cleaner

August 2, Anna Sheu, 1pm-4pm, spincoat, plasma, UV, vacuum, bake

August 2, Emma Brisson, 11:00-12:00, bench, vacuum, oven,

August 1, Eric Wu, 2:00-3:30 PDMS, Oven, Vacuum, Plasma, Nitrogen, Sonicate

August 1, Saja Al-Dujaili, 2:00-3:00, SU8 feature fabrication, bench, hot plates, spincoater, UV lamp

July 31, Saja Al-Dujaili, 10:00AM-4:00PM, PDMS casting, bench, scale, vacuum chamber, vacuum oven

July 30, Qing Xiang, 3:30-5:00pm, plasma cleaner, workstation, vacuum chamber, balance

July 27, Emma Brisson, 1:00-2:00, plasma cleaner, bench

July 26, Emma Brisson, 11:30-12:30, vacuum oven, curing oven, bench

July 26, George Ye, 10:00-11:30am and 2:00-3:40pm, SU 8 seed and feature layer fabrication, bench, hot plates, spincoater, UV lamp

July 20, Eric Wu, 2:20 - 3:20am. PDMS molding (pdms 1:10, degas, plasma onto glass)

July 20, Saja Al-Dujaili, 10:00AM-4:00PM, PDMS casting, bench, scale, vacuum chamber, vacuum oven

July 19, Saja Al-Dujaili, 10:00AM-4:00PM, PDMS casting, bench, scale, vacuum chamber, vacuum oven

July 19, George Ye, 10:30-11:30am and 2:40-3:40pm, SU 8 seed and feature layer fabrications, bench, hot plates, spincoater, UV lamp

July 19, Mel Brown, 1:00-5:00, surface functionalization, laminar hood, plasma cleaner

July 18, Emma, Michelle & Bryan, 3:30-5:00, PDMS chips, laminar hood, plasma cleaner

July 18, Emma, Michelle & Bryan, 11:30-1:00, laminar hood, vacuum oven

July 17, Saja Al-Dujaili, 2:00PM-9:00AM (July 18), PDMS casting, bench, scale, vacuum chamber, vacuum oven

July 17, George Ye, 2:00-3:30pm, SU 8 feature layer fabrication, bench, hot plates, spincoater, UV lamp

July 16, Fahad Chowdhury, 1:15pm-2pm, Spin-coater

July 16, Eric Wu, 12:00pm-2:00pm, SU8 developing and Plasma for Silanization

July 13, Saja Al-Dujaili, 9:00AM-2:00PM, SU8 feature fabrication, bench, hot plates, spincoater, UV lamp

July 12, Saja Al-Dujaili, 9:00AM-1:00PM, SU8 feature fabrication, bench, hot plates, spincoater, UV lamp

July 12, George Ye and Ron Ho, 10:30am-11:50am, SU 8 feature and master fabrication, bench, hot plates, spincoater, UV lamp

July 12, Emma Brisson, 9-11:30AM, Laminar hood, Plasma cleaner

July 11, Barzin Doroodgar, 2:00-4:00pm, SU 8 feature fabrication, bench, hot plates, spincoater, UV lamp

July 11, Mel Brown, 4:00PM-6:30PM, Laminar hood, Plasma Cleaner, Spin Coater

July 11, DEEP Program 1:30PM - 3PM

July 11,thanks to George, Steve, Siavash, Barzin, Mel, and Eric for attending the Monthly Meeting at the TMF. Please note that either attending the monthly meetings or informing us when you can't make it is mandatory for ALL users.

July 10, Eric Wu, 1:00PM-5:00PM, Spincoat, Hotplate, Oven, Plasma, Hood, Sonicator. SU8 Master Fabrication.

July 9, Siavash Aslanbeigi, 10:00AM-5:00PM, 8PM-11PM SU8 feature fabrication, bench, hot plates, spincoater, UV lamp

July 7, Siavash Aslanbeigi, 2:00PM-5:00PM, SU8 feature fabrication, bench, hot plates, spincoater, UV lamp

July 6, George Ye, 10:30-11:45am, SU 8 master and seed layer fabrication, bench, hot plates, spincoater, UV lamp

July 6, Bryan Keith, 9:00-10:00am and 1:00-3:00pm, oven, laminar hood, vacuum pump, plasma cleaner

July 5, George Ye, 10:30-11:30am, SU 8 master fabrication, bench, hot plates, spincoater, UV lamp

July 5, Siavash Aslanbeigi, 10:00AM-5:00PM, SU 8 feature fabrication, bench, hot plates, spincoater, UV lamp

June 29, Barzin Doroodgar, 1:00-4:00pm, SU 8 feature fabrication, bench, hot plates, spincoater, UV lamp, electric arc light

June 28, Barzin Doroodgar, 10:00-4:00pm, SU 8 feature fabrication, bench, hot plates, spincoater, UV lamp, electric arc light

June 27, George Ye, 3:30-5:00pm, SU 8 feature layer fabrication, bench, hot plates, spincoater, UV lamp

June 27, Fahad Chowdhury, 3:15-3:45pm, Spincoater

June 25, George Ye, 10:00-11:00am, SU 8 seed layer fabrication, bench, hot plates, spincoater, UV lamp

June 24, Chris Moraes, 2-2:30PM, Spin coater

Note: Changed the nitrogen tank for the spinner

IMPORTANT: I found the spinner in a real mess. There was resist *everywhere*. I changed the Aluminum foil liner, but there was so much SU-8 (?) there that it had already seeped through the liner, and formed a big puddle in the black bowl underneath. If whoever's made the mess could please take out that bowl and get rid of all the gunk, it would be appreciated. And please, PLEASE change the Aluminum foil liner EVERY TIME you use the spinner. It's so much easier to clean that way.

June 22, Siavash Aslanbeigi, 10:00-5:00pm, SU 8 feature fabrication, bench, hot plates, spincoater, UV lamp, electric arc light

June 21, Siavash Aslanbeigi, 10:00-4:00pm, SU 8 feature fabrication, bench, hot plates, spincoater, UV lamp, electric arc light

June 20, Siavash Aslanbeigi, 12:00-4:00pm, SU 8 feature fabrication, bench, hot plates, spincoater, UV lamp, electric arc light

June 19, Siavash Aslanbeigi, 12:00-4:00pm, SU 8 feature fabrication, bench, hot plates, spincoater, UV lamp, electric arc light

June 18, Siavash Aslanbeigi, 3:00-5:00pm, SU 8 feature fabrication, bench, hot plates, spincoater, UV lamp, electric arc light

June 18, Fahad Chowdhury, 2:15-2:45pm, Spincoater

June 15, George Ye, 2:00-3:30pm, SU 8 feature and seed layer fabrication, bench, hot plates, spincoater, UV lamp

June 14, George Ye, 2:30-4:00pm, SU 8 feature layer fabrication, bench, hot plates, spincoater, UV lamp

June 13, George Ye, 11:00am-12:00pm, SU 8 seed layer fabrication, bench, hot plates, spincoater, UV lamp

June 12, George Ye, 2:30-4:00pm, SU 8 feature layer fabrication, bench, hot plates, spincoater, UV lamp

June 11, George Ye, 2:30-3:30pm, SU 8 seed layer fabrication, bench, hot plates, spincoater, UV lamp

June 11, George Ye, 10:30am-12:30pm, SU 8 feature layer fabrication, bench, hot plates, spincoater, UV lamp

June 8, George Ye, 2:00pm-3:00pm, SU 8 seed layer, bench, hot plates, spincoater, UV lamp

June 7, George Ye, 10:30am-12:00pm, SU 8 feature layer fabrication, bench, hot plates, spincoater, UV lamp

June 7, Fahad Chowdhury, 10:45-11:45am, spincoater

June 1, George Ye, 10:30-11:30am, SU 8 feature layer fabrication, bench, hot plates, spincoater, UV lamp

May 30, Eric Wu, 1:00-2:00pm, Substrate silanization: ethanol sonication, UV plasma treatment, mercapto-propyltrimethoxy silane immerse.

May 29, Eric Wu, 10:00am-3pm, Master Fabrication: sonicate, ovendry, spincoat su8-25, UV expose, acid dissolve. PDMS stamp fabrication: pdms mix, degas, cure.

May 28, George Ye, 2:20-4:00pm, bench, spincoater, hot plates, UV lamp

May 25, George Ye, 2:45-3:30pm, bench, spincoater, hot plates, UV lamp

May 25, Qing Xiang, 1:30-2:30, workstation, oven, plasma cleaner

May 25, Qing Xiang, 11:30-12:30am, balance, vacuum chamber.

May 25, George Ye, 10:30am-12:00pm, SU-8 50 feature fabrication, bench, spincoater, hot plates, UV lamp (the screw for the adjustable platform has been tightened)

May 24, George Ye, 10:30am-12:00pm, SU-8 seed layer fabrication, bench, spincoater, hot plates, UV lamp

May 23, George Ye, 2:00-3:30pm, SU-8 50 fabrication, bench, spincoater, hot plates, UV lamp (the screw for the adjustable platform became loose, need screwdriver to tighten it)

May 23, George Ye, 10:30am-12:00pm, SU-8 seed layer, bench, spincoater, hot plates, UV lamp

May 17, George Ye & Chris Moraes, 2:00-4:00pm, SU-8 50 fabrication, recipe on computer

May 17, George Ye & Chris Moraes, 10:30-12:00am, SU-8 seed layer, recipe on computer

May 15, Qing Xiang, 3-4pm, bench, vacuum chamber, balance

May 11, Qing Xiang, 4:30-5:40pm, bench, vacuum chamber, balance, plasma cleaner

May 10, Qing Xiang, 9:45-10:20am, bench, vacuum chamber, oven, balance

May 9, Qing Xiang, 5-6pm, bench, vaccum chamber, oven, plasma cleaner and balance

May 5, CLEAN: Joint Set-up of equipment and cleaning, participants: Yali, Chris, Siavash, Barzin, Qing, Edmond, George, Axel

Apr 26, Qing Xiang, 12:15pm- 3:00pm,Oven; 5-6pm, bench, plasma cleaner, balance, vacuum chamber

Apr 23, Qing Xiang, 5:15-6:00pm, bench, Plasma cleaner, balance and vacuum chamber

Apr 16, Qing Xiang, 2:00am - 5:00pm, used: oven.

April 13, Qing Xiang, 9:30-11:00am, used: vacuum chamber; 11:00am-4:40pm, used: oven; 4:40-6:00pm, PDMS channel/glass binding, used: plazma cleaner, bench.

April 12, Qing Xiang, 10-12am, used: vacuum chamber; 12-5:00pm, used: oven; 5-5:30, used: bench.

April 4, 11-12pm, Qing Xiang, PDMS/glass chip binding, equipment used: Plazma cleaner, Bench

April 3, 3-4pm, Qing Xiang, PDMS casting, quipment used: vaccum over, heating oven, blance

Setting-up and test run of equipment, Apr 3, 4-5PM: Qing, Yali, Fahad, Axel

Master fabrication (pls edit), Apr 3, 2-3PM: Qing

Joint move to HA311 until Apr 3

Eric Wu, Suns Lab, Wed Mar 20 2007 12:00 - 13:00 PDMS microstamp fabrication. Thin stamp fabrication by sandwiching a glass slide with the master. A rigid backing for the stamp was created by attaching the thin stamp to oxidized glass.

Devon Huber, Guenther Lab, Tue Mar 20 14:00 - 15:00 PDMS stamp fabrication

Eric Wu, Suns Lab, Tue Mar 19 2007 13:30 - 15:00 Microstamp Master Fabrication

Eric Wu, Suns Lab, Mon Mar 18 2007 12:30 - 13:00 Plasma on silanized glass for protein transfer prep.

Alex Rhee, Chan Lab, Tues Mar 13 2007 10:30PM-12AM. Plasma cleaner on PDMS slabs.

Please DO NOT FORGET to SIGN IN after usage. Thank you!

Edmond Young, Simmons Lab, Fri Feb 23 2007, 1:30-3:30 PM Fab: SU-8-25 spincoat with Program #22, soft-bake, UV exposure for 9 sec. post-bake, develop

Joint cleaning, Thu Feb 22, 4:00-5:30 PM

ADVANCE BOOKING

If you plan to use the lab in the future, please submit your times in advance to prevent double bookings. Note that for all times outside the normal working hours (workdays 9AM-5PM), you are only allowed to fabricate if you bring a second trained person with you.

PURCHASING INFORMATION

Purchasing Photomasks

--Microart Services Inc.---------- Tel: 905 709 2244 Fax: 905 709 1873 50 West Beaver Creek, Richmond Hill, ON, L4B 1G5

Steps: 1 - Convert your file into a .gerber file. I use LinkCad.

2 - Send your file to padplot@primus.ca

3 - Call the company and tell him about it, make sure he knows where to ship it, etc.

4 - When you recieve the invoice & photomask, have Sheila Baker send a cheque out to him. The company only accepts cheques. You'll need Axel to sign the invoice with an account #.

Ships in 1 day, comes the next day.

--www.photoplotstore.com-------------------- 1-888-821-1748 they're based somewhere in the US

Steps: 1 - Convert your file to .gerber

2 - Click the grid size you want (ie 1/8 mil, 1/20 mil), it should be the first thing you see under "Precision Laser Photoplots". also, 1 mil = 25 um

3 - Upload your file

4 - Fill out the payment form

5 - Call him (cuz last time i didn't and he didn't do anything)

Also ships in 1 day, comes next day.

I find Microart has better quality transparencies, but www.photoplotstore.com has higher precision photoplotters.

-Eric

RECIPE DUMP

Dump your numberred fabrication recipes here (note the date).

A. TO FABRICATE STRAIGHT WALL ON THICK SU-8 SAMPLE

Problem: The features has a large overhanging edge near the top; the walls were slanted

Cause: the photomask was not pressed firmly against the photofilm which causes UV light to leak around the photomask apertures

Solution: before exposure, cover the photomask with a large piece of 3x2 inches glass. Then, apply two thick stacks (10-15) microscope slides on either sides of the cover glass to be used as weight.

Protocol:

Dehydration bake:

1. Dehydration bake @ 200 degrees for about 15 minutes

Spincoating:

1. 500RPM DWELL: 10s ACCELERATION: 10s

2. 2000RPM DWELL: 30s ACCELERATION: 5s

3. 0RPM DWELL: 0s ACCELERATION: 10s

Pre-exposure bake:

1. 7 minutes @ 65 degrees

2. 20 minutes @ 95 degrees

3. allowed to cool to room temperature

Exposure:

1. cover the photomask as described above

2. UV exposure for 20 seconds

Post-exposure bake:

1. 2 minutes @ 65 degrees

2. 7 minutes @ 95 degrees

3. 2 minutes @ 65 degrees

Develop:

1. Develop in 20ml of developer with mild to strong agitation for 20 minutes

2. Replace with 20ml of fresh developer

3. Develop further for another 20 minutes

An excel file with a fairly generic parameter table has been created on the desktop of the common computer in the fabrication lab. If you could input all your SU-8 fabrication data there, it'd be very useful. Thanks, Chris.

LAB SAFETY

Access to the foundry requires users to be complient with the UofT health and Safety regulations and to be individually trained by a member of Dr. Guenther's group at the equipment. Users that don't fulfill these requirements are denied access.

Waste will be picked up from the Foundry on every second Monday starting March 10, 2008.