User:Bohao Liu/Notebook/Research/2013/11/01: Difference between revisions
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== | ==Microfluidics Facility Adventures== | ||
===Materials to Bring=== | |||
*Wafers | |||
*Masks | |||
*Photoresist if its not already there | |||
*Developer | |||
*A positive outlook on life | |||
====Things to check when you get there==== | |||
*There is isopropanol | |||
*There is Acetone | |||
*The waste isn't full | |||
===Safety Things=== | |||
*Safety glasses | |||
*Gloves | |||
*Booties | |||
*Lab coat | |||
*Hairnet | |||
*Dispose of things correctly in the right containers | |||
*Check the hood is working | |||
===General Protocol=== | |||
====Spinning==== | |||
#Check everything is working in the vacuum chuck with random wafer | |||
##Turn on vacuum | |||
##Aluminum foil everything | |||
#Put on wafer, pour on photoresist | |||
#Check spin parameters | |||
**Today I did 500 rpm, ramp of 5, dwell of 10 then 1900 rpm, ramp of 5, dwell of 30. | |||
**Next time should go longer on the 1900 rpm spin to get the resist more even, though 1900 is pretty good rpm, maybe even a little slower like 1800 since I got around 42 μm today. | |||
===Soft Bake=== | |||
#3 mins 65°C | |||
#5 mins 95°C | |||
#Follow the data sheet directions | |||
===Masks and UV=== | |||
#Glass plate with mask inkside facing down to the wafer | |||
#Turn on vacuum, flip the switch on the left on the table that engages vacuum | |||
#Adjust Z-direction so that it is touching | |||
#Set exposure | |||
**Used 25 seconds today seemed to work fine | |||
#Press the rotate button thingy on the right | |||
===Hard Bake=== | |||
#3 mins 65°C | |||
#8 mins 95°C | |||
#Follow the data sheet directions | |||
===Develop=== | |||
#Developer | |||
#Air-dry | |||
#Don't isopropanol wash | |||
===Hard Bake=== | |||
#30 mins at 160 °C | |||
===Check height=== | |||
#Use machine | |||
#Remember to move up z before resetting it | |||
===Clean everything=== | |||
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Revision as of 15:20, 1 November 2013
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Microfluidics Facility AdventuresMaterials to Bring
Things to check when you get there
Safety Things
General ProtocolSpinning
Soft Bake
Masks and UV
Hard Bake
Develop
Hard Bake
Check height
Clean everything |