Image:PN 186 sensor 45deg 08a big.PNG

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SEM Image by M. P. de Boer at Sandia National Labs of a MEMS force sensor. See http://link.aip.org/link/?APL/89/173901

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current00:59, 26 March 20071,024×768 (589 KB)Steven J. Koch (Talk | contribs) (SEM Image by M. P. de Boer at Sandia National Labs of a MEMS force sensor. See http://link.aip.org/link/?APL/89/173901)

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