XAS:Equipment/ZEISS: GeminiSEM 300

DESCRIPTION

FEATURES Resolution 0.8 nm at 15 kV 1.4 nm at 1 kV 1.7 nm at a chamber pressure of 30 Pa and at 3 kV Acceleration Voltage 0.02 - 30 kV Probe Current 3 pA - 20 nA Magnification 12 - 2000000 X Electron Emitter Thermal field emission type (stability better than 0,2%/h) Frame Store Up to 32k x 24k pixels Specimen Stage 5-axes motorized eucentric specimen stage X=130 mm; Y=130 mm; Z=50 mm