UA Biophysics:Protocols:Master fabrication: Difference between revisions
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(New page: 1. Go to cleanroom 2. Put master in spinner using dirty tape 3. Pour photoresist (SC 1827) on glass slide until it covers all the surface on the master 4. Spin at 5000 RPM for 60s with a r...) |
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1. Go to cleanroom | 1. Go to cleanroom<br> | ||
2. Put master in spinner using dirty tape | 2. Put master in spinner using dirty tape<br> | ||
3. Pour photoresist (SC 1827) on glass slide until it covers all the surface on the master | 3. Pour photoresist (SC 1827) on glass slide until it covers all the surface on the master<br> | ||
4. Spin at 5000 RPM for 60s with a ramp of 500 RPM/s | 4. Spin at 5000 RPM for 60s with a ramp of 500 RPM/s<br> | ||
5. Remove carefully | 5. Remove carefully<br> | ||
6. Place in hot plate @ 140°C for 50s | 6. Place in hot plate @ 140°C for 50s<br> | ||
7. Turn on computer and then SF-100 (first down and then up) | 7. Turn on computer and then SF-100 (first down and then up)<br> | ||
8. Set monitor to list 2 | 8. Set monitor to list 2<br> | ||
9. Set lamp power to "on" | 9. Set lamp power to "on"<br> | ||
10. Display game controller-calibrate joystick | 10. Display game controller-calibrate joystick<br> | ||
11. Set direct control to "on" | 11. Set direct control to "on"<br> | ||
12. Set microstepping to "off" | 12. Set microstepping to "off"<br> | ||
13. Set manual speed to 0.02 (more zeroes means faster) | 13. Set manual speed to 0.02 (more zeroes means faster)<br> | ||
[[UA Biophysics:Protocols|Return to Protocols]]<br> |
Latest revision as of 14:15, 31 July 2015
1. Go to cleanroom
2. Put master in spinner using dirty tape
3. Pour photoresist (SC 1827) on glass slide until it covers all the surface on the master
4. Spin at 5000 RPM for 60s with a ramp of 500 RPM/s
5. Remove carefully
6. Place in hot plate @ 140°C for 50s
7. Turn on computer and then SF-100 (first down and then up)
8. Set monitor to list 2
9. Set lamp power to "on"
10. Display game controller-calibrate joystick
11. Set direct control to "on"
12. Set microstepping to "off"
13. Set manual speed to 0.02 (more zeroes means faster)